High density capacitor structure and method
US-2016315138-A1 · Oct 27, 2016 · US
US9691554B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9691554-B2 |
| Application number | US-201615235153-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 12, 2016 |
| Priority date | Nov 7, 2012 |
| Publication date | Jun 27, 2017 |
| Grant date | Jun 27, 2017 |
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A method of forming an ordered nanorods array in a confined space is used to form a high surface area device where an ensemble of parallel trenches has micrometer dimensions for the width and depth of the trenches, which are decorated with crystalline nanowires radiating from the sidewalls and bases of the trenches. The high surface area device is formed by depositing a conformal crystalline seed coating in the trenches, forming microchannels from these trenches by placing a barrier layer on the open surface of the trenches, contacting the conformal coating with a crystal precursor solution that is caused to flow through the microchannels. In an embodiment, a very high surface area electrode is constructed with ZnO nanowires radiating from the sidewalls and base of trenches formed on a silicon substrate. The device can be a dye-sensitized solar cell.
Opening claim text (preview).
We claim: 1. A high surface area device, comprising: a multiplicity of parallel open trenches scribed in a substrate; and a multiplicity of crystalline nanowires, wherein the nanowires radiate perpendicular to sidewalls and bases of the trenches. 2. The high surface area device according to claim 1 , wherein the trenches have widths of 5 to 100 μm. 3. The high surface area device according to claim 1 , wherein the nanowires are of 1 to 10 μm in length. 4. The high surface area device according to claim 1 , wherein the nanowires consist of a metal oxide. 5. The high surface area device according to claim 4 , wherein the metal oxide is zinc oxide, titanium oxide, tin oxide or tungsten oxide. 6. The high surface area device according to claim 4 , wherein the metal oxide is zinc oxide. 7. The high surface area device according to claim 1 , wherein the substrate is a conductor or a semiconductor. 8. The high surface area device according to claim 1 , wherein the substrate comprises silicon. 9. The high surface area device according to claim 1 , wherein the substrate comprises a semiconductor or an insulator, wherein the surface of the substrate having the open trenches is coated with a conductor. 10. The high surface area device according to claim 1 , further comprising a dye absorbed on the crystalline nanowires, an electrolyte, and a cathode layer separate from the crystalline nanowires, wherein the crystalline nanowires comprise an anode, wherein the substrate, or the cathode layer is at least partially transparent to radiation of a portion of the electromagnetic spectrum, wherein the dye absorbs at least a portion of the radiation, and wherein the high surface area device is a dye-sensitized solar cell (DSSC). 11. The high surface area device according to claim 10 , further comprising a dielectric spacer situated between the anode and the cathode and containing the electrolyte. 12. The high surface area device according to claim 10 , further comprising a conformal conductive layer on the surface of the substrate, at least a portion of which is situated between the substrate and the crystalline nanowires.
Silicon (forming single crystals or homogeneous polycrystalline material with defined structure C30B) · CPC title
Dye sensitized solar cells · CPC title
On each side of strands or strand-portions · CPC title
comprising mixed oxides, e.g. ZnO covered TiO2 particles · CPC title
comprising an organic dye as the active light absorbing material, e.g. adsorbed on an electrode or dissolved in solution · CPC title
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