Rotating magnetic field hall measurement system

Patent metadata

Field	Value
Publication number	US-9678040-B2
Application number	US-201514682696-A
Country	US
Kind code	B2
Filing date	Apr 9, 2015
Priority date	Apr 9, 2015
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

A rotating magnetic field Hall apparatus is provided and includes first and second magnets disposed in a master-slave configuration, a device-under-test (DUT) stage interposable between the first and second magnets on which a DUT is disposable in first or second orientations for Hall measurement or photoelectromagnetic (PEM) testing, respectively, controllers disposed to center the DUT stage between the first and second magnets and orthogonal magnetic field sensors disposed aside lateral sides of the first magnet to facilitate positional initialization of the first and second magnets and to generate in-phase and out-of-phase reference signals for phase-sensitive or lock-in Hall signal detection. The system also includes software system to perform signal processing to yield the final Hall signal.

First claim

What is claimed is:

1. A rotating magnetic field Hall apparatus, comprising:
a motor-driven cylindrical magnet with transverse magnetization
a freely rotating cylindrical magnet, which rotates with the motor-driven magnet;
a device-under-test (DUT) stage interposable between the motor-driven and freely rotating magnets on which a DUT is disposable in first or second orientations for Hall measurement or photoelectromagnetic (PEM) testing, respectively;
a first controller disposed to maneuver the motor-driven magnet in a vertical dimension;
second controllers disposed to maneuver the DUT stage in vertical and horizontal dimensions; and
an orthogonal magnetic field sensor assembly comprising:
first and second transversely oriented spires;
a first sensor disposed on the first spire to face upwardly in the vertical dimension to face a lower facing lateral and non-longitudinal side of the first magnet; and
a second sensor disposed on the second spire to face sideways in the horizontal dimension to face a sideways facing lateral and non-longitudinal side of the first magnet,
the first and second sensors being configured to facilitate positional initialization of the motor-driven and freely rotating magnets and to generate in-phase and out-of-phase reference signals for phase-sensitive or lock-in Hall signal detection.

2. The rotating magnetic field Hall apparatus according to claim 1 , wherein the motor-driven magnet and the freely rotating magnet are disposed in parallel.

3. The rotating magnetic field Hall apparatus according to claim 1 , further comprising a magnetic flux concentrator to increase a magnetic field of one of the motor-driven and freely rotating magnets.

4. The rotating magnetic field Hall apparatus according to claim 3 , wherein the magnetic flux concentrator is provided as a first magnetic flux concentrator interposed along the vertical dimension between the motor-driven magnet and the DUT stage and a second magnetic flux concentrator interposed along the vertical dimension between the freely-rotating magnet and the DUT stage.

5. The rotating magnetic field Hall apparatus according to claim 3 , wherein the magnetic flux concentrator comprises a high permeability material.

6. The rotating magnetic field Hall apparatus according to claim 1 , further comprising a stopper disposed to limit a movement of the freely rotating magnet in the vertical dimension.

7. The rotating magnetic field Hall apparatus according to claim 1 , further comprising a ruler to determine a distance in the vertical dimension between the motor-driven magnet and freely rotating magnet.

8. The rotating magnetic field Hall apparatus according to claim 1 , further comprising a light source disposed to emit light toward the DUT.

9. The rotating magnetic field Hall apparatus according to claim 1 , wherein the DUT comprises a Hall or van der Pauw sample and further comprising a contact terminal panel, which is disposed to apply current to the DUT.

10. A computing system, comprising:
a processor;
a memory on which a program is stored, which, when executed causes the processor to manage a rotating magnet Hall apparatus, comprising:
first and second magnets disposed in a master-slave configuration;
a device-under-test (DUT) stage interposable between the first and second magnets on which a DUT is disposable in first or second orientations for Hall measurement or photoelectromagnetic (PEM) testing, respectively;
controllers operable by the processor and disposable to center the DUT stage between the first and second magnets by maneuvering the first magnet in a vertical dimension and by maneuvering the DUT stage in a horizontal dimension; and
an orthogonal magnetic field sensor assembly operably by the processor and comprising:
first and second transversely oriented spires;
a first sensor disposed on the first spire to face upwardly in the vertical dimension to face a lower facing lateral and non-longitudinal side of the first magnet; and
a second sensor disposed on the second spire to face sideways in the horizontal dimension to face a sideways facing lateral and non-longitudinal side of the first magnet,
the first and second sensors being operable by the processor to facilitate positional initialization of the first and second magnets and to generate in-phase and out-of-phase reference signals for phase-sensitive or lock-in Hall signal detection.

11. The computing system according to claim 10 , wherein the processor is configured to perform signal processing to extract a final Hall signal and comprises:
a signal conditioning system for data selection and background subtraction;
a power spectral density analysis system; and
a system for lock-in detection and signal-to-noise ratio calculation.

Assignees

• IBM

Inventors

• Gunawan Oki
• Pereira Michael A

Classifications

• G01N27/72 Primary

  by investigating magnetic variables · CPC title

• G01R33/07 Primary

  Hall effect devices · CPC title