Position manipulator for an optical component

Patent metadata

Field	Value
Publication number	US-9696518-B2
Application number	US-201313764573-A
Country	US
Kind code	B2
Filing date	Feb 11, 2013
Priority date	Feb 14, 2012
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

A device for adjustably positioning an optical component includes a holding unit, which is which at least partly composed of a magnetostrictive material, and a mechanism for generating a magnetic field having a predetermined directional and amplitude distribution in the region of the holding unit. The holding unit has, in a predefined direction, an expansion which can be varied by a specific absolute value by the effect of the magnetic field.

First claim

What is claimed is:

1. A device, comprising:
a holding unit configured to mount an optical component, the holding unit comprising a holding strut comprising a magnetostrictive material;
a carrier, the holding strut being arranged on the carrier, and a first end of the holding strut being mechanically connected to the carrier; and
a mechanism configured to generate a magnetic field having a directional and amplitude distribution in a region of the holding unit,
wherein:
the holding strut is configured to be connected to the optical component at a second end of the holding strut;
the holding strut has a stiffness of at least 10 4 N/mm;
the second end of the holding strut is opposite the first end of the holding strut;
a longitudinal length of the holding strut varies based on an absolute value of the magnetic field;
the holding strut is mechanically decoupled from the optical component via a decoupling element;
a tilting angle of the optical component is settable with an accuracy of at least 0.1 mrad; and
the decoupling element comprises at least one element selected from the group consisting of a circumferential constriction in the holding strut and a cut-out in the holding strut.

2. The device of claim 1 , wherein the mechanism configured to generate the magnetic field comprises a coil.

3. The device of claim 2 , wherein the coil comprises a turn arranged around the holding strut.

4. The device of claim 1 , wherein the mechanism configured to generate the magnetic field is arranged so that at least sections of the magnetic field are parallel to the holding strut.

5. The device of claim 1 , comprising a plurality of holding struts arranged in pairs.

6. The device of claim 5 , wherein each pair of holding structures is configured as a bipod.

7. The device of claim 6 , wherein each holding strut:
comprises a magnetostrictive material;
is arranged on the carrier;
has a first end mechanically connected to the carrier;
is configured to be connected to the optical component at a second end which is opposite its first end; and
has a longitudinal length which varies based on an absolute value of the magnetic field.

8. The device of claim 5 , wherein each holding strut:
comprises a magnetostrictive material;
is arranged on the carrier;
has a first end mechanically connected to the carrier;
is configured to be connected to the optical component at a second end which is opposite its first end; and
has a longitudinal length which varies based on an absolute value of the magnetic field.

9. An apparatus, comprising:
an illumination optical unit; and
a projection optical unit,
wherein at least one unit selected from the group consisting of the illumination optical unit and the projection optical unit comprises the device of claim 1 .

10. A method, comprising
providing an optical component and a device according to claim 1 ; and
generating the magnetic field to adjustably position the optical component.

11. A method of operating a microlithography projection exposure apparatus comprising an illumination optical unit and a projection optical unit, the method comprising:
using the projection optical unit to project a section of a reticle onto a light-sensitive material,
wherein at least one unit selected from the group consisting of the illumination optical unit and the projection optical unit comprises the device of claim 1 .

12. The method of claim 11 , further comprising using the illumination optical unit to illuminate the section of the reticle.

13. The method of claim 11 , wherein EUV radiation is used to project the section of the reticle onto the light-sensitive material.

14. The device of claim 1 , wherein the holding strut comprises invar.

15. The device of claim 1 , wherein the holding strut comprises nickel.

16. The device of claim 1 , wherein the carrier has a coefficient of thermal expansion of less than 10 −6 /K.

17. An optical unit, comprising:
an optical component; and
a device, comprising:
a holding unit configured to mount the optical component, the holding unit comprising a holding strut comprising a magnetostrictive material;
a carrier, the holding strut being arranged on the carrier, and a first end of the holding strut being mechanically connected to the carrier; and
a mechanism configured to generate a magnetic field having a directional and amplitude distribution in a region of the holding unit,

wherein:
the holding strut is connected to the optical component at a second end of the holding strut;
the holding strut has a stiffness of at least 10 4 N/mm;
the second end of the holding strut is opposite the first end of the holding strut;
a longitudinal length of the holding strut varies based on an absolute value of the magnetic field;
the holding strut is mechanically decoupled from the optical component via a decoupling element;
a tilting angle of the optical component is settable with an accuracy of at least 0.1 mrad; and
the decoupling element comprises at least one element selected from the group consisting of a circumferential constriction in the holding strut and a cut-out in the holding strut.

18. The optical assembly of claim 17 , wherein the optical unit is a microlithography illumination optical unit.

19. The optical assembly of claim 17 , wherein the optical unit is a microlithography projection optical unit.

20. A system, comprising:
an optical unit according to claim 17 , the optical unit being an illumination optical unit; and
a radiation source,
wherein the system is a microlithography illumination system.

21. The optical unit of claim 17 , wherein the carrier has a coefficient of thermal expansion of less than 10 −6 /K.

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Hembacher Stefan

Classifications

• G03F7/7015

  Details of optical elements · CPC title

• G03F7/70825

  Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707) · CPC title

• G02B7/1828 Primary

  using magnetic means · CPC title

• G03F7/709

  Vibration, e.g. vibration detection, compensation, suppression or isolation · CPC title

• G02B7/22

  Extensible connections, e.g. bellows · CPC title