Method of manufacturing photoelectric conversion device

Patent metadata

Field	Value
Publication number	US-9673253-B2
Application number	US-201615139569-A
Country	US
Kind code	B2
Filing date	Apr 27, 2016
Priority date	May 7, 2015
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

A method of manufacturing a photoelectric conversion device includes forming, with material containing aluminum, an electrically conductive pattern on a semiconductor substrate including a photoelectric converter, forming, on the electrically conductive pattern, an insulating film containing hydrogen, performing first annealing in a hydrogen-containing atmosphere, forming, on the insulating film, a protective film having lower hydrogen permeability than that of the insulating film after the first annealing, and performing second annealing in the hydrogen-containing atmosphere. Temperature in the first annealing is not less than temperature when forming the insulating film and not more than temperature when forming the protective film.

First claim

What is claimed is:

1. A method of manufacturing a photoelectric conversion device, the method comprising:
forming, with a material which contains aluminum, an electrically conductive pattern on a semiconductor substrate including a photoelectric converter;
forming, on the electrically conductive pattern, an insulating film which contains hydrogen;
performing, in a hydrogen-containing atmosphere, first annealing on a structure including the semiconductor substrate, the electrically conductive pattern, and the insulating film;
forming, on the insulating film, a protective film having lower hydrogen permeability than that of the insulating film after the first annealing; and
performing, in the hydrogen-containing atmosphere, second annealing on a structure including the semiconductor substrate, the electrically conductive pattern, the insulating film, and the protective film after formation of the protective film,
wherein a temperature in the first annealing is not less than a temperature when forming the insulating film and not more than a temperature when forming the protective film.

2. The method according to claim 1 , wherein the insulating film is formed by a plasma-enhanced chemical vapor deposition method.

3. The method according to claim 1 , wherein the insulating film is a silicon oxide film.

4. The method according to claim 1 , wherein the protective film is formed by a plasma-enhanced chemical vapor deposition method.

5. The method according to claim 1 , wherein the protective film is a silicon nitride film.

6. The method according to claim 1 , wherein at least one stacking process is included after the first annealing and before formation of the protective film, and the stacking process includes forming an additional electrically conductive pattern and an additional insulating film which covers the additional electrically conductive pattern,
annealing is executed in the hydrogen-containing atmosphere each time the stacking process is executed, and
a temperature in the annealing is not less than a temperature when forming the insulating film and the additional insulating film, and not more than a temperature when forming the protective film.

7. The method according to claim 1 , wherein the forming the electrically conductive pattern includes forming a hard mask after forming a film with a material which contains aluminum and patterning the film by using the hard mask.

8. The method according to claim 1 , wherein on the semiconductor substrate, a plurality of electrically conductive patterns including the electrically conductive pattern are arranged so as to form a plurality of wiring layers, and
a distance between a lower face of the protective film and an upper face of the electrically conductive pattern closest to the semiconductor substrate out of the plurality of electrically conductive patterns falls within a range of 400 to 3,000 nm.

Assignees

• Canon Kk

Inventors

• Hara Koji
• Ukigaya Nobutaka
• Aoki Takeshi
• Suzuki Yukinobu

Classifications

• H01L27/14643

  Electricity · mapped topic

• H01L27/14636

  Electricity · mapped topic

• H01L27/14698 Primary

  Electricity · mapped topic

• H10F39/18

  Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors · CPC title

• H10F39/811

  Interconnections · CPC title