Apparatus for conserving electronic device manufacturing resources including ozone

Patent metadata

Field	Value
Publication number	US-9685352-B2
Application number	US-201514610301-A
Country	US
Kind code	B2
Filing date	Jan 30, 2015
Priority date	Mar 25, 2008
Publication date	Jun 20, 2017
Grant date	Jun 20, 2017

Abstract

An electronic device manufacturing system is provided that may reduce the amount of resources used in electronic device manufacturing processes. In some embodiments, unreacted ozone exiting a process tool operating in an ozone mode may be diverted and used as an oxidant in an abatement tool when the process tool is operating in a non-ozone mode. Numerous other embodiments are provided.

First claim

What is claimed is:

1. An electronic device manufacturing system comprising:
a process tool;
an ozone supply coupled to the process tool via a first conduit and adapted to supply ozone to the process tool;
an abatement tool adapted to receive effluent from the process tool; and
a second conduit connecting the abatement tool to the process tool, wherein the second conduit comprises a first valve that is adapted to:
direct unreacted ozone that exits the process tool into a third conduit for use in the abatement tool as an oxidant; and
direct effluent that exits the process tool into the abatement tool via the second conduit.

2. The electronic device manufacturing system of claim 1 further comprising an oxidant supply coupled to the third conduit and coupled to the abatement tool via a fourth conduit.

3. The electronic device manufacturing system of claim 2 further comprising a controller configured to operate the first valve in the second conduit to direct the unreacted ozone into the oxidant supply.

4. The electronic device manufacturing system of claim 1 wherein the third conduit directs the unreacted ozone into a fifth conduit that is coupled to the abatement tool.

5. The electronic device manufacturing system of claim 1 wherein the third conduit is coupled to the abatement tool and directs the unreacted ozone into the abatement tool for use as an oxidant.

6. The electronic device manufacturing system of claim 1 further comprising a controller configured to direct the unreacted ozone that exits the process tool into the abatement tool as an oxidant when the process tool operates in an ozone mode.

7. The electronic device manufacturing system of claim 1 further comprising a controller configured to direct effluent that exits the process tool through the second conduit and into the abatement tool to be abated when the process tool operates in a non-ozone mode.

8. The electronic device manufacturing system of claim 1 wherein the process tool operates in an ozone mode and a non-ozone mode.

9. The electronic device manufacturing system of claim 4 wherein the fifth conduit is coupled between the abatement tool and an oxidant supply, the fifth conduit comprising a second valve configured to direct the unreacted ozone from the third conduit into the abatement unit.

10. The electronic device manufacturing system of claim 5 further comprising an oxidant supply coupled to the abatement tool via a sixth conduit.

11. An electronic device manufacturing system comprising:
a process tool;
an ozone supply coupled to the process tool via a first conduit and adapted to supply ozone to the process tool;
an abatement tool adapted to receive effluent from the process tool;
a second conduit connecting the abatement tool to the process tool, wherein the second conduit comprises a first valve and is adapted to direct effluent that exits the process tool into the abatement tool, the effluent to be abated; and
a third conduit coupled to the process tool, wherein the third conduit comprises a second valve and is adapted to direct unreacted ozone that exits the process tool for use in the abatement tool as an oxidant.

12. The electronic device manufacturing system of claim 11 wherein the process tool operates in an ozone mode and a non-ozone mode.

13. The electronic device manufacturing system of claim 11 further comprising a controller configured to operate the first and second valves.

14. The electronic device manufacturing system of claim 13 wherein the controller is configured to close the first valve and open the second valve when the process tool operates in an ozone mode.

15. The electronic device manufacturing system of claim 13 wherein the controller is configured to open the first valve and close the second valve when the process tool operates in a non-ozone mode.

16. The electronic device manufacturing system of claim 11 further comprising an oxidant supply coupled to the third conduit and to the abatement tool via a fourth conduit.

17. The electronic device manufacturing system of claim 11 wherein the third conduit directs the unreacted ozone into a fifth conduit that is coupled to the abatement tool.

18. The electronic device manufacturing system of claim 17 wherein the fifth conduit is coupled between the abatement tool and an oxidant supply, the fifth conduit comprising a third valve configured to direct the unreacted ozone from the third conduit into the abatement tool.

19. The electronic device manufacturing system of claim 11 wherein the third conduit is coupled to the abatement tool and directs the unreacted ozone into the abatement tool for use as an oxidant.

20. The electronic device manufacturing system of claim 19 further comprising an oxidant supply coupled to the abatement tool via a sixth conduit.

Assignees

• Applied Materials Inc

Inventors

• Clark Daniel O
• Chandler Phil
• Jung Jay J

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H01L21/67017 Primary

  Electricity · mapped topic

• C23C16/4412 Primary

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• B01D53/74

  General processes for purification of waste gases; Apparatus or devices specially adapted therefor (B01D53/92 takes precedence) · CPC title

• Y10T137/0419

  Fluid cleaning or flushing · CPC title