Composition and process for stripping photoresist from a surface including titanium nitride

Patent metadata

Field	Value
Publication number	US-9678430-B2
Application number	US-201314401732-A
Country	US
Kind code	B2
Filing date	May 17, 2013
Priority date	May 18, 2012
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

A method and low pH compositions for removing bulk and/or hardened photoresist material from microelectronic devices have been developed. The low pH compositions include sulfuric acid and at least one phosphorus-containing acid. The low pH compositions effectively remove the hardened photoresist material while not damaging the underlying silicon-containing layer(s) or the metal gate materials.

First claim

What is claimed is:

1. A composition for stripping resist, said composition comprising sulfuric acid and at least one phosphorus-containing acid, with the proviso that the phosphorus-containing acid cannot include phosphoric acid per se, said composition having a pH less than about 2, wherein the composition is substantially devoid of organic solvents, and wherein at least one phosphorus-containing acid comprises a species selected from the group consisting of 1,5,9-triazacyclododecane-N,N′,N″-tris(methylenephosphonic acid) (DOTRP), 1,4,7,10-tetraazacyclododecane-N,N′,N″,N′″-tetrakis(methylenephosphonic acid) (DOTP), diethylenetriaminepenta(methylenephosphonic acid) (DETAP), aminotri(methylenephosphonic acid), bis(hexamethylene)triamine phosphonic acid, bis(hexamethylene triamine penta(methylenephosphonic acid)), 1,4,7-triazacyclononane-N,N′,N″-tris(methylenephosphonic acid (NOTP), N-(Phosphonomethyl)-iminodiacetic acid, 2-amino-2-propylphosphonic acid, iminobis(methylenephosphonic acid), pyridoxal-5-(dihydrogenphosphate), amino(phenyl)methylene-diphosphoric acid, ethylenebis(imino-(2-hydroxyphenyl)methylene(methyl)-phosphonic acid)), 2-Phosphonobutane-1,2,4-tricarboxylic acid, ethylenediamine tetra(methylene phosphonic acid) (EDTMPA), salts thereof, and combinations thereof.

2. The composition of claim 1 , wherein the sulfuric acid is concentrated.

3. The composition of claim 1 , wherein the amount of sulfuric acid is in a range from about 50 wt % to about 99 wt %, based on the total weight of the composition.

4. The composition of claim 1 , wherein the amount of phosphorus-containing acid is in a range from about 1 wt % to about 50 wt %, based on the total weight of the composition.

5. The composition of claim 1 , further comprising at least one oxidizing agent, with the proviso that the at least one oxidizing agent cannot include hydrogen peroxide per se.

6. The composition of claim 5 , wherein the at least one oxidizing agent comprises a species selected from the group consisting of periodic acid, a periodate salt, ammonium persulfate, perchloric acid, ammonium perchlorate, tetramethylammonium perchlorate, oxone (2KHSO 5 .KHSO 4 .K 2 SO 4 ), ozone, a cerium (IV) salt, a cerium (IV) coordination complex, and combinations thereof.

7. The composition of claim 6 , wherein the cerium (IV) salt comprises a species selected from the group consisting of cerium ammonium nitrate (CAN), ceric nitrate, ceric ammonium sulfate, ceric sulfate, ceric bisulfate, ceric perchlorate, ceric methanesulfonate, ceric trifluoromethanesulfonate, ceric chloride, ceric hydroxide, ceric carboxylate, ceric β-diketone, ceric trifluoroacetate, ceric acetate, and combinations thereof.

8. The composition of claim 1 , said composition being substantially devoid of at least one of added water, abrasive material, hydrogen peroxide, wetting agents, tungsten, fluoride ions, copper ions or copper-containing residue, and potassium sulfate.

9. A method of removing high dose ion-implanted resist from the surface of a microelectronic device comprising same, said method comprising contacting the microelectronic device with a first composition for time and temperature necessary to effectuate at least partial removal of the resist, said first composition comprising sulfuric acid and at least one phosphorus-containing acid, with the proviso that the phosphorus-containing acid cannot include phosphoric acid per se, and wherein the composition is substantially devoid of organic solvents.

10. The method of claim 9 , further comprising contacting the microelectronic device with a cerium-containing composition to effectuate additional removal of the resist.

11. The method of claim 10 , further comprising contacting the microelectronic device with the first composition to complete the substantial removal of resist from the device.

12. The method of claim 9 , further comprising rinsing the device.

13. The method of claim 12 , wherein the rinse comprises a water rinse followed by a SC-1 rinse, followed by a second rinse with DI water.

14. The method of claim 13 , wherein the SC-1 rinse comprises hydrogen peroxide, ammonium hydroxide and water.

15. The method of claim 9 , wherein the composition does not substantially damage low-k dielectric materials or metal gate materials on the device surface.

16. The method of claim 9 , wherein the resist is implanted with a dopant species selected from the group consisting of boron, boron difluoride, arsenic, indium, gallium, germanium, bismuth, xenon, phosphorus and antimony.

17. The method of claim 9 , wherein the composition is combined just prior to contacting with the surface of the microelectronic device.

18. The method of claim 9 , wherein the pH of the composition is less than about 2.

19. The method of claim 9 , wherein at least one phosphorus-containing acid comprises a species selected from the group consisting of 1,5,9-triazacyclododecane-N,N′,N″-tris(methylenephosphonic acid) (DOTRP), 1,4,7,10-tetraazacyclododecane-N,N′,N″,N′″-tetrakis(methylenephosphonic acid) (DOTP), diethylenetriaminepenta(methylenephosphonic acid) (DETAP), aminotri(methylenephosphonic acid), bis(hexamethylene)triamine phosphonic acid, bis(hexamethylene triamine penta(methylenephosphonic acid)), 1,4,7-triazacyclononane-N,N′,N″-tris(methylenephosphonic acid (NOTP), N-(Phosphonomethyl)-iminodiacetic acid, 2-amino-2-propylphosphonic acid, iminobis(methylenephosphonic acid), pyridoxal-5-(dihydrogenphosphate), amino(phenyl)methylene-diphosphoric acid, ethylenebis(imino-(2-hydroxyphenyl)methylene(methyl)-phosphonic acid)), 2-Phosphonobutane-1,2,4-tricarboxylic acid, ethylenediamine tetra(methylene phosphonic acid) (EDTMPA), salts thereof, and combinations thereof.

Assignees

• Advanced Tech Materials
• Entegris Inc

Inventors

• Cooper Emanuel I
• Conner Marc
• Owens Michael

Classifications

• H10P50/287

  by chemical means · CPC title

• C11D3/364

  containing nitrogen · CPC title

• C11D3/042

  Acids · CPC title

• G03F7/423 Primary

  containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds · CPC title

• H01L21/31133

  Electricity · mapped topic