Integrated capacitor comprising an electrically insulating layer made of an amorphous perovskite-type material and manufacturing process

Patent metadata

Field	Value
Publication number	US-9673269-B2
Application number	US-201113225451-A
Country	US
Kind code	B2
Filing date	Sep 4, 2011
Priority date	Sep 3, 2010
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

An integrated capacitor comprises a layer of dielectric material known as functional dielectric material based on crystallized material of perovskite type, between at least one first electrode known as a bottom electrode at the surface of a substrate and at least one second electrode known as a top electrode, said electrodes being electrically insulated by a layer of electrically insulating material in order to allow at least one contact on the top electrode. The electrically insulating material is made of an amorphous dielectric material of perovskite type having a dielectric constant lower than that of the crystallized material of perovskite type. The contact is formed from an etched contacting layer in contact with the electrically insulating dielectric layer level with its surface parallel to the plane of the layers. A process for manufacturing such an integrated capacitor is also provided.

First claim

The invention claimed is:

1. An integrated capacitor, comprising:
a layer of dielectric material known as a functional dielectric material based on a crystallized material of perovskite type, between at least one first electrode known as a bottom electrode above a surface of a substrate and at least one second electrode known as a top electrode above the bottom electrode;
an etched contacting layer having a first region over a surface of the top electrode, a second region that extends horizontally beyond a first edge of the top electrode, a third region over a surface of the bottom electrode, and a fourth region that extends horizontally beyond a second, opposing edge of the top electrode;
a layer of electrically insulating material over the top electrode, the layer of electrically insulating material defining a first contact between the first region of the etched contacting layer and the surface of the top electrode and a third contact between the third region of the etched contacting layer and the surface of the bottom electrode; and
a protective insulating layer over the etched contacting layer, the protective insulating layer being etched to define a second contact in the second region of the etched contacting layer entirely horizontally beyond the first edge of the top electrode and a fourth contact in the fourth region of the etched contacting later entirely horizontally beyond the second, opposing edge of the top electrode, wherein:
the electrically insulating material comprises an amorphous dielectric material of perovskite type having a dielectric constant lower than that of the crystallized material of perovskite type,
a surface of the first contact is parallel to a plane of the layer of dielectric material, and
the amorphous dielectric material comprises an oxide selected from the group consisting of PZT, SrTiO 3 , (Pb,La)(Zr,Ti)O 3 , Pb(Mg,Nb,Ti)O 3 , Pb(Zn,Nb,Ti)O 3 , and BiFeO 3 .

2. The integrated capacitor according to claim 1 , wherein the crystallized functional dielectric material is an oxide selected from the group consisting of Pb(Sr,Ti)O 3 , SrTiO 3 , (Ba,Sr)TiO 3 , (Pb,La)(Zr,Ti)O 3 , Pb(Mg,Nb,Ti)O 3 , Pb(Zn,Nb,Ti)O 3 , BiFeO 3 , and BaTiO 3 .

3. The integrated capacitor according to claim 1 , wherein a chemical composition of the functional dielectric material is the same as a chemical composition of the electrically insulating dielectric material.

4. The integrated capacitor according to claim 1 , wherein the electrodes are made of platinum, ruthenium, ruthenium oxide, iridium, iridium oxide, or gold.

5. The integrated capacitor according to claim 1 , wherein the substrate is made of silicon and comprises an upper oxide layer.

6. The integrated capacitor according to claim 1 , further comprising an adhesion layer disposed between the substrate and the bottom electrode.

7. A process for manufacturing an integrated capacitor according to claim 1 , comprising at least one step of producing the layer of electrically insulating material, on top of or underneath the top electrode, via a sol-gel process comprising:
spreading a sol-gel solution;
drying said solution at a temperature between around 100° C. and 150° C.; and
pyrolysis of said dried solution at a temperature between around 300° C. and 500° C. resulting in the amorphous dielectric material.

8. The process for manufacturing the integrated capacitor according to claim 7 , further comprising at least one step of producing the layer of dielectric material via a sol-gel process comprising:
spreading a sol-gel solution on the surface of a substrate comprising a bottom electrode;
drying said solution at a temperature between around 100° C. and 150° C.;
pyrolysis of said dried solution at a temperature between around 300° C. and 500° C. resulting in the functional dielectric material; and
crystallization of said functional dielectric material brought to a temperature greater than or equal to the crystallization temperature of said material to obtain the crystallized functional dielectric material.

9. The process for manufacturing an integrated capacitor according to claim 8 , wherein the crystallization is carried out by rapid thermal annealing.

10. The integrated capacitor according to claim 1 , wherein the first contact overlaps with the bottom electrode.

11. The integrated capacitor according to claim 10 , wherein the second contact overlaps with the bottom electrode.

12. The integrated capacitor according to claim 1 , wherein a surface of the second contact is parallel to the plane of the layer of dielectric material.

13. The integrated capacitor according to claim 1 , wherein at least part of the protective insulating layer is directly over and in contact with the layer of electrically insulating material.

14. The integrated capacitor according to claim 1 , wherein an entirety of the first contact does not overlap with an entirety of the second contact.

15. The integrated capacitor according to claim 14 , wherein an entirety of the third contact does not overlap with an entirety of the fourth contact.

Assignees

• Defay Emmanuel
• Le Rhun Gwenaël
• Suhm Aurélien
• Commissariat Energie Atomique

Inventors

• Defay Emmanuel
• Le Rhun Gwenaël
• Suhm Aurélien

Classifications

• H10P14/69398

  the material having a perovskite structure, e.g. BaTiO3 · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title

• H01L28/40

  Electricity · mapped topic

• H01L21/02197

  Electricity · mapped topic

• H01L28/65

  Electricity · mapped topic