Field-assisted infrared detector with unipolar barrier

Patent metadata

Field	Value
Publication number	US-9673252-B1
Application number	US-201514825501-A
Country	US
Kind code	B1
Filing date	Aug 13, 2015
Priority date	Aug 13, 2014
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

Embodiments relate to photodetectors comprising: a substrate and a bulk-alloy infrared (IR) photo absorption layer disposed on the substrate to absorb photons in an infrared wavelength and having a graded section and an ungraded section. The photodetector comprises a unipolar barrier layer disposed on the bulk-alloy photo absorption layer. The graded section includes a graded alloy composition such that its energy bandgap is largest near the substrate and smallest near the unipolar barrier layer. The embodiments also relate to methods fabricating the photodetectors.

First claim

We claim:

1. An infrared (IR) photodetector, comprising:
a substrate;
a bulk-alloy infrared (IR) photo absorption layer disposed on the substrate to absorb photons in an infrared wavelength and having a graded section and an ungraded section; and
a unipolar barrier layer disposed on the bulk-alloy photo absorption layer,
wherein the graded section includes a graded alloy composition such that its energy bandgap is largest near the substrate and smallest near the unipolar barrier layer.

2. The photodetector of claim 1 , wherein the barrier layer includes a valence band, the graded section is near the substrate; and the ungraded section is nearest to the unipolar barrier layer and includes a valence band which is aligned with the valence band of the unipolar barrier.

3. The photodetector of claim 2 , further comprising a contact layer comprising an n-type semiconductor and a valence band aligned with the valence band of the ungraded section and the unipolar barrier; and wherein the bulk-alloy photo absorption layer comprises an n-type semiconductor.

4. The photodetector of claim 1 , wherein the bulk-alloy photo absorption layer comprises a III-V semiconductor in which a group-III atomic concentration is graded in the graded section.

5. The photodetector of claim 1 , wherein the bulk-alloy photo absorption layer comprises a III-V semiconductor in which a group-III atomic concentration is graded in the graded section from about 5% to about 0%.

6. The photodetector of claim 1 , wherein the bulk-alloy photo absorption layer comprises aluminum such that a concentration of the aluminum increases in the graded section from the substrate in a direction to the unipolar barrier layer.

7. The photodetector of claim 1 , wherein the graded section comprises a III-V semiconductor in which a concentration of at least two III-V elements are gradually altered to form a continuous graded section.

8. An infrared photodetector comprising:
a plurality of detector pixels;
a substrate;
bulk-alloy photo absorption layers configured to absorb photons in an infrared wavelength, the bulk-alloy photo absorption layers comprising a graded absorption layer having a first valence band portion and an ungraded absorption layer having a second valence band portion; and
a unipolar barrier layer disposed on the ungraded absorption layer and having a third valence band portion,
wherein a composition of the graded absorption layer is graded such that the first valence band portion forms an energy bandgap which is largest nearest the substrate and smallest nearest the unipolar barrier layer and the second valence band portion and third valence band portions are aligned to same valence band energy level.

9. The photodetector of claim 8 , wherein the graded absorption layer comprises a III-V semiconductor in which a group-III atomic concentration is graded.

10. The photodetector of claim 9 , further comprising a contact layer comprising an n-type semiconductor and a fourth valence band portion aligned with the second valence band portion and the third valence band portion; and wherein the bulk-alloy photo absorption layers comprises an n-type semiconductor.

11. The photodetector of claim 8 , wherein the ungraded absorption layer is engineered for Quantum Efficiency and/or dark current radiation tolerance and the graded absorption layer is engineered for carrier transport and collection efficiency.

12. The photodetector of claim 8 , wherein the graded absorption layer comprises aluminum such that a concentration of the aluminum increases from the substrate in a direction toward the unipolar barrier layer.

13. The photodetector of claim 8 , wherein the graded absorption layer comprises a III-V semiconductor in which a concentration of at least two III-V elements are gradually altered to form a continuous graded absorption layer or a stepwise graded absorption layer.

14. The photodetector of claim 8 , wherein the graded absorption layer is lattice matched to the substrate.

15. A method of forming an infrared photodetector, the method comprising:
forming a substrate;
forming a bulk-alloy graded photo absorption layer having a first valence band portion;
forming a bulk-alloy ungraded photo absorption layer having a second valence band portion; and
forming a unipolar barrier layer disposed on the ungraded absorption layer and having a third valence band portion,
wherein a composition of the graded photo absorption layer is graded such that the first valence band portion forms an energy bandgap which is largest nearest the substrate and smallest nearest the unipolar barrier layer and the second valence band portion and third valence band portions are aligned to same valence band energy level.

16. The method of claim 15 , wherein the forming of the graded photo absorption layer comprises forming a III-V semiconductor in which a group-III atomic concentration is graded.

17. The method of claim 16 , further comprising:
forming a contact layer comprising an n-type semiconductor and a fourth valence band portion aligned with the second valence band portion and the third valence band portion; and

wherein the bulk-alloy photo absorption graded and ungraded layers comprise an n-type semiconductor.

18. The method of claim 15 , wherein the forming of the graded photo absorption layer comprises forming a III-V semiconductor in which a concentration of at least two III-V elements are gradually altered to form a continuous graded absorption layer or a stepwise graded absorption layer.

19. The method of claim 15 , wherein the forming of the graded photo absorption layer comprises growing the graded photo absorption layer using molecular beam epitaxy and ramping a temperature of a group-III effusion cell.

20. The method of claim 15 , wherein the forming of the graded photo absorption layer comprises growing the graded photo absorption layer using molecular beam epitaxy and ramping a valve position of group-V elements.

Assignees

• Lockheed Corp

Inventors

• Crook Adam M
• Reason Matthew J

Classifications

• H01L31/0304

  Electricity · mapped topic

• H01L31/035272

  Electricity · mapped topic

• H01L27/14649 Primary

  Electricity · mapped topic

• H01L31/184

  Electricity · mapped topic

• H01L27/14683

  Electricity · mapped topic