Array type light-receiving device and hyperspectral spectrometer including array type light-receiving device

Patent metadata

Field	Value
Publication number	US-9696205-B2
Application number	US-201514727318-A
Country	US
Kind code	B2
Filing date	Jun 1, 2015
Priority date	Jun 4, 2014
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

An array type light-receiving device includes a plurality of pixels two-dimensionally arranged in a first direction and a second direction perpendicular to the first direction, each of the pixels including a light-receiving layer having a responsivity to a wavelength of light. The pixels arranged in the second direction constitute a plurality of pixel lines extending in the second direction, the plurality of pixel lines being arranged in the first direction to form an array. The pixels in each of the pixel lines have different pixel areas from each other. In addition, the pixel area of each of the pixels included in at least one of the pixel lines is determined in accordance with the responsivity to a wavelength of light received by each of the pixels.

First claim

What is claimed is:

1. An array type light-receiving device comprising:
a plurality of pixels two-dimensionally arranged in a first direction and a second direction perpendicular to the first direction, each of the pixels including a light-receiving layer providing a responsivity to a wavelength of light for each said pixel, wherein
the pixels arranged in the second direction constitute a plurality of pixel lines extending in the second direction, the plurality of pixel lines being arranged in the first direction to form an array,
the pixels in each of the pixel lines have pixel areas different from each other,
in at least one of the pixel lines, the pixel area of each respective pixel is determined in accordance with said respective pixel's responsivity to a wavelength of light received thereby, and
the pixels in each of the pixel lines include a first pixel and second pixel, the first pixel being configured to receive light at the wavelength at which the first pixel has said responsivity, and the second pixel having a pixel area determined by the first pixel's responsivity.

2. The array type light-receiving device according to claim 1 ,
wherein the first pixel has a lowest responsivity
and a largest pixel area of the pixels included in the pixel line, and
wherein the pixel area of the second pixel is determined by the relational expression:
A β =E/R β

where A β represents the pixel area of the second pixel, E represents a product of the responsivity of the first pixel at the wavelength of light received by the first pixel multiplied by the pixel area of the first pixel, and R β represents the responsivity of the second pixel at the wavelength of light received by the second pixel.

3. The array type light-receiving device according to claim 1 ,
wherein the plurality of pixels included in each of the pixel lines are arranged so as to receive corresponding light components having different wavelengths, the light components being separated along the second direction depending on the wavelengths.

4. The array type light-receiving device according to claim 1 ,
wherein the pixels arranged in the first direction constitute a plurality of pixel rows extending in the first direction, and
the pixel areas of the pixels in each of the pixel rows are approximately equal to each other.

5. The array type light-receiving device according to claim 1 , further comprising:
a plurality of mesas corresponding to the pixels, each of the mesas including the light-receiving layer,
a passivation film disposed on a top surface and a side surface of each mesa, the passivation film having an opening on the top surface of each mesa, and
an electrode disposed in the opening in contact with the top surface of each mesa.

6. The array type light-receiving device according to claim 1 , further comprising:
an impurity diffusion region corresponding to each pixel, each impurity diffusion region extending from a top surface of the corresponding pixel toward the light-receiving layer,
a mask disposed on the top surface of the corresponding pixel, the mask having an opening on the impurity diffusion region, and
an electrode disposed in the opening in contact with a top surface of the impurity diffusion region.

7. The array type light-receiving device according to claim 1 , wherein the light-receiving layer includes an InGaAs layer.

8. The array type light-receiving device according to claim 1 , wherein the light-receiving layer has a multi quantum well structure including InGaAs layers and GaAsSb layers stacked alternately.

9. A hyperspectral spectrometer comprising:
an array type light-receiving device; and
a spectroscope configured to disperse incident light spectrally into a plurality of light components having different wavelengths, the spectroscope outputting dispersed light to the array type light-receiving device, wherein
the array type light-receiving device includes a plurality of pixels two-dimensionally arranged in a first direction and a second direction perpendicular to the first direction, each of the pixels including a light-receiving layer providing a responsivity to a wavelength of light for each said pixel,
the pixels arranged in the second direction constitute a plurality of pixel lines extending in the second direction, the plurality of pixel lines being arranged in the first direction to form an array,
the light components of the dispersed light are separated along the second direction depending on wavelength,
each of the pixels in at least one pixel line is configured to receive at least one of the light components,
the pixels in each pixel line have different pixel areas, the pixel area of each respective pixel in the at least one pixel line being determined in accordance with said respective pixel's responsivity to the wavelength of the light component received thereby, and
the pixels in each of the pixel lines include a first pixel and second pixel, the first pixel being configured to receive light at the wavelength at which the first pixel has said responsivity, and the second pixel having a pixel area determined by the first pixel's responsivity.

Assignees

• Sumitomo Electric Industries

Inventors

• Iguchi Yasuhiro
• Inada Hiroshi

Classifications

• G01J3/2823

  Imaging spectrometer · CPC title

• G01J3/2803 Primary

  using photoelectric array detector · CPC title

• H01L27/14634

  Electricity · mapped topic

• H01L27/14605

  Electricity · mapped topic

• H01L27/14607

  Electricity · mapped topic