Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US9688797B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9688797-B2 |
| Application number | US-201414901334-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 18, 2014 |
| Priority date | Jun 28, 2013 |
| Publication date | Jun 27, 2017 |
| Grant date | Jun 27, 2017 |
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A fluorine-containing polymer having (a) a repeating unit derived from a fluorine-containing monomer indicated by the formula CH 2 ═C(—X)—C(═O)—Y—Z—Rf, (b) a repeating unit derived from a cyclic-hydrocarbon-group-containing acrylate ester monomer indicated by the formula CH 2 ═CQ 11 —C(═O)—O-Q 12 , and (c) a repeating unit derived from an aliphatic-hydrocarbon-group-containing acrylate ester monomer indicated by the formula CH 2 ═CQ 21 —C(═O)—O-Q 22 . The fluorine-containing polymer is produced by polymerizing in the presence of one or both of (d) a silicon-containing monomer and a silicon-containing chain transfer agent.
Opening claim text (preview).
The invention claimed is: 1. A fluorine-containing polymer comprising: (a) repeating units derived from a fluorine-containing monomer represented by the formula: CH 2 ═C(—X)—C(═O)—Y—Z—Rf wherein X is a hydrogen atom, a monovalent organic group or a halogen atom, Y is —O— or —NH—, Z is a direct bond or an divalent organic group, and Rf is a fluoroalkyl group having 1 to 20 carbon atoms, (b) repeating units derived from a cyclic hydrocarbon group-containing acrylate ester monomer represented by the formula: CH 2 ═CQ 11 —C(═O)—O-Q 12 wherein Q 11 is a hydrogen atom, a monovalent organic group or a halogen atom, and Q 12 is a cyclic hydrocarbon-containing group having 4 to 30 carbon atoms, (c) repeating units derived from an aliphatic hydrocarbon group-containing acrylate ester monomer represented by the formula: CH 2 ═CQ 21 —C(═O)—O-Q 22 wherein Q 21 is a hydrogen atom, a monovalent organic group or a halogen atom, and Q 22 is a linear or branched aliphatic hydrocarbon group having 12 to 30 carbon atoms, and (d) repeating units derived from a carboxylic acid group-containing monomer which is at least one selected from the group consisting of acrylic acid, methacrylic acid, crotonic acid, cinnamic acid, maleic acid, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride and tetraconic acid, wherein the fluorine-containing polymer is produced by polymerization in the presence of: (e) one or both of a silicon-containing monomer or a silicon-containing chain transfer agent. 2. The fluorine-containing composition according to claim 1 , wherein the fluorine-containing monomer (a) is represented by the formula: CH 2 ═C(—X)—C(═O)—Y—Z—Rf (1) wherein X is a linear or branched alkyl group having 2-21 carbon atoms, a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, a CFX 1 X 2 group (where X 1 and X 2 are a hydrogen atom, a fluorine atom, a chlorine atom, a bromine atom or an iodine atom), a cyano group, a linear or branched fluoroalkyl group having 1-21 carbon atoms, a substituted or unsubstituted benzyl group, or a substituted or unsubstituted phenyl group; Y is —O— or —NH—; Z is an aliphatic group having 1-10 carbon atoms, an aromatic group or cycloaliphatic group having 6-18 carbon atoms, a —CH 2 CH 2 N(R 1 )SO 2 — group (where R 1 is an alkyl group having 1-4 carbon atoms), a —CH 2 CH(OZ 1 )CH 2 — group (where Z 1 is a hydrogen atom or an acetyl group), a —(CH 2 ) m —SO 2 —(CH 2 ) n — group or a —(CH 2 ) m —S—(CH 2 ) n — group (where m is 1-10 and n is 0-10), Rf is a linear or branched fluoroalkyl group having 1 to 6 carbon atoms. 3. The fluorine-containing polymer according to claim 1 , wherein in the fluorine-containing monomer (a), X is a chlorine atom. 4. The fluorine-containing polymer according to claim 1 , wherein in the fluorine-containing monomer (a), the carbon number of Rf is 6. 5. The fluorine-containing polymer according to claim 1 , wherein the monomers (b) and (c) are a methacrylate ester where Q 11 and Q 21 are a methyl group. 6. A surface treatment agent composition comprising: (1) the fluorine-containing polymer according to claims 1 , and (2) an organic solvent. 7. The surface treatment agent composition according to claim 6 , which is a water- and oil-repellent agent or a stain proofing agent. 8. The surface treatment agent composition according to claim 6 , wherein the surface treatment agent composition is a solution having a flash point of at least 21° C. 9. The surface treatment agent composition according to claim 6 , wherein the organic solvent is a hydrocarbon organic solvent. 10. A method of treating a substrate with the surface treatment agent composition according to claim 6 . 11. A substrate which is treated with the surface treatment agent composition according to claim 6 .
containing silicon bound to unsaturated aliphatic groups · CPC title
Block or graft copolymers containing polysiloxane sequences (obtained by polymerising a compound having a carbon-to-carbon double bond on to a polysiloxane C09D151/08, C09D153/00) · CPC title
containing fluorine · CPC title
containing silicon bound to oxygen-containing groups · CPC title
Halogenated hydrocarbons · CPC title
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