Laser nanomachining device and method
US-2015158120-A1 · Jun 11, 2015 · US
US9687936B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9687936-B2 |
| Application number | US-201414529801-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 31, 2014 |
| Priority date | Dec 17, 2013 |
| Publication date | Jun 27, 2017 |
| Grant date | Jun 27, 2017 |
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A system for laser drilling of a material includes a pulsed laser configured to produce a pulsed laser beam having a wavelength less than or equal to about 850 nm, the wavelength selected such that the material is substantially transparent at this wavelength. The system further includes an optical assembly positioned in the beam path of the laser, configured to transform the laser beam into a laser beam focal line oriented along the beam propagation direction, on a beam emergence side of the optical assembly.
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What is claimed is: 1. A method of laser drilling a material comprising: focusing a pulsed laser beam into a laser beam focal line oriented along a beam propagation direction, the laser beam having a wavelength less than or equal to about 850 nm, the laser beam focal line having a length extending along the beam propagation direction that is in a range of between about 0.1 mm and about 100 mm and an average spot diameter that is in a range of between about 0.1 μm and about 5 μm; a…
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