Piezoelectric device, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer apparatus
US-2015364670-A1 · Dec 17, 2015 · US
Piezoelectric thin film element, piezoelectric actuator, piezoelectric sensor, hard-disk drive and ink jet printer device
US9685602B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9685602-B2 |
| Application number | US-201615006395-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 26, 2016 |
| Priority date | Jan 26, 2015 |
| Publication date | Jun 20, 2017 |
| Grant date | Jun 20, 2017 |
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Abstract
Official abstract text for this publication.
The present invention provides a piezoelectric thin film element having a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein the pair of electrode layers are composed of platinum (Pt), oxide particles are contained in at least one of the electrode layers, and the oxide particles are oxide particles of at least one element constituting the piezoelectric thin film or oxide particles of Pt.
First claim
Opening claim text (preview).
What is claimed is: 1. A piezoelectric thin film element comprising a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein the piezoelectric thin film is a potassium-sodium niobate based film having a perovskite structure, the pair of electrode layers are composed of platinum (Pt), oxide particles are contained in at least one of the electrode layers, and the oxide particles are oxide particles of at least one of K, Na, and Nb or oxide particles of Pt. 2. The piezoelectric thin film element according to claim 1 , wherein the oxide particles are in a state of being dispersed in the electrode layers, and the content ratio of the oxide particles per unit area in the cross section along the film thickness direction of the piezoelectric thin film is 5% or more and 20% or less. 3. The piezoelectric thin film element according to claim 1 , wherein the content of the oxide particles contained in the electrode layers is 5 wt % or more and 20 wt % or less. 4. The piezoelectric thin film element according to claim 1 , wherein the content of the oxide particles has a gradient in the film thickness direction of the electrode layers, and the maximal value of the content is present at the interface layer at the piezoelectric thin film side. 5. The piezoelectric thin film element according to claim 4 , wherein the maximal value is 5% or more and 20% or less in terms of the content ratio of the oxide particles per unit area in the cross section along the film thickness direction of the piezoelectric thin film. 6. The piezoelectric thin film element according to claim 4 , wherein the maximal value is 5 wt % or more and 20 wt % or less in terms of the content of the oxide particles contained in the electrode layers. 7. A piezoelectric actuator using the piezoelectric thin film element according to claim 1 . 8. A hard-disk drive comprising the piezoelectric actuator according to claim 7 . 9. An ink jet printer device comprising the piezoelectric actuator according to claim 7 . 10. A piezoelectric sensor using the piezoelectric thin film element according to claim 1 . 11. The piezoelectric thin film element according to claim 1 , wherein the oxide particles are oxide particles of Na and Nb only. 12. The piezoelectric thin film element according to claim 1 , wherein the oxide particles are oxide particles of K and Nb only. 13. The piezoelectric thin film element according to claim 1 , wherein the oxide particles are oxide particles of Nb only. 14. The piezoelectric thin film element according to claim 1 , wherein the oxide particles are oxide particles of Pt only.
Assignees
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Classifications
Electricity · mapped topic
of film type, deformed by bending and disposed on a diaphragm · CPC title
- H01L41/0477Primary
Electricity · mapped topic
Electricity · mapped topic
Piezoelectric devices between head and arm, e.g. for fine adjustment · CPC title
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- What does patent US9685602B2 cover?
- The present invention provides a piezoelectric thin film element having a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein the pair of electrode layers are composed of platinum (Pt), oxide particles are contained in at least one of the electrode layers, and the oxide particles are oxide particles of at least one element constituting…
- Who is the assignee on this patent?
- Tdk Corp
- What technology area does this patent fall under?
- Primary CPC classification H01L41/0477. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Jun 20 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).