Gas purifier

Patent metadata

Field	Value
Publication number	US-9694319-B2
Application number	US-201314377656-A
Country	US
Kind code	B2
Filing date	Feb 8, 2013
Priority date	Feb 10, 2012
Publication date	Jul 4, 2017
Grant date	Jul 4, 2017

Abstract

The invention relates to a gas purifier that removes moisture and oxygen from inert gases and reducing gases, for example, at sub-atmospheric pressures. The purifier can remove part per million levels of moisture in a gas stream to less than 100 parts per trillion by volume, and has a low pressure drop and a sharp breakthrough curve.

First claim

What is claimed is:

1. A gas purifier, comprising:
a housing having a fluid inlet and a fluid outlet, the inlet and outlet fluidly connected through a purifier bed contained in the housing that removes moisture and oxygen from an inert gas and from a reducing gas, the purifier bed comprising:
a first bed of material comprising macropore mass transfer limited molecular sieves that remove moisture from the inert gas and the reducing gas, the molecular sieves having a particle size of 0.7 millimeters±20 percent; and
a second bed of material comprising a metal catalyst on a support that removes oxygen from the inert gas and the reducing gas, the metal catalyst being at least partially regenerated to a reduced form by the reducing gas at room temperature.

2. The gas purifier of claim 1 , wherein the gas purifier is characterized by a moisture concentration at the fluid outlet of 5 parts per billion by volume (ppbv/v) or less in a hydrogen gas flow of 2 standard liters per minutes (slpm) at a pressure of 200 torr after flowing nitrogen gas containing between 1 ppbv/v and 20 ppbv/v oxygen and between 1 ppbv/v and 20 ppbv/v moisture at a pressure of 200 torr and a gas flow of 2 slpm for 6 hours through the gas purifier.

3. The gas purifier of claim 1 , wherein the molecular sieves are alkali metal zeolite X molecular sieves.

4. The gas purifier of claim 3 , wherein the alkali metal zeolite X molecular sieves are 13× molecular sieves.

5. The gas purifier of claim 3 , wherein the alkali metal zeolite X molecular sieves are 13× molecular sieves that have a particle size of 0.7 millimeters±20 percent.

6. The gas purifier of claim 1 , wherein the first bed of material is 30 percent by volume to 70 percent by volume of the purifier bed, and the second bed of material is 70 percent by volume to 30 percent by volume of the purifier bed.

7. The gas purifier of claim 6 , wherein the first bed of material is 50±5 percent by volume of the purifier bed, and the second bed of material is 50±5 percent by volume of the purifier bed.

8. The gas purifier of claim 6 , wherein the first bed of material is 30 percent by volume to 40 percent by volume of the purifier bed, and the second bed of material is 70 percent by volume to 60 percent by volume of the purifier bed.

9. The purifier of claim 1 , further characterized by a moisture concentration at the fluid outlet of 100 parts per trillion by volume or less after 4000 minutes, after flowing an inert gas containing 12 parts per million moisture by volume at a flow rate of 10 standard liters per minute through the purifier.

10. The purifier of claim 1 , wherein the metal catalyst contains nickel.

11. The purifier of claim 1 , wherein the first bed of material is downstream of the second bed of material.

12. The purifier of claim 1 , wherein the purifier bed removes moisture and oxygen from the inert gas and the reducing gas at sub-atmospheric pressure.

13. The purifier of claim 1 , wherein the purifier bed removes moisture and oxygen from the inert gas and the reducing gas at atmospheric pressure.

14. The gas purifier of claim 1 , wherein the gas purifier further comprises a media-retaining porous membrane separating the first bed of material and the second bed of material, wherein the media-retaining porous membrane is secured within the housing at its edges by an expandable ring comprising an inner circumference, an outer circumference and a locking mechanism for expanding and retaining the ring by radial force against an inner wall of the housing when the locking mechanism is engaged.

15. The gas purifier of claim 14 , wherein the media-retaining porous membrane is a gas-permeable membrane having a pore size to prevent media of the first bed of material and the second bed of material from passing therethrough.

16. The gas purifier of claim 14 , wherein the media-retaining porous membrane is in intimate and retaining contact with the first bed of material.

17. The gas purifier of claim 14 , wherein the media-retaining porous membrane is fixed between a surface of the expandable ring and a surface of the second bed of material, wherein the second bed of material is located downstream of the first bed of material.

18. The gas purifier of claim 14 , wherein the locking mechanism is spring-locking mechanism.

19. The gas purifier of claim 14 , wherein the expandable ring is secured by radial force between the outer diameter of the expandable ring and the inner wall of the housing.

20. The gas purifier of claim 1 , further comprising one or more additional beds of material and optionally one or more media-retaining porous membranes, wherein the membrane, if present, separates any two beds of material.

Assignees

• Entegris Inc

Inventors

• Srivastava Abneesh
• Gaffney Thomas Richard
• Cook Joshua T
• Shogren Peter K
• Murphy Daimhin Paul
• Da Costa Pereira Stenio

Classifications

• B01D46/543

  using membranes · CPC title

• B01D2255/50

  Zeolites · CPC title

• B01D2255/20753

  Nickel · CPC title

• B01D53/75

  Multi-step processes · CPC title

• B01D53/8671 Primary

  Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668 · CPC title