Extreme high mobility CMOS logic

Patent metadata

Field	Value
Publication number	US-9691856-B2
Application number	US-201514977479-A
Country	US
Kind code	B2
Filing date	Dec 21, 2015
Priority date	Dec 15, 2005
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

A CMOS device includes a PMOS transistor with a first quantum well structure and an NMOS device with a second quantum well structure. The PMOS and NMOS transistors are formed on a substrate.

First claim

What is claimed is:

1. A transistor, comprising:
a doped silicon semi-insulating substrate;
a buffer layer disposed above the doped silicon semi-insulating substrate;
a bottom barrier layer disposed above the buffer layer wherein the bottom barrier layer comprises a material different than the buffer layer;
a group III-V material quantum well layer disposed above the bottom barrier layer;
a top barrier layer disposed above the group III-V material quantum well layer;
a gate stack disposed above the top barrier layer, the gate stack having a bottommost surface, and the gate stack comprising:
a high-k gate dielectric layer disposed above the top barrier layer; and
a metal gate electrode disposed above the high-k gate dielectric layer;

raised source and drain regions disposed above an etch stop layer disposed above the top barrier layer, the raised source and drain regions disposed on either side of the gate stack, and the raised source and drain regions having a bottommost surface above the bottommost surface of the gate stack; and
a metal source contact on the raised source region and a metal drain contact on the raised drain region wherein a top surface of the metal source contact and a top surface of the metal drain contact are coplanar with a top surface of the metal gate electrode and wherein a bottom surface of the metal source contact and a bottom surface of the metal drain contact are above the bottommost surface of the gate stack.

2. The transistor of claim 1 , wherein the group III-V material quantum well layer is an indium arsenide (InAs) quantum well layer.

3. The transistor of claim 1 , wherein the high-k gate dielectric layer is an aluminum oxide (Al 2 O 3 ) high-k gate dielectric layer.

4. The transistor of claim 3 , wherein the aluminum oxide (Al 2 O 3 ) high-k gate dielectric layer has a thickness approximately in the range of 1.5-7.5 nanometers.

5. The transistor of claim 1 , wherein the metal gate electrode has a gate length approximately in the range of 20-250 nanometers.

6. The transistor of claim 1 , wherein the etch stop layer has a thickness approximately in the range of 1-5 nanometers.

7. The transistor of claim 1 , wherein the group III-V material quantum well layer has a thickness approximately in the range of 5-30 nanometers.

8. The transistor of claim 1 , wherein the buffer layer comprises indium (In) and aluminum (Al).

9. The transistor of claim 1 , wherein the metal gate electrode comprises a mid-gap metal.

10. A method of fabricating a transistor, the method comprising:
forming a doped silicon semi-insulating substrate;
forming a buffer layer above the doped silicon semi-insulating substrate;
forming a bottom barrier layer above the buffer layer wherein the bottom barrier layer comprises a material different than the buffer layer;
forming a group III-V material quantum well layer above the bottom barrier layer;
forming a top barrier layer above the group III-V material quantum well layer;
forming raised source and drain regions disposed above an etch stop layer formed above the top barrier layer, the raised source and drain regions having a bottommost surface;
subsequent to forming the raised source and drain regions, forming a gate stack above the top barrier layer, the gate stack having a bottommost surface below the bottommost surface of the raised source and drain regions, and forming the gate stack comprising:
forming a high-k gate dielectric layer above the top barrier layer; and

forming a metal gate electrode above the high-k gate dielectric layer, wherein the raised source and drain regions are on either side of the gate stack; and
forming a metal source contact on the raised source region and a metal drain contact on the raised drain region wherein a top surface of the metal source contact and a top surface of the metal drain contact are coplanar with a top surface of the metal gate electrode and wherein a bottom surface of the metal source contact and a bottom surface of the metal drain contact are above the bottommost surface of the gate stack.

11. The method of claim 10 , wherein forming the group III-V material quantum well layer comprises forming an indium arsenide (InAs) quantum well layer.

12. The method of claim 10 , wherein forming the high-k gate dielectric layer comprises forming an aluminum oxide (Al 2 O 3 ) high-k gate dielectric layer.

13. The method of claim 12 , wherein the aluminum oxide (Al 2 O 3 ) high-k gate dielectric layer is formed to a thickness approximately in the range of 1.5-7.5 nanometers.

14. The method of claim 10 , wherein the metal gate electrode is formed to a gate length approximately in the range of 20-250 nanometers.

15. The method of claim 10 , wherein the etch stop layer is formed to a thickness approximately in the range of 1-5 nanometers.

16. The method of claim 10 , wherein the group III-V material quantum well layer is formed to a thickness approximately in the range of 5-30 nanometers.

17. The method of claim 10 , wherein forming the buffer layer comprises forming a layer comprising indium (In) and aluminum (Al).

18. The method of claim 10 , wherein forming the metal gate electrode comprises forming a mid-gap metal layer.

Assignees

• Intel Corp

Inventors

• Datta Suman
• Hudait Mantu K
• Doczy Mark L
• Kavalieros Jack T
• Majumdar Amlan
• Brask Justin K
• Jin Been-Yih
• Metz Matthew V
• Chau Robert S

Classifications

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10P14/3421

  Arsenides · CPC title

• H10P14/2905

  Silicon, silicon germanium or germanium · CPC title

• H01L29/122

  Electricity · mapped topic

• H01L29/66522

  Electricity · mapped topic