Accuracy and precision in raman spectroscopy

Patent metadata

Field	Value
Publication number	US-9689743-B2
Application number	US-201213559211-A
Country	US
Kind code	B2
Filing date	Jul 26, 2012
Priority date	Jul 26, 2012
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

The disclosure is related systems and method for improved accuracy and precision in Raman spectroscopy. In one embodiment, a device may comprise a Raman spectroscopic apparatus configured to determine a property of a sample by directing photons at the sample and measuring a resulting Raman scattering, a positioning apparatus capable of manipulating a position of the sample, and the device being configured to selectively adjust a focus of the Raman spectroscopic apparatus to adjust an intensity of the Raman scattering. Another embodiment may be a method comprising performing a depth focus Raman spectra screening on a sample to determine a depth focus with a maximum-intensity Raman spectra, wherein the depth focus spectra screening comprises performing Raman spectra scans on the sample at a plurality of depth foci, and modifying a process based on a result of the Raman spectra scan at the depth focus with the maximum-intensity Raman spectra.

First claim

What is claimed is:

1. A method comprising:
adjusting a first position of a sample on a plane substantially perpendicular to an angle of a light beam emitted from a Raman spectroscopic laser;
adjusting a tilt angle of the sample relative to the Raman spectroscopic laser based on a comparison of an optical image of the sample and a template image;
performing a first Raman spectra focus screening on the sample to determine a first depth focus setting of the Raman spectroscopic laser in relation to the sample based on a Raman spectra scattering intensity from the first Raman spectra focus screening, a Raman spectra focus screening including measuring the Raman spectra scattering intensity at a range of different depth focus settings of the light beam emitted from the Raman spectroscopic laser; and
performing a first Raman spectra test on the sample at the first depth focus setting.

2. The method of claim 1 , further comprising manually providing input directing a piezo scanner to adjust the first position of the sample.

3. The method of claim 1 , further comprising adjusting the first position of the sample based on a pattern-recognition algorithm.

4. The method of claim 3 , further comprising the pattern recognition algorithm comparing the template image to a current view of the sample and calculating a position modification necessary to move the sample to match the template image.

5. The method of claim 3 further comprising:
comparing, via an optical sensor and the pattern-recognition algorithm of a Raman spectroscopic apparatus including the Raman spectroscopic laser, the optical image of the test sample and the template sample image; and
calculating, via the Raman spectroscopic apparatus, positional adjustments to align the test sample with the template image based on the comparison.

6. The method of claim 1 , further comprising:
adjusting a second position of the sample on the plane substantially perpendicular to the angle of the light beam emitted from the Raman spectroscopic laser; and
performing a second Raman spectra test on the sample at the second position.

7. The method of claim 6 , further comprising:
performing a second Raman spectra focus screening on the sample at the second position to determine a second depth focus setting of the Raman spectroscopic laser in relation to the sample based on the Raman spectra scattering intensity from the second Raman spectra focus screening; and
performing the second Raman spectra test on the sample at the second position using the second depth focus setting.

8. The method of claim 1 , further comprising modifying a manufacturing process of the sample based on the results of the first Raman spectra test.

9. The method of claim 1 further comprising:
determining the first depth focus setting from the range of different depth focus settings at which to perform the first Raman spectra test on the sample using the Raman spectroscopic laser, the first depth focus setting determined based on a low measured intensity value of the Raman spectra scattering at the first depth focus setting compared to measured intensities at other depth focus settings from the range of different depth focus settings.

10. The method of claim 1 further comprising:
selecting the first depth focus setting based on a maximum-intensity Raman measured at the range of different depth focus settings.

11. A method comprising:
performing a depth focus Raman spectra screening on a test sample to determine a depth focus for a laser emitter of a Raman spectroscopic apparatus which produces a maximum-intensity Raman spectra, wherein the depth focus spectra screening comprises:
adjusting a tilt angle of the test sample relative to the laser emitter based on a comparison of an optical image of the test sample and a template sample image;
adjusting the laser emitter's depth focus setting separate from a visual focal plane of the Raman spectroscopic apparatus including the laser emitter, the depth focus setting adjusted using a focusing lens of the laser emitter;
performing Raman spectra scans on the test sample at a plurality of depth foci for the laser emitter; and

modifying a process based on a result of the Raman spectra scan at the depth focus with the maximum-intensity Raman spectra.

12. The method of claim 11 , further comprising using a piezo scanner to adjust a position of the test sample relative to the laser emitter of the Raman spectroscopic apparatus on a plane substantially perpendicular to an angle of a light beam emitted by the laser emitter of the Raman spectroscopic apparatus.

13. The method of claim 11 further comprising:
manually providing input directing the piezo scanner to adjust the position of the test sample.

14. The method of claim 11 further comprising:
determining a selected depth focus from the plurality of depth foci at which to perform a Raman spectroscopy test on the test sample using the Raman spectroscopic device, the selected depth focus determined based on a low measured intensity value of Raman scattering at the selected depth focus compared to measured intensities at other depth focus settings from the plurality of depth foci.

15. The method of claim 11 further comprising:
modifying the process includes modifying a manufacturing process of samples.

16. The method of claim 11 further comprising:
comparing, via an optical sensor and a pattern-recognition algorithm of the Raman spectroscopic apparatus, the optical image of the test sample and the template sample image; and
calculating, via the Raman spectroscopic apparatus, positional adjustments to align the test sample with the template image based on the comparison.

17. The method of claim 11 further comprising:
adjusting a first position of the test sample on a plane substantially perpendicular to an angle of a light beam emitted from the laser emitter; and
performing the Raman spectra scans on the test sample at the first position.

18. The method of claim 17 further comprising:
adjusting a second position of the test sample on the plane substantially perpendicular to the angle of the light beam emitted from the laser emitter; and
performing Raman spectra scans on the test sample at the second position to determine a second depth focus with the maximum-intensity Raman spectra.

19. The method of claim 18 further comprising:
performing a first Raman spectra test at the first position at the depth focus with the maximum-intensity Raman spectra;
performing a second Raman spectra test on the test sample at the second position using the second depth focus setting; and
modifying the process based on the first Raman spectra test and the second Raman spectra test.

Assignees

• Liu Huiwen
• Gunderson Peter
• Seagate Technology Llc

Inventors

• Liu Huiwen
• Gunderson Peter

Classifications

• G01J3/0248 Primary

  using a sighting port, e.g. camera or human eye · CPC title

• G01N21/65

  Raman scattering · CPC title

• G01J3/0237

  Adjustable, e.g. focussing · CPC title

• G01J3/44

  Raman spectrometry; Scattering spectrometry {; Fluorescence spectrometry} · CPC title

• G01J3/0278

  Control or determination of height or angle information for sensors or receivers · CPC title