Electronic device having graphene-semiconductor multi-junction and method of manufacturing the electronic device

Patent metadata

Field	Value
Publication number	US-9685516-B2
Application number	US-201514657306-A
Country	US
Kind code	B2
Filing date	Mar 13, 2015
Priority date	May 19, 2014
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

Example embodiments relate to an electronic device having a graphene-semiconductor multi-junction and a method of manufacturing the electronic device. The electronic device includes a graphene layer having at least one graphene protrusion and a semiconductor layer that covers the graphene layer. A side surface of each of the at least one graphene protrusion may be uneven, may have a multi-edge, and may be a stepped side surface. The graphene layer includes a plurality of nanocrystal graphenes. The graphene layer includes a lower graphene layer having a plurality of nanocrystal graphenes and the at least one graphene protrusion that is formed on the lower graphene layer. The semiconductor layer may include a transition metal dichalcogenide (TMDC) layer. Each of the at least one graphene protrusion may include a plurality of nanocrystal graphenes.

First claim

What is claimed is:

1. An electronic device comprising:
a substrate;
a graphene layer on the substrate; and
a semiconductor layer covering the graphene layer,
wherein the graphene layer includes a plurality of nanocrystal graphenes and a plurality of graphene protrusions, the graphene protrusions extending away from the graphene layer in an opposite direction to the substrate and including the nanocrystal graphenes in a stacking configuration and spaced apart from each other,
wherein the graphene protrusions are connected to each other by the plurality of nanocrystal graphenes.

2. The electronic device of claim 1 , wherein a side surface of one or more of the plurality of graphene protrusions is uneven.

3. The electronic device of claim 2 , wherein one or more of the plurality of graphene protrusions has a stepped side surface.

4. The electronic device of claim 1 , wherein one or more of the plurality of graphene protrusions comprises a plurality of nanocrystal graphenes.

5. The electronic device of claim 1 , wherein heights of the plurality of graphene protrusions are different from each other.

6. The electronic device of claim 1 , wherein the substrate is a flexible substrate.

7. The electronic device of claim 1 , wherein the semiconductor layer comprises a transition metal dichalcogenide (TMDC) layer.

8. The electronic device of claim 1 , wherein the graphene layer comprises:
a lower graphene layer including the plurality of nanocrystal graphenes; and
the plurality of graphene protrusions on the lower graphene layer.

9. The electronic device of claim 8 , wherein the lower graphene layer comprises first and second graphene layers stacked on each other.

10. The electronic device of claim 1 , wherein the semiconductor layer is in direct contact with the graphene layer.

11. The electronic device of claim 1 , wherein the graphene protrusions have a tapered configuration with lower layers being larger than upper layers.

12. The electronic device of claim 1 , wherein the graphene protrusions have a pyramidal configuration.

13. The electronic device of claim 1 , wherein the graphene protrusions have a substantially symmetrical configuration.

14. A method of manufacturing an electronic device, the method comprising:
forming on a first substrate a graphene layer that includes a plurality of nanocrystal graphenes;
forming a semiconductor layer on the graphene layer;
separating the first substrate from the graphene layer; and
transferring the graphene layer and the semiconductor layer to a second substrate that is more flexible than the first substrate,
wherein the graphene layer includes a plurality of graphene protrusions, the graphene protrusions extending away from the graphene layer in an opposite direction to the substrate and including the nanocrystal graphenes in a stacking configuration and spaced apart from each other,
wherein the graphene protrusions are connected to each other by the plurality of the nanocrystal graphenes.

15. The method of claim 14 , wherein the forming of the semiconductor layer comprises:
coating a semiconductor solution layer in a sol-gel state on the graphene layer; and
annealing the graphene layer coated with the semiconductor solution layer.

16. The method of claim 14 , wherein the forming of the semiconductor layer comprises:
forming on the graphene layer an oxide film that includes at least one portion of components of the semiconductor layer;
converting the oxide film into a semiconductor material film having a same material as the semiconductor layer; and
growing the semiconductor material film.

17. The method of claim 14 , wherein the semiconductor layer comprises a transition metal dichalcogenide (TMDC) layer.

18. The method of claim 14 , wherein the forming of the graphene layer comprises:
forming on the first substrate a lower graphene layer including the plurality of nanocrystal graphenes; and
forming the plurality of graphene protrusions on the lower graphene layer.

19. The method of claim 15 , wherein the semiconductor solution layer is coated via spin coating.

20. The method of claim 15 , wherein the coating of the semiconductor solution layer comprises providing the graphene layer in a solution that includes a component of the semiconductor layer and removing the graphene layer from the solution.

21. The method of claim 15 , wherein the annealing is one of low-temperature annealing performed at substantially 250° C. and high-temperature annealing performed in a range of about 400° C. to about 1000° C.

22. The method of claim 21 , wherein the semiconductor solution layer for the high-temperature annealing is thicker than the semiconductor solution layer for the low-temperature annealing.

23. The method of claim 14 , wherein a side surface of one or more of the plurality of graphene protrusions is uneven.

24. The method of claim 23 , wherein one or more of the plurality of graphene protrusions has a stepped side surface.

25. The method of claim 14 , wherein the semiconductor layer is in direct contact with the graphene layer.

Assignees

• Samsung Electronics Co Ltd
• Res And Business Found Sungkyunkwan Univ

Inventors

• Shin Hyeonjin
• Kim Sangwoo
• Lee Kanghyuck
• Park Hyejung
• Cho Eunbi

Classifications

• H10P95/90 Primary

  Thermal treatments, e.g. annealing or sintering · CPC title

• H10P14/3452

  Microstructure · CPC title

• H10P14/3436

  being chalcogenide semiconductor materials not being oxides, e.g. ternary compounds · CPC title

• H10P14/3406

  Carbon, e.g. diamond-like carbon · CPC title

• H10P14/3256

  Microstructure · CPC title