Pressure control valve assembly of plasma processing chamber and rapid alternating process
US-9267605-B2 · Feb 23, 2016 · US
Vacuum valve
US9689507B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9689507-B2 |
| Application number | US-201514940343-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 13, 2015 |
| Priority date | Jan 7, 2015 |
| Publication date | Jun 27, 2017 |
| Grant date | Jun 27, 2017 |
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- Title
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- Abstract
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- First independent claim
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Abstract
Official abstract text for this publication.
A vacuum valve includes a valve opening and a valve plate that opens and closes the valve opening. A part of an edge of the valve opening is a wedge edge portion having a wedge shape projected outward. The wedge edge portion is provided in a region where the valve plate starts to open the valve opening when the valve plate is moved to open the valve opening.
First claim
Opening claim text (preview).
What is claimed is: 1. A vacuum valve including a valve opening and a valve plate that opens and closes the valve opening, wherein a part of an edge of the valve opening is a wedge edge portion having a wedge shape projected outward, and the wedge edge portion is provided in a region where the valve plate starts to open the valve opening when the valve plate is moved to open the valve opening, and further wherein a vertex of a wedge of the wedge edge portion is located at a position where an edge of the valve plate first comes into contact with the edge of the valve opening, the wedge edge portion includes a first straight line segment extending from the vertex, a second straight line segment extending from the vertex, a first circular arc extending from the first straight line segment, and a second circular arc extending from the second straight line segment, and the edge of the valve opening further includes an arc of a circle connecting the first circular arc and the second circular arc. 2. The vacuum valve according to claim 1 , wherein a member formed with the wedge edge portion is provided detachably with respect to the valve opening. 3. The vacuum valve according to claim 1 , wherein when the valve plate starts to open the valve opening, a change rate of an opening area is made small, as compared with a valve opening having a circular cross section.
Assignees
Inventors
Classifications
with special arrangements for separating the sealing faces or for pressing them together · CPC title
in the form of closure plates arranged between supply and discharge passages (F16K3/10 takes precedence) · CPC title
- F16K51/02Primary
specially adapted for high-vacuum installations · CPC title
by means of hydraulic forces · CPC title
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Frequently asked questions
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- What does patent US9689507B2 cover?
- A vacuum valve includes a valve opening and a valve plate that opens and closes the valve opening. A part of an edge of the valve opening is a wedge edge portion having a wedge shape projected outward. The wedge edge portion is provided in a region where the valve plate starts to open the valve opening when the valve plate is moved to open the valve opening.
- Who is the assignee on this patent?
- Shimadzu Corp
- What technology area does this patent fall under?
- Primary CPC classification F16K51/02. Mapped technology areas include Mechanical Engineering.
- When was this patent published?
- Publication date Tue Jun 27 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).