Wet treatment apparatus and substrate treatment apparatus provided with the same

Patent metadata

Field	Value
Publication number	US-9687958-B2
Application number	US-201414450738-A
Country	US
Kind code	B2
Filing date	Aug 4, 2014
Priority date	Aug 7, 2013
Publication date	Jun 27, 2017
Grant date	Jun 27, 2017

Abstract

The present invention provides a wet treatment apparatus having divided base frames and waterproofing pans, which has an enhanced waterproofing property and can be easily assembled. A wet treatment apparatus 10 is provided with a first base frame 13 and a second base frame 14 . In addition, a first waterproofing pan 15 is arranged on a mounting surface 13 a of the first base frame 13 , and a second waterproofing pan 16 is arranged on a mounting surface 14 a of the second base frame 14 . A plate-shaped structure 17 having flexibility is provided on an end 15 a of the first waterproofing pan 15 . The plate-shaped structure 17 is configured to cover a gap between the end 15 a of the first waterproofing pan 15 and an end 16 a of the second waterproofing pan 16 , and can waterproof a space between the end 15 a of the first waterproofing pan 15 and the end 16 a of the second waterproofing pan 16.

First claim

What is claimed is:

1. A wet treatment apparatus comprising:
a first base frame;
a second base frame separable from the first base frame and arranged adjacent to the first base frame in a lateral direction;
a first waterproofing pan installed on an upper face of the first base frame; and
a second waterproofing pan installed on an upper face of the second base frame,
wherein the first waterproofing pan has an end, the second waterproofing pan has an end extending upwardly,…

Assignees

• Ebara Corp

Inventors

• Shinozaki Hiroyuki

Classifications

• H10P72/0424

  Electricity · mapped topic

• H10P72/0414

  Electricity · mapped topic

• B24B57/02

  Operations & Transport · mapped topic

• B08B3/02

  Operations & Transport · mapped topic

• B24B37/10

  Operations & Transport · mapped topic