Apparatus and method for inspecting filtering cartridge

Patent metadata

Field	Value
Publication number	US-9677985-B2
Application number	US-201414276545-A
Country	US
Kind code	B2
Filing date	May 13, 2014
Priority date	May 13, 2014
Publication date	Jun 13, 2017
Grant date	Jun 13, 2017

Abstract

An apparatus applicable to a storage container is provided and includes a filtering cartridge, a gas supply device and a particle counter. The filtering cartridge is configured to be disposed on the storage container. The filtering cartridge includes a flexible housing and a filter. The flexible housing has a first portion and a second portion opposite to the first portion. The flexible housing includes a gas inlet, a first gas outlet and a second gas outlet. The gas inlet is disposed on the first portion. The first gas outlet is disposed on the first portion. The second gas outlet is disposed on the second portion and connected to the storage container. The filter is disposed over the second gas outlet. The gas supply device is connected to the gas inlet, thereby purging gas into the flexible housing. The particle counter is connected to the first gas outlet.

First claim

What is claimed is:

1. An apparatus applicable to a storage container, the apparatus comprising:
a filtering cartridge configured to be disposed on the storage container, the filtering cartridge comprising:
a flexible housing having a sidewall, a first end, and a second end opposite to the first end, wherein the sidewall is located between the first end and the second end, the flexible housing comprising:
a gas inlet disposed on the sidewall of the flexible housing near the first end of the flexible housing;
a first gas outlet disposed on the sidewall of the flexible housing near the first end of the flexible housing; and
a second gas outlet disposed on the second end of the flexible housing and communicating with the storage container; and

a filter disposed to cover the second gas outlet;

a gas supply device connected to the gas inlet; and
a particle counter located outside the flexible housing and connected to the first gas outlet.

2. The apparatus of claim 1 , wherein the filtering cartridge further comprises a spring disposed in the flexible housing.

3. The apparatus of claim 1 , wherein the filtering cartridge further comprises an o-ring surrounding the filter.

4. The apparatus of claim 1 , wherein the gas supply device includes gas that includes nitrogen gas, clean dry air (CDA), or extreme clean dry air (XCDA).

5. The apparatus of claim 1 , wherein the storage container includes a front opening unified pod (FOUP), a mask pod, or a reticle pod.

6. The storage container of claim 5 , wherein the filtering cartridge further comprises a spring disposed in the flexible housing.

7. The storage container of claim 5 , wherein the filtering cartridge further comprises an o-ring surrounding the filter.

8. The storage container of claim 5 , wherein the gas supply device includes gas that includes nitrogen gas, CDA, or XCDA.

9. The storage container of claim 5 , wherein the storage container is a front opening unified pod (FOUP), a mask pod, or a reticle pod.

10. The storage container of claim 1 , wherein the filter has a bore diameter in 0.3 μm.

11. A storage container, comprising:
a pod;
a filtering cartridge, comprising:
a flexible housing having a sidewall, a first end, and a second end opposite to the first end, wherein the sidewall is located between the first end and the second end, the flexible housing comprising:
a gas inlet disposed on the sidewall of the flexible housing near the first end of the flexible housing;
a first gas outlet disposed on the sidewall of the flexible housing near the first end of the flexible housing; and
a second gas outlet disposed on the second end of the flexible housing and communicating with the pod; and

a filter disposed to cover the second gas outlet;

a gas supply device located outside the flexible housing and connected to the gas inlet; and
a particle counter located outside the flexible housing and connected to the first gas outlet.

12. A method, comprising:
selecting a storage container of claim 11 ;
identifying the storage container;
providing the particle counter connected to the filtering cartridge, wherein the filtering cartridge is disposed on the storage container;
using the gas supply device to purge gas into the filtering cartridge for agitating a plurality of particles in the filtering cartridge;
using the particle counter to measure a number of the particles in the filtering cartridge; and
recording the number of the particles.

13. The method of claim 12 , wherein selecting the storage container further comprises selecting the storage container from an automated material handling system (AMHS) stocker.

14. The method of claim 12 , wherein identifying the storage container further comprises scanning an identifying mark of the storage container.

15. The method of claim 14 , wherein scanning the identifying mark of the storage container further comprises scanning a barcode or a radio-frequency identification (RFID) of the storage container.

16. The method of claim 12 , wherein providing the particle counter connected to the filtering cartridge further comprises the filtering cartridge disposed on a FOUP.

17. The method of claim 12 , wherein using the gas supply device to purge the gas into the filtering cartridge further comprises purging nitrogen gas, CDA, or XCDA into the filtering cartridge.

18. The method of claim 12 , after recording the number of the particles, further comprising determining a cleanness of the filtering cartridge according to the number of the particles.

19. The method of claim 18 , wherein determining the cleanness of the filtering cartridge further comprises providing a predetermined number, wherein when the number of the particles is smaller than the predetermined number, the filtering cartridge is determined to be clean.

20. The method of claim 18 , wherein determining the cleanness of the filtering cartridge using a statistical process control (SPC) system to determine the cleanness of the filtering cartridge.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Tsai Ming-Han
• Chen Yi-Ming

Classifications

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• G01N2015/084

  Testing filters · CPC title

• G01N15/06 Primary

  Investigating concentration of particle suspensions (by weighing G01N5/00; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• H01L21/67393

  Electricity · mapped topic