Modular laser apparatus
US-9742155-B2 · Aug 22, 2017 · US
US9692210B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9692210-B2 |
| Application number | US-201514677610-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 2, 2015 |
| Priority date | Mar 17, 2010 |
| Publication date | Jun 27, 2017 |
| Grant date | Jun 27, 2017 |
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A laser diode arrangement having at least one semiconductor substrate, having at least two laser stacks each having an active zone and having at least one intermediate layer. The laser stacks and the intermediate layer are grown monolithically on the semiconductor substrate. The intermediate layer is arranged between the laser stacks. The active zone of the first laser stack can be actuated separately from the active zone of the at least one further laser stack.
Opening claim text (preview).
What is claimed is: 1. A laser diode arrangement comprising: a semiconductor substrate; at least two laser stacks each having an active zone; at least one intermediate layer; a current shield arranged between two laser stacks; wherein the laser stacks and the intermediate layer are grown monolithically on the semiconductor substrate, wherein the laser stacks are edge emitters, wherein the intermediate layer is arranged between the laser stacks and wherein the active zone of the first laser stack can be actuated separately from the active zone of the at least one further laser stack. 2. The laser diode arrangement as claimed in claim 1 , wherein separate actuation of the active zones by separate n-contacts is provided. 3. The laser diode arrangement as claimed in claim 2 , wherein separate actuation of the active zones by a common p-contact is provided. 4. The laser diode arrangement as claimed in claim 1 , wherein separate actuation of the active zones by separate p-contacts is provided. 5. The laser diode arrangement as claimed in claim 4 , wherein separate actuation of the active zones by a common n-contact is provided. 6. The laser diode arrangement as claimed in claim 1 wherein each laser stack with the associated active zone has at least one laser diode. 7. The laser diode arrangement as claimed in claim 6 , wherein the vertical spacing between the laser beams emitted from the laser diodes is less than about 5 μm. 8. The laser diode arrangement as claimed in claim 6 , wherein the vertical spacing between the laser beams emitted from the laser diodes is less than about 2 μm. 9. The laser diode arrangement as claimed in claim 6 , wherein the active zones are designed such that laser diodes from different laser stacks emit electromagnetic radiation in wavelength ranges differing from one another. 10. The laser diode arrangement as claimed in claim 6 , wherein the vertical spacing between the laser beams emitted from the laser diodes is less than about 20 μm. 11. The laser diode arrangement as claimed in claim 1 , wherein the intermediate layer has a tunnel diode having a low ohmic resistance. 12. The laser diode arrangement as claimed in claim 1 , wherein the intermediate layer has an insulator, in particular a crystalline electrically insulating layer. 13. The laser diode arrangement as claimed in claim 1 , wherein the laser diode arrangement has at least two light sources, formed from the laser stacks, wherein at least one laser stack is monolithically grown on a second semiconductor substrate. 14. The laser diode arrangement as claimed in claim 1 , wherein a layer facing the semiconductor substrate, which layer adjoins the active zone, is an n-waveguide and a layer facing away from the semiconductor substrate, which layer adjoins the active zone, is a p-waveguide. 15. A laser diode arrangement having a semiconductor substrate, having at least two laser stacks based on the material system AlInGaN, each having an active zone and having at least one intermediate layer, wherein the laser stacks and the intermediate layer are grown monolithically on the semiconductor substrate, the intermediate layer is arranged between the laser stacks, the active zone of the first laser stack can be actuated separately from the active zone of the at least one further laser stack, each laser stack with the associated active zone forms an edge emitting laser diode, the active zones are designed such that laser diodes from different laser stacks emit electromagnetic radiation in wavelength ranges differing from one another, a layer facing the semiconductor substrate, which layer adjoins the active zone, is an n-waveguide and a layer facing away from the semiconductor substrate, which layer adjoins the active zone, is a p-waveguide, or vice versa, and a current shield is provided between two laser stacks.
having positive and negative electrodes on the same side of the substrate · CPC title
Two-dimensional arrays · CPC title
Tunnel junction · CPC title
The laser chip comprising special buffer layers, e.g. dislocation prevention or reduction · CPC title
emitting more than one wavelength · CPC title
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