Direct write lithography for the fabrication of geometric phase holograms

Patent metadata

Field	Value
Publication number	US-9690026-B2
Application number	US-201314435005-A
Country	US
Kind code	B2
Filing date	Oct 15, 2013
Priority date	Oct 15, 2012
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

A direct-write lithography apparatus includes a polarization selector stage configured to vary a polarization orientation angle of light from a light source, a focusing element configured to focus the light from the light source into a spot at a focal plane thereof, and a scanning stage configured to scan the spot in at least two dimensions along a surface of a polarization-sensitive recording medium that is arranged proximate to the focal plane such that neighboring scans substantially overlap. The polarization selector stage and the scanning stage are configured to be operated independently of one another. Related fabrication methods of and optical elements fabricated thereby are also discussed.

First claim

That which is claimed:

1. An apparatus, comprising:
a polarization selector stage configured to vary a polarization of light from a light source among a plurality of polarizations;
a focusing element configured to focus the light from the light source into a spot at a focal plane thereof; and
a scanning stage configured to scan the spot in at least two dimensions along a surface of a polarization-sensitive recording medium arranged proximate to the focal plane such that neighboring scans of the spot spatially overlap to record optical axis orientation profiles that vary along the surface of the recording medium according to a time-average of ones of the plurality of polarizations to which the recording medium is exposed in the overlap,
wherein the polarization selector stage and the scanning stage are configured to independently vary the polarization and scan the spot, respectively.

2. The apparatus of claim 1 , wherein the polarization selector stage is configured to independently vary the polarization of the light among the plurality of polarizations during the scan of the spot to record the optical axis orientation profiles that vary according to the time-average of the ones of the plurality of polarizations.

3. A direct-write lithography method, comprising:
varying a polarization of light from a light source among a plurality of polarizations;
focusing the light from the light source into a spot at a focal plane; and
scanning the spot in at least two dimensions along a surface of a polarization-sensitive recording medium arranged proximate to the focal plane such that neighboring scans of the spot spatially overlap to record optical axis orientation profiles that vary along the surface of the recording medium according to a time-average of ones of the plurality of polarizations to which the recording medium is exposed in the overlap,
wherein the varying the polarization is controlled independent of the scanning the spot.

4. The method of claim 3 , wherein the scanning comprises:
scanning the spot along the surface of the recording medium with a spatial resolution smaller than a size of the spot.

5. The method of claim 3 , wherein the scanning further comprises:
continuously scanning the spot comprising the light having the polarization that varies among the plurality of polarizations along the surface of the recording medium.

6. The method of claim 3 , wherein varying the polarization comprises:
controlling the polarization independent of the scanning to provide a selectable linear polarization orientation angle.

7. The method of claim 6 , wherein varying the polarization further comprises:
rotating a retarder element such that the polarization orientation angle is selectable within a plane defined by the at least two dimensions responsive to rotation thereof.

8. The method of claim 6 , wherein scanning the spot comprises:
moving the recording medium in the at least two dimensions relative to the spot.

9. The method of claim 8 , wherein a polarization selector stage is arranged between the light source and a focusing element.

10. The method of claim 6 , wherein scanning the spot comprises:
rotating at least one mirror about respective axes corresponding to the at least two dimensions.

11. The method of claim 10 , wherein a scanning stage is arranged between a focusing element and the focal plane thereof, and wherein a polarization selector stage is arranged between the scanning stage and the focal plane of the focusing element.

12. The method of claim 3 , further comprising:
providing an at least partially collimated light beam having linear polarization as the light from the light source.

13. The method of claim 12 , wherein the light from the light source comprises ultraviolet (UV) light.

14. The method of claim 12 , wherein the light source comprises a laser light source.

15. The method of claim 12 , wherein the spot has a smoothly varying intensity profile at the focal plane.

16. The method of claim 3 , further comprising:
varying an intensity of the light from the light source independent of the varying of the polarization and the scanning of the spot.

17. The method of claim 3 , further comprising:
forming a birefringent material layer on the recording medium such that local optical axes thereof are aligned according to the optical axis orientation profiles in the recording medium.

18. The method of claim 3 , wherein the varying the polarization of the light among the plurality of polarizations is controlled independent of and performed during the scanning of the spot to record the optical axis orientation profiles that vary according to the time-average of the ones of the plurality of polarizations.

19. An optical element, comprising:
a birefringent material layer having local optical axis orientations that vary in at least one direction along a surface thereof, wherein the local optical axis orientations correspond to optical axis orientation profiles formed by:
varying a polarization of light from a light source among a plurality of polarizations;
focusing the light from the light source into a spot at a focal plane; and
scanning the spot in at least two dimensions along a surface of a polarization-sensitive recording medium arranged proximate to the focal plane such that neighboring scans spatially overlap to define the optical axis orientation profiles that vary along the surface of the recording medium according to a time-average of ones of the plurality of polarizations to which the recording medium is exposed in the overlap,
wherein varying the polarization and scanning the spot are performed independently.

20. The element of claim 19 , wherein the recording medium comprises a photo-alignment layer.

21. The element of claim 20 , wherein the birefringent material layer comprises a liquid crystal layer formed on the surface of the recording medium.

22. The element of claim 19 , wherein the birefringent material layer comprises an azobenzene polymer layer that is used as the recording medium.

23. The element of claim 19 , wherein the local optical axis orientations vary non-linearly in the at least one direction along the surface of the birefringent material layer to define a pattern having a varying periodicity.

24. The element of claim 23 , wherein the periodicity at a central portion of the birefringent material layer is greater than the periodicity at an edge portion thereof.

25. The element of claim 19 , wherein the local optical axis orientations vary linearly in the at least one direction along the surface of the birefringent layer to define a pattern having a constant periodicity.

26. The element of claim 19 , wherein the local optical axis orientations vary in first and second dimensions along the surface of the birefringent optical element.

27. The element of claim 19 , wherein the birefringent layer includes adjacent first and second regions positioned side-by-side, and wherein the local optical axis orientations in the first and second regions have different periodicities.

Assignees

• Univ North Carolina State

Inventors

• Escuti Michael J
• Miskiewicz Matthew N
• Kim Jihwan

Classifications

• G03H2240/15

  Polarisation modulation · CPC title

• G03H1/0476

  Holographic printer (G03H1/268 takes precedence) · CPC title

• G02B27/286

  for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another (G02B5/3083 takes precedence; light guide coupling means utilising polarising elements G02B6/34) · CPC title

• G03H1/08

  Synthesising holograms, {i.e. holograms synthesized from objects or objects from holograms}(using electric digital computers G06F; G06T) · CPC title

• G03F7/70566

  Polarisation control · CPC title