Process kit with plasma-limiting gap

Patent metadata

Field	Value
Publication number	US-9695502-B2
Application number	US-201213435956-A
Country	US
Kind code	B2
Filing date	Mar 30, 2012
Priority date	Mar 30, 2012
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

Apparatus for processing substrates are provided herein. In some embodiments, an apparatus includes a process kit comprising a shield having one or more sidewalls configured to surround a first volume, the first volume disposed within an inner volume of a process chamber; and a first ring moveable between a first position, wherein the first ring rests on the shield, and a second position, wherein a gap is formed between an outer surface of the first ring and an inner surface of the one or more sidewalls, wherein a width of the gap is less than about two plasma sheath widths for a plasma formed at a frequency of about 40 MHz or higher and at a pressure of about 140 mTorr or lower.

First claim

The invention claimed is:

1. A process kit, comprising:
a shield, comprising:
a u-shaped lower portion forming a trench; and
one or more vertical sidewalls configured to surround a first volume, the first volume disposed within an inner volume of a process chamber; and

a first ring, comprising:
a first protrusion extending from a lower surface of the first ring into the trench;
a second protrusion extending from the lower surface of the first ring and outside of the trench,

wherein the first ring is moveable between a first position, in which the first ring rests on the shield, and a second position, in which the first ring does not contact the shield,
wherein a gap is formed between a radially outermost surface of the first protrusion and an adjacent inner surface of the one or more vertical sidewalls,
wherein a width of the gap is less than about two plasma sheath widths for a plasma formed at a frequency of about 40 MHz or higher and at a pressure of about 140 mTorr or lower,
wherein the gap has a length to width ratio of at least about 4:1 to limit or prevent plasma formation in the gap.

2. The process kit of claim 1 , wherein the width of the gap is less than about two plasma sheath widths when the pressure used to form the plasma ranges from about 60 to about 140 mTorr.

3. The process kit of claim 1 , wherein the width of the gap is less than about 6 mm.

4. The process kit of claim 1 ,
wherein the second protrusion is configured to interface with a substrate support to align the first ring with respect to the shield when the first ring is in the second position.

5. The process kit of claim 1 , further comprising:
a second gap formed between an inner surface of the first protrusion and an inner surface of the trench when the first ring is in the second position, wherein a width of the gap is less than about two plasma sheath widths for a plasma formed at at least one of a frequency of about 40 MHz or higher or a pressure ranging from about 60 to about 140 mTorr.

6. The process kit of claim 5 , wherein the second gap has a length to width ratio of at least about 4:1.

7. The process kit of claim 1 , further comprising:
a third gap formed between a bottom surface of the first protrusion and the bottom surface of the trench when the first ring is in the second position, wherein a width of the gap is less than about two plasma sheath widths for a plasma formed at at least one of a frequency of about 40 MHz or higher or a pressure ranging from about 60 to about 140 mTorr.

8. A substrate processing system, comprising:
a process chamber having an inner volume;
a shield disposed in the inner volume, wherein the shield comprises:
a u-shaped lower portion forming a trench; and
one or more vertical sidewalls configured to surround a first volume within the inner volume;

a substrate support disposed in the inner volume; and
a first ring, comprising:
a first protrusion extending from a lower surface of the first ring into the trench;
a second protrusion extending from the lower surface of the first ring and outside of the trench,

wherein the first ring is moveable between a first position, in which the first ring rests on the shield, and a second position, in which the first ring does not contact the shield and rests atop the substrate support,
wherein a gap is formed between a radially outermost surface of the first protrusion and an adjacent inner surface of the one or more vertical sidewalls,
wherein a width of the gap is less than about two plasma sheath widths for a plasma formed at a frequency of about 40 MHz or higher and at a pressure of about 140 mTorr or lower,
wherein the gap has a length to width ratio of at least about 4:1 to limit or prevent plasma formation in the gap.

9. The substrate processing system of claim 8 , wherein the width of the gap is less than about two plasma sheath widths when the pressure used to form the plasma ranges from about 60 to about 140 mTorr.

10. The substrate processing system of claim 8 , wherein the width of the gap is less than about 6 mm.

11. The substrate processing system of claim 8 ,
wherein the second protrusion is configured to interface with the substrate support to align the first ring with respect to the shield when the first ring is in the second position.

12. The substrate processing system of claim 8 , further comprising:
a second gap formed between an inner surface of the first protrusion and an inner surface of the trench when the first ring is in the second position, wherein a width of the gap is less than about two plasma sheath widths for a plasma formed at at least one of a frequency of about 40 MHz or higher or a pressure ranging from about 60 to about 140 mTorr.

13. The substrate processing system of claim 8 , further comprising:
a third gap formed between a bottom surface of the first protrusion and the bottom surface of the trench when the first ring is in the second position, wherein a width of the gap is less than about two plasma sheath widths for a plasma formed at at least one of a frequency of about 40 MHz or higher or a pressure ranging from about 60 to about 140 mTorr.

14. The substrate processing system of claim 8 , wherein the substrate support further comprises:
a substrate processing surface; and
a dielectric ring disposed about a peripheral edge of the substrate support and adjacent to the substrate processing surface.

Assignees

• Ritchie Alan
• Young Donny
• Applied Materials Inc

Inventors

• Ritchie Alan
• Young Donny

Classifications

• H01J37/3405

  Magnetron sputtering · CPC title

• C23C14/34 Primary

  Sputtering · CPC title

• H01J37/32651

  Shields, e.g. dark space shields, Faraday shields · CPC title

• H01J37/32642

  Focus rings · CPC title

• H01J37/32495

  Means for protecting the vessel against plasma · CPC title