Command data generation method, positioning apparatus, lithography apparatus, and article manufacturing method
US-2015378342-A1 · Dec 31, 2015 · US
US9678500B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9678500-B2 |
| Application number | US-201114342989-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 15, 2011 |
| Priority date | Sep 15, 2011 |
| Publication date | Jun 13, 2017 |
| Grant date | Jun 13, 2017 |
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A numerical control device reads a machining program and causes a machine tool to operate based on the machining program. The numerical control device includes: an acceleration-deceleration determining unit; and a position-command generating unit. The numerical control device is configured to set the acceleration and the deceleration as acceleration-deceleration data when the acceleration and the deceleration satisfy tolerances decided based on actual mechanical dynamic characteristics, and set the tolerances as acceleration-deceleration data when the acceleration and deceleration do not satisfy the tolerances. The position-command generating unit is configured to generate a position command based on the moving command, the acceleration-deceleration data, and the speed at the end of the command route and the superimposition amount subjected to processing by the acceleration-deceleration determining unit.
Opening claim text (preview).
The invention claimed is: 1. A numerical control device that reads a machining program and causes a machine tool to operate based on the machining program, all of a moving command, acceleration and deceleration in a tangential direction of a command route of the moving command, speed at an end of the command route, and a superimposition command for executing a moving command following the moving command in at least one block, being described the block, and the machining program including a plurality of blocks including the block, the numerical control device comprising: an acceleration-deceleration determining unit configured to set the acceleration and the deceleration as acceleration-deceleration data when the acceleration and the deceleration satisfy tolerances decided based on actual mechanical dynamic characteristics, set the tolerances as acceleration-deceleration data when the acceleration and deceleration do not satisfy the tolerances, and, when the acceleration and the deceleration in the tangential direction of the command route of the moving command do not satisfy the tolerances if the moving command following the moving command is executed with the superimposition amount, change the superimposition amount to a large value without changing the speed at the end of the command route or reduce the speed at the end of the command route without changing the superimposition amount; and a position-command generating unit configured to generate a position command based on the moving command, the acceleration-deceleration data, and the speed at the end of the command route and the superimposition amount subjected to processing by the acceleration-deceleration determining unit such that the moving command and the moving command following the moving command are superimposed by a distance corresponding to the superimposition amount and output the generated position command to a driving device of the machine tool. 2. A machining system that creates a machining program including moving commands for axes of a machine tool and including a plurality of blocks and causes the machine tool to operate based on the moving command commanded to the machining program, the machining system comprising: a machining program creating device including: a moving-command generating unit configured to generate the moving command in at least one of the blocks based on machining information; an acceleration-deceleration-command generating unit configured to generate, in the block in which the moving command is generated, based on mechanical dynamic characteristics set in advance, an acceleration-deceleration command including acceleration and deceleration in a tangential direction of a command route of the moving command and speed at an end of the command route; and a superimposition command unit configured to calculate, from the moving command and the acceleration command, a superimposition amount for allowing accuracy of a track to satisfy requested accuracy when the moving command and the moving command following the first moving command are superimposed and command, using a numerical value, the superimposition amount in the block in which the moving command is generated; and a numerical control device including: an acceleration-deceleration determining unit configured to set the acceleration and the deceleration as acceleration-deceleration data when the acceleration and the deceleration satisfy tolerances decided based on actual mechanical dynamic characteristics, set the tolerances as acceleration-deceleration data when the acceleration and deceleration do not satisfy the tolerances, and, when the acceleration and the deceleration in the tangential direction of the command route of the moving command do not satisfy the tolerances if the moving command following the moving command is executed with the superimposition amount, change the superimposition amount to a large value without changing the speed at the end of the command route or reduce the speed at the end of the command route without changing the superimposition amount; and a position-command generating unit configured to generate a position command based on the moving command, the acceleration-deceleration data, and the speed at the end of the command route and the superimposition amount subjected to processing by the acceleration-deceleration determining unit such that the moving command and the moving command following the moving command are superimposed by a distance corresponding to the superimposition amount and output the generated position command to a driving device of the machine tool. 3. A numerical control method for causing a driving device of a machine tool to operate according to a position command generated based on a machining program, all of a moving command, acceleration and deceleration in a tangential direction of a command route of the moving command, speed at an end of the command route, and a superimposition command for executing a moving command following the moving command in at least one block being described the block and the machining program including a plurality of blocks including the block, the numerical control device comprising: setting the acceleration and the deceleration as acceleration-deceleration data when the acceleration and the deceleration satisfy tolerances decided based on actual mechanical dynamic characteristics and setting the tolerances as acceleration-deceleration data when the acceleration and deceleration do not satisfy the tolerances; executing change processing for, when the acceleration and the deceleration in the tangential direction of the command route of the moving command do not satisfy the tolerances if the moving command following the moving command is executed with the superimposition amount, changing the superimposition amount to a large value without changing the speed at the end of the command route or reducing the speed at the end of the command route without changing the superimposition amount; and generating the position command based on the moving command, the acceleration-deceleration data, and the speed at the end of the command route and the superimposition amount subjected to the change processing such that the moving command and the moving command following the moving command are superimposed by a distance corresponding to the superimposition amount. 4. The numeric control device of claim 1 , wherein the actual mechanical characteristics comprise at least two of: a maximum acceleration tolerance of X-axis of the machining tool, a maximum acceleration tolerance of Y-axis of the machining tool, a maximum deceleration of the X-axis of the machining tool, and a maximum deceleration of the Y-axis of the machining tool. 5. The numeric control device of claim 1 , wherein the tolerances are appended as a comment to the at least one block of the machining program. 6. The numeric control device of claim 1 , wherein the tolerances comprise a relational expression having at least two of: speed, electric current, torque, and an electric current with respect to the moving command and wherein the tolerances are added to the machining program.
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