Arc management with voltage reversal and improved recovery

Patent metadata

Field	Value
Publication number	US-9673028-B2
Application number	US-201615095745-A
Country	US
Kind code	B2
Filing date	Apr 11, 2016
Priority date	Aug 31, 2012
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

Systems and methods for arc handling in plasma processing operations are disclosed. The method includes providing current with a power supply to a plasma load at a first voltage polarity and energizing an energy storage device so when it is energized, the energy storage device applies a reverse polarity voltage that has a magnitude that is as least as great as the first voltage polarity. When an arc is detected, power is applied from the energy storage device to the plasma load with a reverse polarity voltage that has a polarity that is opposite of the first voltage polarity, the application of the reverse polarity voltage to the plasma load decreases a level of the current that is provided to the plasma load.

First claim

What is claimed is:

1. An apparatus for arc handling, comprising:
a positive rail and a negative rail that are disposed to form an electrical link between a plasma chamber and a positive output and a negative output, respectively, of a power supply;
an arc detection component to detect an occurrence of an arc in the plasma chamber;
a voltage reversal component coupled across the positive rail and the negative rail, the voltage reversal component including:
an energy storage component disposed between a first and second switches, the first switch is coupled to the positive rail and a first terminal of the energy storage component and the second switch is coupled between the negative rail and a second terminal of the energy storage component; and

a control component that is coupled to the arc detection component and the first and second switches of the voltage reversal component, the control component closes the first and second switches when an arc is detected to apply a negative potential of the energy storage component to the positive rail and a positive potential of the energy storage component to the negative rail.

2. The apparatus of claim 1 , including:
a charging-power supply to charge the energy storage device to a charging voltage that exceeds a voltage of the power supply.

3. The apparatus of claim 1 including a voltage booster to charge the energy storage device with a boosted voltage that exceeds a voltage of the power supply.

4. The apparatus of claim 1 including a recovery filter that is switchably coupled between the positive and negative rails, the control component engages the recovery filter when both the first and second switches are opened to stabilize the voltage at the first polarity and prevent the arc detection component from falsely detecting arcs.

5. An apparatus for arc handling, comprising:
a positive rail and a negative rail that are disposed to form an electrical link between a plasma chamber and a positive output and a negative output, respectively, of a power supply;
an arc detection component to detect an occurrence of an arc in the plasma chamber;
a voltage reversal component coupled across the positive rail and the negative rail, the voltage reversal component including:
an energy storage component switchably coupled between the positive rail and the negative rail;

a recovery filter that is switchably coupled between the positive and negative rails, the recovery filter is configured to stabilize a voltage between the positive and negative rails and prevent the arc detection component from falsely detecting arcs when the energy storage component is decoupled from between the positive rail and the negative rail;
a control component that is coupled to the arc detection component, the voltage reversal component, and the recovery filter, the control component is configured to couple the energy storage component across the positive and negative rails when an arc is detected to apply a negative potential of the energy storage component to the positive rail and a positive potential of the energy storage component to the negative rail, and the control component decouples the recovery filter from the positive and negative rails while the energy storage component is coupled across the positive and negative rails and recouples the recovery filter across the positive and negative rails when the arc is extinguished and the energy storage component is decoupled from the positive and negative rails.

6. The apparatus of claim 5 , including:
a charging-power supply to charge the energy storage device to a charging voltage that exceeds a voltage of the power supply.

7. The apparatus of claim 5 , including a voltage booster to charge the energy storage device with a boosted voltage that exceeds a voltage of the power supply.

Assignees

• Advanced Energy Ind Inc

Inventors

• Walde Hendrik
• Pankratz Joshua Brian
• Christie David
• Kowal Brian D

Classifications

• H05H1/48

  using an arc (H05H1/26 takes precedence) · CPC title

• H01J2237/0206

  Extinguishing, preventing or controlling unwanted discharges · CPC title

• H01J37/32944 Primary

  Arc detection · CPC title

• H01J2237/244

  Detection characterized by the detecting means · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title