Device comprising a low dielectric loss borosilicate glass substrate and methods of making the same
US-2024400438-A1 · Dec 5, 2024 · US
US9682890B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9682890-B2 |
| Application number | US-201414915961-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 3, 2014 |
| Priority date | Sep 6, 2013 |
| Publication date | Jun 20, 2017 |
| Grant date | Jun 20, 2017 |
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Ceramic materials and ceramic bodies are disclosed herein, such as low thermal expansion ceramic materials or ceramic bodies, such as ceramic bodies comprising a benitoite-type phase.
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What is claimed is: 1. A microcracked ceramic body comprising one or more phases, wherein at least one phase is a cyclosilicate or cyclogermanate compound whose crystal structure is isostructural with that of mineral benitoite and belongs to space group P 6 m2. 2. The microcracked ceramic body of claim 1 wherein the at least one phase that is a cyclosilicate or cyclogermanate compound comprises the composition BaZr x Ti y Sn z Si 3 O 9 , wherein 0≦x≦1, 0≦y≦1, 0≦z≦1, and x+y+z=1. 3. The microcracked ceramic body of claim 1 , wherein micro-cracks in the ceramic body contribute to low coefficient of thermal expansion such that the ceramic body exhibits a mean coefficient of thermal expansion from 25 to 1000° C. of not more than 40×10 −7 ° C. −1 . 4. The microcracked ceramic body of claim 3 , wherein the mean coefficient of thermal expansion from 25 to 1000° C. is no more than 15×10 −7 ° C. −1 . 5. A microcracked ceramic body, comprising: a compound having a crystal structure isostructural with that of mineral benitoite and of a formula MM′M″ 3 O 9 , wherein M comprises one or more elements selected from the group consisting of strontium, lead, calcium, and barium; wherein M′ comprises one or more elements selected from the group consisting of zirconium, titanium, tin, hafnium, silicon, and cerium; and wherein M″ comprises one or more elements selected from the group consisting of silicon and germanium; and micro-cracks in the ceramic body contributing to low coefficient of thermal expansion such that the ceramic body exhibits a mean coefficient of thermal expansion over temperatures ranging from 25 to 1000° C. of not more than 40×10 −7 ° C. −1 . 6. The microcracked ceramic body of claim 5 , wherein M comprises barium. 7. The microcracked ceramic body of claim 5 , wherein M″ comprises silicon. 8. The microcracked ceramic body of claim 5 , wherein silicon and/or germanium atoms of M″ are bonded to four oxygen atoms located at corners of a tetrahedron. 9. The microcracked ceramic body of claim 8 , wherein (Si,Ge)O 4 tetrahedra are linked to one another at the corners to form isolated three-member rings in crystal structure of the microcracked ceramic body. 10. A microcracked ceramic body, comprising: one or more phases having a crystal structure isostructural with that of mineral benitoite and having a composition within a BaZrSi 3 O 9 —BaTiSi 3 O 9 —BaSnSi 3 O 9 system, where BaZrSi 3 O 9 , BaTiSi 3 O 9 , and BaSnSi 3 O 9 are boundary points that define a compositional space for the system covering BaZrSi 3 O 9 , BaTiSi 3 O 9 , BaSnSi 3 O 9 , and combinations thereof; and micro-cracks in the ceramic body contributing to low coefficient of thermal expansion such that the ceramic body exhibits a mean coefficient of thermal expansion over temperatures ranging from 25 to 1000° C. of not more than 40×10 −7 ° C. −1 . 11. The microcracked ceramic body of claim 10 , wherein the one or more phases more specifically comprise at least two phases having crystal structure isostructural with that of mineral benitoite. 12. The microcracked ceramic body of claim 11 , wherein one of the phases having crystal structure isostructural with that of mineral benitoite is Ba(Zr a Ti b Sn c )Si 3 O 9 , where 0≦a≦1, 0≦b≦0.5, 0≦c≦1, and a+b+c=1. 13. The microcracked ceramic body of claim 12 , wherein at least another of the phases having crystal structure isostructural with that of mineral benitoite is Ba(Zr d Ti e Sn f )Si 3 O 9 , where 0≦d≦0.4, 0.6≦e≦1, 0≦f≦0.4, and d+e+f=1. 14. The microcracked ceramic body of claim 10 , wherein the one or more phases having a crystal structure isostructural with that of mineral benitoite that include at least one of: a structure of Ba(Zr a Ti b Sn c )Si 3 O 9 , where 0≦a≦1, 0≦b≦0.5, 0≦c≦1, and a+b+c=1; and a structure of Ba(Zr d Ti e Sn f )Si 3 O 9 , where 0≦d≦0.4, 0.6≦e≦1, 0≦f≦0.4, and d+e+f=1. 15. The microcracked ceramic body of claim 14 , wherein, in the BaZrSi 3 O 9 —BaTiSi 3 O 9 —BaSnSi 3 O 9 system, the boundary point BaZrSi 3 O 9 is defined as point A, the boundary point BaTiSi 3 O 9 is defined as point B, a combination of 40% BaTiSi 3 O 9 and 60% BaSnSi 3 O 9 in molar weight is defined as point C, and a combination of 75% BaZrSi 3 O 9 and 25% BaSnSi 3 O 9 in molar weight is defined as point D, wherein a molar weighted average composition of all phases having a crystal structure isostructural with that of mineral benitoite in the compositional space of the system of the microcracked ceramic body lies within a region of the system defined by points A, B, C, and D, where weighted molar average composition of the phases having a crystal structure isostructural with that of mineral benitoite is calculated given by Ba(Zr g Ti h Sn i )Si 3 O 9 where g=[(X 1 )(a)+(X 2 )(d)]/(X 1 +X 2 ), h=[(X 1 )(b)+(X 2 )(e)]/(X 1 +X 2 ), and i=[(X 1 )(c)+(X 2 )(f)]/(X 1 +X 2 ) and where X 1 is the mole fraction of the phase of Ba(Zr a Ti b Sn c )Si 3 O 9 in the ceramic and X 2 is the mole fraction of phase of Ba(Zr d Ti e Sn f )Si 3 O 9 in the ceramic. 16. The microcracked ceramic body of claim 15 , wherein in the BaZrSi 3 O 9 —BaTiSi 3 O 9 —BaSnSi 3 O 9 system a combination of 75% BaTiSi 3 O 9 and 25% BaSnSi 3 O 9 in molar weight is defined as point E, and a combination of 90% BaZrSi 3 O 9 and 10% BaSnSi 3 O 9 in molar weight is defined as point F, wherein the molar weighted average composition of all phases having a crystal structure isostructural with that of mineral benitoite in the compositional space of the system of the microcracked ceramic body lies within a region of the system defined by points A, B, E, and F. 17. The microcracked ceramic body of claim 10 , having a high melting point, that being greater than 1450° C. 18. A microcracked ceramic body, comprising: a compound of a formula MM′M″ 3 O 9 , wherein M comprises one or more elements selected from the group consisting of strontium, lead, calcium, and barium; wherein M′ comprises one or more elements selected from the group consisting of zirconium, titanium, tin, hafnium, silicon, and cerium; and wherein M″ comprises one or more elements selected from the group consisting of silicon and germanium; and micro-cracks in the ceramic body contributing to low coefficient of thermal expansion such that the ceramic body exhibits a mean coefficient of thermal expansion over temperatures ranging from 25 to 1000° C. of not more than 40×10 −7 ° C. −1 . 19. The microcracked ceramic body of claim 18 , wherein M comprises barium. 20. The microcracked ceramic body of claim 18 , wherein M″ comprises silicon. 21. The microcracked ceramic body of claim 18 , wherein silicon and/or germanium atoms of M″ are bonded to four oxygen atoms located at corners of a tetrahedron. 22. The microcracked ceramic body of claim 21 , wherein (Si,Ge)O 4 tetrahedra are linked to one another at the corners to form isolated three-member rings in crystal structure of the microcracked ceramic body. 23. A microcracked ceramic body, comprising: one or more phases having a composition within a BaZrSi 3 O 9 —BaTiSi 3 O 9 —BaSnSi 3 O 9 system, where BaZrSi 3 O 9 , BaTiSi 3 O 9 , and BaSnSi 3 O 9 are boundary points that define a compositional space for the system covering BaZrSi 3 O 9 , BaTiSi 3 O 9 , BaSnSi 3 O 9 , and combinations thereof; and micro-cracks in the ceramic body contributing to low coefficient of thermal expansion such that the ceramic body exhibits a mean coefficient of thermal expansion over temperatures r
Phases present in the sintered or melt-cast ceramic products other than the main phase · CPC title
based on silicates other than clay {(zircon C04B35/48)} · CPC title
Unit-cell parameters, e.g. lattice constants · CPC title
Crystal structural characteristics, e.g. symmetry · CPC title
Clays, e.g. bentonites, smectites such as montmorillonite, vermiculites or kaolines, e.g. illite, talc or sepiolite · CPC title
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