Gas supply apparatus, vacuum processing apparatus, and gas supply method
US-2024055278-A1 · Feb 15, 2024 · US
US9683675B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9683675-B2 |
| Application number | US-201414551296-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 24, 2014 |
| Priority date | Nov 24, 2014 |
| Publication date | Jun 20, 2017 |
| Grant date | Jun 20, 2017 |
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An apparatus, for controlling signal passage, includes a first passageway for a first fluid, a second passageway for a second fluid, and an interposed chamber. A first, movable diaphragm at a first chamber junction and a second, movable diaphragm at a second chamber junction, with a third fluid bound there between and interposed between the first and second passageways. A device varies a volume of the third fluid bound between the diaphragms and thus moves the diaphragms. The diaphragms each have at least one position that permits passage of a pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the diaphragms. The diaphragms each have at least one position that prohibits passage of a pressure signal.
Opening claim text (preview).
What is claimed is: 1. An apparatus for controlling passage of a pressure signal, the apparatus including: a first passageway for a first fluid therein; a second passageway for a second fluid therein; a chamber interposed between the first and second passageways; a first, movable diaphragm located across a junction of the first passageway and the chamber, the first diaphragm being movable to plural positions; a second, movable diaphragm located across a junction of the second passageway and the chamber, the second diaphragm being movable to plural positions; a third fluid, the first and second diaphragms bounding the third fluid there between and interposed between the first and second passageways at the chamber; and a device for varying a volume of the third fluid bound between the first and second diaphragms and interposed between the first and second passageways at the chamber, a variation of the volume of the third fluid moving the first and second diaphragms; the first and second diaphragms each having at least one position that permits passage of a pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the first and second diaphragms, and the first and second diaphragms each having at least one position, corresponding to an increased volume of the third fluid between the first and second diaphragms by the device, that prohibits passage of a pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the first and second diaphragms. 2. An apparatus as set forth within claim 1 , wherein the pressure signal being a first pressure signal and the apparatus also controlling passage of a second pressure signal, the chamber being a first chamber, the device being a first device, and the apparatus further including: a third passageway for a fourth fluid therein; a second chamber interposed between the third and second passageways; a third, movable diaphragm located across a junction of the third passageway and the second chamber, the third diaphragm being movable to plural positions; a fourth, movable diaphragm located across a junction of the second passageway and the second chamber, the fourth diaphragm being movable to plural positions; a fifth fluid, the third and fourth diaphragms bounding the fifth fluid there between and interposed between the third and second passageways at the second chamber; and a second device for varying a volume of the fifth fluid bound between the third and fourth diaphragms and interposed between the third and second passageways at the second chamber, a variation of the volume of the fifth fluid moving the third and fourth diaphragms; the third and fourth diaphragms each having at least one position that permits passage of a pressure signal between the fourth fluid in the third passageway and the second fluid in the second passageway through the fifth fluid bound between the third and fourth diaphragms, and the third and fourth diaphragms each having at least one position that prohibits passage of a pressure signal between the fourth fluid in the third passageway and the second fluid in the second passageway through the fifth fluid bound between the third and fourth diaphragms. 3. An apparatus as set forth within claim 2 , wherein the apparatus further including a third device that controls the first and second devices such that the volume of the third fluid bound between the first and second diaphragms and interposed between the first and second passageways at the first chamber and the volume of the fifth fluid bound between the third and fourth diaphragms and interposed between the third and second passageways at the second chamber are controlled such the pressure signal from only one of the first fluid in the first passageway and the fourth fluid in the third passageway proceeds to the second fluid in the second passageway at a time. 4. An apparatus as set forth within claim 3 , wherein the second passageway is for connection to a pressure sensor and the second fluid is for transmission of pressure signals to the pressure sensor via the second passageway. 5. An apparatus as set forth within claim 3 , wherein the apparatus controls passage of a plurality of pressure signals. 6. An apparatus as set forth within claim 1 , wherein the second passageway is for connection to a pressure sensor and the second fluid is for transmission of pressure signals to the pressure sensor via the second passageway. 7. An apparatus as set forth within claim 1 , wherein each of the first and second diaphragms are flexible. 8. An apparatus as set forth within claim 1 , wherein the chamber is partially bounded by a first wall adjacent a junction of the first passageway to the chamber and a second wall adjacent a junction of the second passageway to the chamber. 9. An apparatus as set forth within claim 8 , wherein the first diaphragm is movable to a position that the first diaphragm engages the first wall and the second diaphragm is movable to a position that the second diaphragm engages the second wall. 10. An apparatus as set forth within claim 9 , wherein, with the first diaphragm in the position that the first diaphragm engages the first wall and with the second diaphragm in the position that the second diaphragm engages the second wall, transmission of the pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the first and second diaphragms is prohibited. 11. An apparatus as set forth within claim 8 , wherein the first wall is contoured as a spheroid shape and the second wall is contoured as a spheroid shape. 12. An apparatus as set forth within claim 8 , wherein the first wall is contoured as a concave shape with regard to the chamber and the second wall is contoured as a concave shape with regard to the chamber. 13. An apparatus as set forth within claim 8 , wherein the first diaphragm is movable to a position that the first diaphragm does not engage the first wall and the second diaphragm is movable to a position that the second diaphragm does not engage the second wall. 14. An apparatus as set forth within claim 13 , wherein, with the first diaphragm in the position that the first diaphragm does not engage the first wall and with the second diaphragm in the position that the second diaphragm does not engage the second wall, transmission of the pressure signal between the first fluid in the first passageway and the second fluid in the second passageway through the third fluid bound between the first and second diaphragms is permitted.
using isolation membranes (G01L13/026 and G01L19/0645 take precedence) · CPC title
with inflatable member · CPC title
Control of liquid pressure · CPC title
the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule · CPC title
correcting or regulating means for flexible diaphragms · CPC title
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