Durable and scratch-resistant anti-reflective articles
US-9335444-B2 · May 10, 2016 · US
US9684097B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9684097-B2 |
| Application number | US-201414481221-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 9, 2014 |
| Priority date | May 7, 2013 |
| Publication date | Jun 20, 2017 |
| Grant date | Jun 20, 2017 |
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One or more aspects of the disclosure pertain to an article including an optical film structure disposed on a substrate, which may include a strengthened or non-strengthened substrate that may be amorphous or crystalline, such that the article exhibits scratch resistance and retains the same or improved optical properties as the substrate, without the optical film structure disposed thereon. In one or more embodiments, the article exhibits an average transmittance of 85% or more, over the visible spectrum (e.g., 380 nm-780 nm). Embodiments of the optical film structure include aluminum-containing oxides, aluminum-containing oxy-nitrides, aluminum-containing nitrides (e.g., AlN) and combinations thereof. The optical film structures disclosed herein also include a transparent dielectric including oxides such as silicon oxide, germanium oxide, aluminum oxide and a combination thereof. Methods of forming such articles are also provided.
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What is claimed is: 1. A transparent article comprising: a substrate having opposing major surfaces; and an optical film structure disposed on a first major surface of the substrate forming a front face, wherein the article comprises a maximum hardness of about 12 GPa or greater, as measured on the front face by a Berkovich Indenter Hardness Test along an indentation depth from about 200 nm to about 600 nm, and either one or both of: article transmittance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence exhibiting a color shift of less than about 2 from a reference point as measured at the front face, the reference point comprising at least one of the color coordinates (a*=0, b*=0) and the transmittance color coordinates of the substrate, and article reflectance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence exhibiting a color shift of less than about 2 from a reference point as measured at the front face, the reference point comprising at least one of the color coordinates (a*=0, b*=0) and the reflectance color coordinates of the substrate, wherein, when the reference point is the color coordinates of the substrate, the color shift is defined by √(a* article −a* substrate ) 2 +(b* article −b* substrate ) 2 ), and wherein, when the reference point is the color coordinates (a*=0, b*=0), the color shift is defined by √(a* article ) 2 +(b* article ) 2 ), wherein the article comprises an average transmittance of 85% or more, over the visible spectrum as measured at the front face. 2. The transparent article of claim 1 , wherein the article comprises an average transmittance of 87% or more, over the visible spectrum as measured at the front face. 3. The transparent article of claim 1 , further comprising a scratch resistance such that, when the front face is scratched with a Berkovich indenter using a load of 160 mN at a speed of 10 μm/seconds for at least a length of 100 μm along the front face of the article, a scratch having a scratch depth of less than 250 nm is formed. 4. The transparent article of claim 1 , further comprising a scratch resistance such that, when the front face is scratched with a Berkovich indenter using a load of 160 mN at a speed of 10 μm/seconds for at least a length of 100 μm along the front face of the article, a scratch having a scratch width of less than 10 μm is formed. 5. The transparent article of claim 1 , wherein the article comprises a maximum hardness of about 16 GPa or greater, as measured on the front face by a Berkovich Indenter Hardness Test along the indentation depth. 6. The transparent article of claim 1 , wherein the optical film structure comprises one of a silicon-containing oxide, a silicon-containing oxy-nitride, silicon nitride, aluminum nitride, an aluminum-containing oxy-nitride, an aluminum-containing oxide, silicon aluminum oxy-nitride or a combination thereof. 7. The transparent article of claim 1 , wherein the optical film structure comprises at least two layers, wherein a first layer is disposed between the substrate and a second layer. 8. The transparent article of claim 7 , wherein the first layer comprises at least one of silicon-containing oxide, a silicon-containing oxy-nitride, silicon nitride, aluminum nitride, an aluminum-containing oxy-nitride, an aluminum-containing oxide, and silicon aluminum oxy-nitride, and wherein the second layer comprises at least one of SiO 2 , GeO 2 , and Al 2 O 3 . 9. The transparent article of claim 7 , wherein the first layer comprises Al 2 O 3 , AlN, AIO X N y or combinations thereof. 10. The transparent article of claim 7 , wherein the first layer comprises a first sub-layer comprising Al 2 O 3 and a second sub-layer comprising AlN and, wherein the first sub-layer is disposed between the substrate and the second sub-layer. 11. The transparent article of claim 7 , wherein the first layer comprises a first sub-layer comprising AlO x N y and a second sub-layer comprising AlN and, wherein the first sub-layer is disposed between the substrate and the second sub-layer. 12. The transparent article of claim 7 , wherein the first layer further comprises SiO 2 . 13. The transparent article of claim 1 , wherein the optical film structure comprises a first layer and a second layer, wherein the first layer has a thickness greater than the thickness of the second layer. 14. The transparent article of claim 13 , wherein the optical film structure has a thickness of 1 μm or greater. 15. The transparent article of claim 1 , wherein the optical film structure comprises a compositional gradient comprising any one or more of an oxygen content gradient, a nitrogen content gradient, a silicon content gradient and an aluminum content gradient. 16. The transparent article of claim 1 , wherein the substrate comprises a crystalline substrate. 17. The transparent article of claim 1 , further comprising an interlayer disposed between the optical film structure and the substrate, wherein the interlayer comprises a polymer. 18. An article comprising: a substrate having opposing major surfaces; and an optical film structure disposed on a first major surface of the substrate forming a front face, the optical film structure comprising a first layer having a thickness of at least about 1 μm and comprising an aluminum-containing nitride, an aluminum-containing oxy-nitride, an aluminum-containing oxide or a combination thereof, and a second layer disposed on the first layer, wherein the article comprises a maximum hardness of 12 GPa or greater as measured on the front face by the Berkovich Indenter Hardness Test along an indentation depth from about 200 nm to about 600 nm, and wherein the article comprises an average transmittance of 85% or more over the visible spectrum, wherein the article comprises at least one of: article transmittance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence comprising a color shift of less than about 2 from a reference point as measured at the front face, the reference point comprising at least one of the color coordinates (a*=0, b*=0) and the transmittance color coordinates of the substrate, and article reflectance color coordinates in the (L*, a*, b*) colorimetry system at normal incidence comprising a color shift of less than about 2 from a reference point as measured at the front face, the reference point comprising at least one of the color coordinates (a*=0, b*=0) and the reflectance color coordinates of the substrate, and wherein, when the reference point is the color coordinates of the substrate, the color shift is defined by √((a* article −a* substrate ) 2 +(b* article −b* substrate ) 2 ), and wherein, when the reference point is the color coordinates (a*=0, b*=0), the color shift is defined by √((a* article ) 2 +(b* article ) 2 ). 19. The article of claim 18 , wherein the first layer comprises a first sub-layer, a second sub-layer and a third sub-layer, wherein the second sub-layer is disposed between the first sub-layer and the third sub-layer, and wherein the first and third sub-layers comprise AlN and the second sub-layer comprises SiO 2 . 20. The article of claim 18 , wherein the second layer comprises SiO 2 , GeO 2 , Al 2 O 3 , and a combination thereof. 21. The article of claim 18 , wherein the optical film structure further comprises a modifier selected from BN, Ag, Cr and combinations thereof. 22. The article of claim 21 , wherein the optical film structure comprises a coeff
Thickness [relative or absolute] · CPC title
Reflecting filters (G02B5/28 takes precedence) · CPC title
Physics · mapped topic
Absorbing filters {(G02B5/201 - G02B5/208 take precedence)} · CPC title
Oxynitrides · CPC title
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