Merging lithography processes for gate patterning

Patent metadata

Field	Value
Publication number	US-9691868-B2
Application number	US-201414283168-A
Country	US
Kind code	B2
Filing date	May 20, 2014
Priority date	Nov 22, 2013
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

Methods for fabricating devices on a die, and devices on a die. A method may include patterning a first region to create a first gate having a first gate length and a first contacted polysilicon pitch (CPP) with a first process. The first CPP is smaller than a single pattern lithographic limit. The method also includes patterning the first region to create a second gate having a second gate length or a second CPP with a second process. The second CPP is smaller than the single pattern lithographic limit. The second gate length is different than the first gate length.

First claim

What is claimed is:

1. A method for fabricating a plurality of devices on a die, comprising:
patterning a first region to create a plurality of first gates having a first gate length and a contacted polysilicon pitch (CPP) with a first process, the CPP being smaller than a single pattern lithographic limit;
patterning the first region according to a cell swap process; and then
fabricating a pair of second gates arranged in place of some of the plurality of first gates, the second pair of gates having a second gate length and the CPP, the cell swap process being different from the first process, and the second gate length being different than the first gate length.

2. The method of claim 1 , in which the first process is a self-aligned double patterning (SADP) process.

3. The method of claim 2 , in which the second process is a litho-etch-litho-etch (LELE) process.

4. The method of claim 1 , in which the cell swap process is a second lithography process performed in between gates formed by the first process.

5. The method of claim 1 , in which the plurality of devices are integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.

6. An apparatus, comprising:
a plurality of first gate length devices having a first gate length and a contacted polysilicon pitch (CPP) in a first region, the CPP being smaller than a single pattern lithographic limit; and
a pair of second gate length devices arranged in place of some of the plurality of first gate length devices in the first region, the pair of second gate length devices having a second gate length and the CPP, the second gate length being different than the first gate length.

7. The apparatus of claim 6 , in which the plurality of first gate length devices have a more uniform critical dimension uniformity than the pair of second gate length devices.

8. The apparatus of claim 6 , further comprising a third gate length device having a third gate length.

9. The apparatus of claim 6 integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.

10. A method for fabricating a plurality of devices on a die, comprising:
the step of patterning a first region to create a plurality of first gates having a first gate length and a contacted polysilicon pitch (CPP) with a first process, the CPP being smaller than a single pattern lithographic limit;
the step of patterning the first region according to a cell swap process; and then
fabricating a pair of second gates arranged in place of some of the plurality of first gates, the second pair of gates having a second gate length and the CPP, the cell swap process being different from the first process, and the second gate length being different than the first gate length.

11. The method of claim 10 , in which the plurality of devices are integrated into a mobile phone, a set top box, a music player, a video player, an entertainment unit, a navigation device, a computer, a hand-held personal communication systems (PCS) unit, a portable data unit, and/or a fixed location data unit.

Assignees

• Qualcomm Inc

Inventors

• Song Stanley Seungchul
• Wang Zhongze
• Yeap Choh Fei

Classifications

• H10D64/01326

  Aspects related to lithography, isolation or planarisation of the conductor · CPC title

• H01L27/0207

  Electricity · mapped topic

• H01L27/0886

  Electricity · mapped topic

• G03F7/70466 Primary

  Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature (stitching G03F7/70475) · CPC title

• H01L21/28123

  Electricity · mapped topic