Underlayer composition and method of manufacturing a semiconductor device
US-2024369932-A1 · Nov 7, 2024 · US
US9696620B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9696620-B2 |
| Application number | US-201514692496-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 21, 2015 |
| Priority date | Apr 23, 2014 |
| Publication date | Jul 4, 2017 |
| Grant date | Jul 4, 2017 |
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A composition includes a photoacid generator and a fluorine-containing epoxy resin that is a polymer of monomers that include an acrylic monomer (a) having a perfluoropolyether group having 9 or more carbon atoms and an acrylic monomer (b) having an epoxy group in a composition ratio such that a number of acrylic functional groups derived from the acrylic monomer (b) is larger than a number of acrylic functional groups derived from the acrylic monomer (a).
Opening claim text (preview).
What is claimed is: 1. A composition comprising: a fluorine-containing epoxy resin that is a polymer of monomers that includes: an acrylic monomer (a) having a perfluoropolyether group having 9 or more carbon atoms; an acrylic monomer (b) having an epoxy group; and an acrylic monomer (c) having a fluorine-containing group other than perfluoropolyether groups: wherein the polymer is obtained by polymerizing a mixture of the monomers and, total number of acrylic groups of the acrylic monomer (b) in the monomer mixture is larger than total number of acrylic groups of the acrylic monomer (a) in the monomer mixture; and a photoacid generator. 2. The composition according to claim 1 , wherein the acrylic monomer (a) is at least one of compounds represented by formulae (1), (2), and (3) below, in the formulae (1) and (2), X represents a hydrogen atom, a fluorine atom, —CFX 1 X 2 group, a linear or branched fluoroalkyl group having 1 to 21 carbon atoms, a substituted or unsubstituted benzyl group, a substituted or unsubstituted phenyl group, or a linear or branched alkyl group having 1 to 20 carbon atoms, where X 1 and X 2 of CFX 1 X 2 represent a hydrogen atom or a fluorine atom; Y represents a single bond, a linear or branched aliphatic group that has 1 to 10 carbon atoms and may have an oxygen atom, an aromatic group that has 6 to 10 carbon atoms and may have an oxygen atom, an alicyclic group, a group having a urethane bond, or a —CH 2 CH(OY 1 )CH 2 — group, where Y 1 represents a hydrogen atom or an acetyl group, and Rp is a group represented by a formula (6) below, in the formula (6), o, p, q, and r each represent 0 or an integer of 1 to 30 and satisfy 3×o+2×p+3×q+r≧9; and the repeating units may be arranged in random order, in the formula (3), a represents an integer of 1 to 4, b represents an integer of 1 to 4, and a+b is 3, 4, or 5; Z represents a divalent organic group; c represents 0 or 1; Rp has the same definition as in the formulae (1) and (2); R 3 is a group represented by a formula (4) below; and R 2 is a group represented by a formula (5) below, —(C 4 H 8 O) d (C 3 H 6 O) e (C 2 H 4 O) f (CH 2 O) g - (4) in the formula (4), d, e, f, and g each independently represent an integer of 0 to 4 as long as R 3 has a molecular weight in a range of 30 to 300; and the repeating units may be arranged in random order, in the formula (5), R 4 represents a divalent or trivalent bonding group that has 1 to 18 carbon atoms and that may have an ether bond and/or an ester bond; l represents 1 or 2; and X has the same definition as in the formulae (1) and (2). 3. The composition according to claim 2 , wherein, in the formula (6), q≧1. 4. The composition according to claim 2 , wherein the acrylic monomer (b) is represented by a formula (7) below, in the formula (7), Rc represents a substituent having an epoxy group; and X and Y have the same definitions as in the formulae (1) and (2). 5. The composition according to claim 4 , wherein, in the formula (7), Rc represents a 3,4-epoxycyclohexyl group. 6. The composition according to claim 1 , wherein the monomers include, as another monomer, an acrylic monomer (d) having an alkyl group or an aryl group. 7. The composition according to claim 1 , further comprising an epoxy resin other than the fluorine-containing epoxy resin. 8. A method for producing a film, comprising a step of subjecting the composition according to claim 1 to cationic polymerization.
Treatment before imagewise removal, e.g. prebaking {(G03F7/265 takes precedence)} · CPC title
Polyorganosiloxane-containing compositions · CPC title
Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021) · CPC title
with perfluoro compounds, e.g. for dry lithography (G03F7/0048 takes precedence) · CPC title
Macromolecular compounds · CPC title
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