Method for producing molybdenum target

Patent metadata

Field	Value
Publication number	US-9689067-B2
Application number	US-201113825706-A
Country	US
Kind code	B2
Filing date	Sep 14, 2011
Priority date	Sep 30, 2010
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

Provided is a method by which a low-oxygen and high-density molybdenum target can be efficiently obtained, while fully utilizing the characteristics of each molybdenum (Mo) starting material powder. The present invention provides a method for producing a molybdenum target, wherein a mixed powder that is obtained by mixing a molybdenum powder A, which is prepared by reducing molybdenum oxide and then crushing the resulting so as to have an average particle diameter of 2-15 μm, and a molybdenum powder B, which is prepared by crushing a molybdenum bulk starting material having a density of not less than 6.64×10 (kg/m 3 ) so as to have an average particle diameter of 50-2,000 μm, is sintered under pressure.

First claim

The invention claimed is:

1. A method for producing a molybdenum target, comprising
preparing mixed powder by mixing molybdenum powder A and a molybdenum powder B, wherein the molybdenum powder A is obtained by reducing and then disintegrating molybdenum oxide so as to adjust the average particle diameter of the molybdenum powder A to be 2 to 15 μm and adjust the amount of oxygen in the molybdenum powder A to be 100 to 900 ppm by mass, and the molybdenum powder B is obtained by crushing a molybdenum bulk body having a density of not less than 6.64×10 3 kg/m 3 as a raw material so that the average particle diameter of the molybdenum powder B is 50 to 500 μm and then performing reduction-treatment so as to adjust the amount of oxygen in the molybdenum powder B to be 50 to 300 ppm by mass, and wherein the amount of oxygen in the mixed powder is adjusted to be 322 to 410 ppm by mass;
packing the mixed powder in a pressure vessel and then vacuum-degassing the mixed powder while heating the mixed powder; and
pressure-sintering the mixed powder under the condition that a sintering temperature is 1000° C. to 1800° C., a pressure is 10 to 200 MPa and a time is 1 to 10 hours so that the amount of oxygen in a molybdenum sintered body is not more than 300 ppm by mass.

2. The method for producing a molybdenum target according to claim 1 , wherein the mixed powder is mixed so that a mass percentage of the molybdenum powder A is 10% to 90%, where the mass percentage is represented by (A/(A+B))×100.

Assignees

• Saitoh Kazuya
• Hata Tomoyuki
• Kaminada Masashi
• Takashima Hiroshi
• Hitachi Metals Ltd

Inventors

• Saitoh Kazuya
• Hata Tomoyuki
• Kaminada Masashi
• Takashima Hiroshi

Classifications

• B22F2998/10

  Processes characterised by the sequence of their steps · CPC title

• B22F9/20

  starting from solid metal compounds · CPC title

• B22F9/04

  starting from solid material, e.g. by crushing, grinding or milling ({C22C1/1084 takes precedence}; crushing, grinding or milling, in general, see the relevant subclasses, e.g. B02C) · CPC title

• C22C1/045

  Alloys based on refractory metals · CPC title

• C23C14/14 Primary

  Metallic material, boron or silicon · CPC title