Method for forming a self-aligned Mach-Zehnder interferometer

Patent metadata

Field	Value
Publication number	US-9696604-B1
Application number	US-201615261669-A
Country	US
Kind code	B1
Filing date	Sep 9, 2016
Priority date	Sep 9, 2016
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A method of forming a waveguide for a self-aligned Mach-Zehnder-Interferometer. The method includes forming a waveguide on a substrate and providing a first mask with a first opening exposing a first width and a pair of second widths towards opposite sides of the first width. Additionally, the method includes doping a first dopant of a first concentration through the first opening into a first thickness of the waveguide to form a first semiconducting phase thereof. The method includes providing a second mask with a second opening exposing part of the waveguide and doping a second dopant of a second concentration through the second opening into the part of the waveguide to form a second semiconductor phase thereof sharing a boundary with the first semiconducting phase to form a PN junction across the boundary. The boundary is allowed to vary with a margin of tolerance within the first width.

First claim

What is claimed is:

1. A MZ electro-optic-modulator device comprising:
a laser device configured to output an optical signal with a wavelength within a range of 1300 nm to 1550 nm;
a pair of single crystal silicon material of a first length coupled to the laser device respectively receiving an optical wave split from the optical signal, each single crystal silicon material comprising:
a ridge structure having a first edge and a second edge in parallel with each other, and having a length defined normal to each of the first edge and the second edge;
a top-hat shape formed from the ridge structure;
an upper surface region defined over the first edge and the second edge;
a bottom surface region defined underlying the first edge and the second edge;
a p-type impurity region comprising a concentration ranging from 3×10 17 /cm 3 to 1×10 18 /cm 3 provided in a first region of the ridge structure;
an n-type impurity region comprising a concentration ranging from 3×10 17 /cm 3 to 1×10 18 /cm 3 provided in a second region of the ridge structure;
a depletion region formed between the p-type impurity region and the n-type impurity region, the depletion region having a first state and a second state, the depletion region having a first narrow width ranging from 30 nm to 90 nm in the first state and extending from the upper surface to the bottom surface region, and depletion region having a second narrow width of 150 nm-300 nm in the second state, and extending from the upper surface to the bottom surface;
a first variation provided by the first narrow width during the first state;
a second variation provided by the second narrow width during the second state;
a first refractive index characterizing the depletion region in the first state;
a second refractive index characterizing the depletion region in the second state; whereupon the first state is different from the second state by a ratio of 1×10 −5 ;
a first electrode coupled to the p-type impurity region;
a second electrode coupled to the n-type impurity region; and
a voltage applied between the first electrode and the second electrode, the voltage ranging from 0 to 10V to form the depletion region in the first state and increasing a size of the depletion region from the first narrow width to the second narrow width in a linear manner dependent on a magnitude of the voltage applied between the first electrode and the second electrode.

2. The MZ electro-optic-modulator device of claim 1 , further comprising an optical combiner to combine the two optical waves passing through the pair of single crystal silicon material to an output signal being modulated in amplitude with a non-return-to-zero (NRZ) format.

3. The MZ electro-optic-modulator device of claim 1 , wherein the depletion region comprises four or more states respectively associated with four or more different depletion widths to yield a combined optical signal being modulated in amplitude with one modulation format selected from a group of PAM4, PAM8, PAM16, PAM 64, BPSK, QPSK, DPSK, DQPSK, 8QAM, 16QAM, and 64QAM.

Assignees

• Inphi Corp

Inventors

• Lin Jie
• Kato Masaki
• Johnson Robb

Classifications

• G02B2006/12142

  Modulator · CPC title

• G02F2001/212

  Physics · mapped topic

• G02B6/136

  by etching · CPC title

• G02B2006/12173

  Masking · CPC title

• G02B2006/12061

  Silicon · CPC title