Imaging and processing for plasma ion source

Patent metadata

Field	Value
Publication number	US-9691583-B2
Application number	US-201514792771-A
Country	US
Kind code	B2
Filing date	Jul 7, 2015
Priority date	May 31, 2012
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

Applicants have found that energetic neutral particles created by a charged exchange interaction between high energy ions and neutral gas molecules reach the sample in a ion beam system using a plasma source. The energetic neutral create secondary electrons away from the beam impact point. Methods to solve the problem include differentially pumped chambers below the plasma source to reduce the opportunity for the ions to interact with gas.

First claim

We claim as follows:

1. A focused ion beam system comprising:
a plasma chamber for containing a plasma;
a source electrode for biasing the plasma;
an extraction electrode for extracting ions from the plasma chamber;
a focusing lens for focusing the ions into a beam directed toward a work piece;
a sample chamber for containing a work piece, the sample chamber connected to a vacuum pump; and
a first intermediary vacuum chamber connected at one end to the plasma chamber and connected to a vacuum pump;
a second intermediary vacuum chamber connected to a vacuum pump;
a first differential pumping aperture connecting the first intermediary vacuum chamber and the second intermediary vacuum chamber; and
a second differential pumping aperture connecting the second intermediary vacuum chamber to the sample chamber or to one or more additional intermediary vacuum chambers,
wherein the focused ion beam system is capable of operating such that a sum of products of pressure times path length through each of the intermediary vacuum chambers and the sample chamber is less than 3×10 −3 mbar*mm.

2. The focused ion beam system of claim 1 in which each of the additional intermediary vacuum chamber has a lower pressure than an immediately preceding intermediary vacuum chamber.

3. The focused ion beam system of claim 1 in which the first intermediary vacuum chamber has a pressure at least five times lower than a pressure in the plasma chamber.

4. The focused ion beam system of claim 1 in which the sample chamber has a pressure higher than an immediately preceding intermediary vacuum chamber.

5. The focused ion beam system of claim 1 in which the sum of the products of the pressure times the path length through each of the intermediary vacuum chambers and the sample chamber is less than 3×10 −5 mbar*mm.

6. The focused ion beam system of claim 1 configured such that a probability of energetic neutral creation is less than 1%.

7. The focused ion beam system of claim 1 configured such that a probability of energetic neutral creation is less than 0.01%.

8. The focused ion beam system of claim 1 further comprising means to reduce an energy spread of ions emitted from the plasma chamber to less than 10 eV.

9. A method of improving ion beam processing using a plasma ion source by reducing the number of energetic neutral particles impacting onto a work piece, comprising:
applying energy to a gas in a plasma chamber to produce a plasma, the plasma chamber being maintained at a first pressure;
extracting ions from the plasma chamber into a first intermediary vacuum chamber, the first intermediary vacuum chamber being maintained at a pressure lower than the first pressure;
passing the ions from the first intermediary vacuum chamber through a first differential pumping aperture into a second intermediary vacuum chamber, the second intermediary vacuum chamber being maintained at a pressure lower than that of the first intermediary vacuum chamber;
passing the ions into a sample chamber through a second differential pumping aperture; and
focusing the ions onto a work piece to process the work piece with the focused ions,
wherein a sum of products of pressure times path length through each of the intermediary vacuum chambers and the sample chamber is less than 3×10 −3 mbar*mm.

10. The method of claim 9 in which the sum of products of pressure times path length through each of the intermediary vacuum chambers and the sample chamber is less than 3×10 −5 mbar*mm.

11. The method of claim 9 further comprising reducing a probability of energetic neutral creation from the first intermediary vacuum chamber to the work piece to less than 1%.

12. The method of claim 9 further comprising reducing a probability of energetic neutral creation from the first intermediary vacuum chamber to the work piece to less than 0.01%.

13. The method of claim 9 in which the first intermediary vacuum chamber is maintained at a pressure of between 10 −5 mbar and 10 −6 mbar and the second intermediary vacuum chamber is maintained at a pressure of between 10 −6 mbar and 10 −7 mbar.

14. The method of claim 9 in which extracting ions from the plasma chamber into a first intermediary vacuum chamber includes extracting ions having an energy spread of less than 10 eV.

15. The focused ion beam system of claim 1 , wherein:
the vacuum pump connected to the first intermediary vacuum chamber is a different vacuum pump than the vacuum pump connected to the second intermediary vacuum chamber;
the vacuum pump connected to the first intermediary vacuum chamber is capable of maintaining the first intermediary vacuum chamber at a pressure in a range of from about 10 −5 mbar to about 10 −6 mbar; and
the vacuum pump connected to the second intermediary vacuum chamber is capable of maintaining the second intermediary vacuum chamber at a pressure in a range of from about 5*10 −7 mbar to about 1*10 −7 mbar.

16. The focused ion beam system of claim 1 , wherein:
the vacuum pump connected to the first intermediary vacuum chamber is a turbo pump;
the second intermediary vacuum chamber or an additional intermediary vacuum chamber is connected at one end to the second differential pumping aperture and connected to an ion pump.

17. A focused ion beam system comprising a focused ion beam column, the focused ion beam column including:
a plasma chamber;
a sample chamber;
vacuum chambers connected in series between the plasma chamber and the sample chamber, the vacuum chambers separated by pressure limiting apertures and configured to be differentially pumped during operation of the focused ion beam column, as a focused ion beam passes from the plasma chamber to the sample chamber via the vacuum chambers,
wherein the focused ion beam system is capable of operating such that a sum of products of pressure times path length through each of the vacuum chambers and the sample chamber is less than 3×10 −3 mbar*mm.

18. The focused ion beam system of claim 17 , further comprising vacuum pumps connected to the vacuum chambers and configured to carry out the differential pumping, wherein the differential pumping prevents the creation of energetic neutrals in the focused ion beam column during the operation of the focused ion beam column.

Assignees

• Fei Co

Inventors

• Miller Thomas G
• Kellogg Sean
• Zhang Shouyin
• Maazouz Mostafa
• Graupera Anthony

Classifications

• H01J37/026 Primary

  Means for avoiding or neutralising unwanted electrical charges on tube components · CPC title

• H01J37/185

  Means for transferring objects between different enclosures of different pressure or atmosphere · CPC title

• H01J37/10

  Lenses · CPC title

• H01J2237/188

  Differential pressure · CPC title

• H01J2237/0492

  Lens systems · CPC title