Piezoelectric material, piezoelectric element, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-9680086-B2
Application number	US-201214354097-A
Country	US
Kind code	B2
Filing date	Oct 22, 2012
Priority date	Oct 26, 2011
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

The present invention provides a piezoelectric material which has excellent insulating and piezoelectric properties and which contains no lead and potassium and also provides a piezoelectric element and a multilayered piezoelectric element each using the above piezoelectric material. The piezoelectric material is a perovskite-type metal oxide represented by the following general formula (1).

(1− x ){(Na y Ba 1-z )(Nb 7 Ti 1-z )O 3 }- x BiFeO 3   (1)

In the formula, 0<x≦0.015, 0.80≦y≦0.95, 0.85≦z≦0.95 are satisfied.

First claim

The invention claimed is:

1. A piezoelectric material comprising:
a perovskite-type metal oxide represented by the following general formula (1)
(1 −x ){(Na y Ba 1-z )(Nb z Ti 1-z )O 3 }- x BiFeO 3   (1)

wherein in the formula, 0<x≦0.015, 0.80≦y≦0.95, and 0.85≦z≦0.95 hold.

2. The piezoelectric material according to claim 1 ,
wherein the piezoelectric material has a Curie temperature of 110° C. or more.

3. A piezoelectric element comprising:
a first electrode;
a piezoelectric material (portion); and
a second electrode,
wherein the piezoelectric material is the piezoelectric material according to claim 1 .

4. A liquid discharge head comprising:
a liquid chamber communicating with an ejection port;
a vibration portion; and
the piezoelectric element according to claim 3 .

5. A liquid discharge device comprising:
a transport unit for a recording medium; and
the liquid discharge head according to claim 4 .

6. An ultrasonic motor comprising:
a vibration body including the piezoelectric element according to claim 3 ; and
a moving body in contact with the vibration body.

7. An optical apparatus comprising:
the ultrasonic motor according to claim 6 in a drive portion.

8. A vibration device comprising:
a vibration body; and
the piezoelectric element according to claim 3 .

9. A dust removing device comprising:
the vibration device according to claim 8 in a vibration portion.

10. An imaging apparatus comprising:
the dust removing device according to claim 9 ; and
an imaging unit having a light receiving surface,
wherein the vibration body in the dust removing device and the light receiving surface of the imaging unit are sequentially provided on the same axis.

11. An electronic apparatus comprising:
a piezoelectric acoustic component including the piezoelectric element according to claim 3 .

12. A multilayered piezoelectric element comprising:
piezoelectric material layers; and
electrode layers including at least one internal electrode, the piezoelectric material layers and the electrode layers being alternately laminated to each other,
wherein the piezoelectric material layers include the piezoelectric material according to claim 1 .

13. The multilayered piezoelectric element according to claim 12 ,
wherein the internal electrode includes Ag and Pd, and
a ratio (M1/M2) of a weight M1 of the Ag to a weight M2 of the Pd is in a range of 1.5 to 9.0.

14. The multilayered piezoelectric element according to claim 12 , wherein the internal electrode includes at least one of Ni and Cu.

15. A liquid discharge head comprising:
a liquid chamber communicating with an ejection port;
a vibration portion; and
the multilayered piezoelectric element according to claim 12 .

16. A liquid discharge device comprising:
a transport unit for a recording medium; and
the liquid discharge head according to claim 15 .

17. An ultrasonic motor comprising:
a vibration body including the multilayered piezoelectric element according to claim 12 ; and
a moving body in contact with the vibration body.

18. An optical apparatus comprising:
the ultrasonic motor according to claim 17 in a drive portion.

19. A vibration device comprising:
a vibration body; and
the multilayered piezoelectric element according to claim 12 .

20. A dust removing device comprising:
the vibration device according to claim 19 in a vibration portion.

21. An imaging apparatus comprising:
the dust removing device according to claim 20 ; and
an imaging unit having a light receiving surface,
wherein the vibration body in the dust removing device and the light receiving surface of the imaging unit are sequentially provided on the same axis.

22. An electronic apparatus comprising:
a piezoelectric acoustic component including the multilayered piezoelectric element according to claim 12 .

Assignees

• Canon Kk

Inventors

• Murakami Shunsuke
• Watanabe Takayuki
• Kubota Makoto

Classifications

• C04B2235/768

  Perovskite structure ABO3 · CPC title

• C04B35/62685

  characterised by the order of addition of constituents or additives · CPC title

• C04B35/495 Primary

  based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates · CPC title

• H01L41/0973

  Electricity · mapped topic

• C04B2235/667

  Sintering using wave energy, e.g. microwave sintering · CPC title