Graphene-based gas and bio sensor with high sensitivity and selectivity

Patent metadata

Field	Value
Publication number	US-9678036-B2
Application number	US-201414209620-A
Country	US
Kind code	B2
Filing date	Mar 13, 2014
Priority date	Mar 15, 2013
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

A graphene sensor and method for selective sensing of vapors, gases and biological agents are disclosed. The graphene sensor can include a substrate; a dielectric substrate on an upper layer of the substrate; a layer of graphene on an upper layer of the dielectric substrate; and a source and drain contact on an upper surface of the layer of graphene. The method for detection of vapors, gases and biological objects with low frequency input as a sensing parameter can include exposing a graphene device to at least one vapor, gas, and/or biological object, the graphene device comprising: a substrate; a dielectric substrate on an upper layer of the substrate, a layer of graphene on an upper layer of the dielectric substrate, and a source and drain contact on an upper surface of the layer of graphene; and measuring a change in a noise spectra of the graphene device.

First claim

What is claimed is:

1. A graphene sensor for selective sensing of vapors, gases and biological agents, the graphene sensor comprising:
a substrate;
a dielectric substrate on an upper layer of the substrate;
a layer of graphene on an upper layer of the dielectric substrate;
a source and drain contact on an upper surface of the layer of graphene;
a pre-amplifier configured to amplify current fluctuations; and
a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation.

2. The graphene sensor of claim 1 , wherein the layer of graphene is single layer graphene (SLG).

3. The graphene sensor of claim 1 , wherein the layer of graphene is a bilayer graphene (BLG).

4. The graphene sensor of claim 1 , wherein the substrate is a p-typed highly-doped Si wafer.

5. The graphene sensor of claim 1 , wherein the dielectric substrate is 300-nm thermally grown SiO 2 .

6. The graphene sensor of claim 1 , wherein the source and drain contact are Cr/Au.

7. The graphene sensor of claim 1 , wherein the source and drain contact are Ti/Au.

8. The graphene sensor of claim 1 , comprising:
a pair of Cr/Au contact pads.

9. The graphene sensor of claim 1 , comprising:
a signal analyzer to measure a noise power spectrum.

10. The graphene sensor of claim 1 , comprising:
an electrical circuit for a low frequency noise spectrum input.

11. The graphene sensor of claim 1 , wherein the low-pass and/or the high-pass filter are configured to pass frequencies from 0.03 Hz to 100 KHz.

12. A graphene sensor for selective sensing of vapors, gases and biological agents, the graphene sensor comprising:
a substrate;
a dielectric substrate on an upper layer of the substrate;
one or more ribbons of graphene on an upper layer of the dielectric substrate;
a metal electrode acting as a source and drain contact;
a pre-amplifier configured to amplify current fluctuations; and
a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation.

13. The graphene sensor of claim 12 , wherein the one or more graphene ribbons comprise a plurality of graphene ribbons.

14. The graphene sensor of claim 13 , wherein each of the plurality of graphene ribbons has multiple electrodes.

15. The graphene sensor of claim 14 , wherein the multiple electrodes have different distances between a pair of electrodes.

16. The graphene sensor of claim 12 , comprising:
a signal analyzer to measure a noise power spectrum.

17. A method for selective detection of vapors, gases and biological objects with low frequency input as a sensing parameter using a graphene device, the method comprising:
exposing the graphene device to at least one vapor, gas, and/or biological object, the graphene device comprising a substrate, a dielectric substrate on an upper layer of the substrate, a layer of graphene on an upper layer of the dielectric substrate, and a source and drain contact on an upper surface of the layer of graphene, a pre-amplifier configured to amplify current fluctuations, and a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation; and
measuring a change in a noise spectra of the amplified current fluctuations of the graphene device.

18. The method of claim 17 , comprising:
measuring the change in the noise spectra of the graphene device with a signal analyzer.

19. A method for selective detection of vapors, gases and biological objects with low frequency input as a sensing parameter using a graphene device, the method comprising:
exposing the graphene device to at least one vapor, gas, and/or biological object, the graphene device comprising a substrate, a dielectric substrate on an upper layer of the substrate, one or more ribbons of graphene on an upper layer of the dielectric substrate, a metal electrode acting as a source and drain contact, a pre-amplifier configured to amplify current fluctuations, and a low-pass and/or a high-pass filter configured to pass the amplified current fluctuations for analyzation; and
measuring a change in a noise spectra of the amplified current fluctuations of the graphene device.

20. The method of claim 19 , comprising:
measuring the change in the noise spectra of the graphene device with a signal analyzer.

Assignees

• Univ California

Inventors

• Balandin Alexander A

Classifications

• B82Y15/00

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• G01N27/414 Primary

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