Illumination system for EUV lithography

Patent metadata

Field	Value
Publication number	US-9671608-B2
Application number	US-201414489943-A
Country	US
Kind code	B2
Filing date	Sep 18, 2014
Priority date	May 4, 2006
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

The disclosure relates to an illumination system for EUV lithography, as well as related elements, systems and methods. In some embodiments, an illumination system includes a first optical element and a second optical element. The first optical element can include a plurality of first facet elements configured so that, when impinged by respective partial beams of radiation, the plurality of first facet elements produce secondary light sources. The second optical element can include a second optical element including a plurality of second facet elements. Each of the plurality of second facet elements can be assigned to at least one of the plurality of first facet elements. The plurality of second facet elements can be configured to be impinged by the radiation via the first optical element.

First claim

What is claimed is:

1. An illumination system configured to illuminate an illumination field of an object surface with radiation, the illumination system comprising:
a first optical element comprising a plurality of facet elements having a first total number of facet elements, the plurality of facet elements of the first optical element including a first facet element and a second facet element;
an optical arrangement configured to image the facet elements of the first optical element into the illumination field, the optical arrangement comprising a second optical element which comprises a plurality of facet elements having a second total number of facet elements, the plurality of facet elements of the second optical element being configured to be impinged by the radiation via the first optical element; and
a plurality of actuators,
wherein:
the facet elements of the first optical element and the facet elements of the second optical element used to illuminate the illumination field are positioned via respective actuators of the plurality of actuators so that the illumination field is divided into a first partial field and a second partial field;
the first partial field and the second partial field provide a sequential illumination intensity profile in a direction of the object surface;
the second total number of facet elements is less than the first total number of facet elements;
each facet element of the second optical element is assigned to at least one facet element of the first optical element;
the first facet element is configured to be imaged to the first partial field;
the second facet element is configured to be imaged into the second partial field;
the direction of the object surface is a direction along which the object surface is displaced; and
the illumination system is an EUV lithography illumination system.

2. The illumination system of claim 1 , wherein the first partial field does not overlap with the second partial field.

3. The illumination system of claim 1 , wherein the first partial field overlaps with the second partial field in an area, the area is smaller than the first partial field, and the area is smaller than the second partial field.

4. The illumination system of claim 1 , wherein an intersection between the first and second partial fields is less than 95% of an area of the smaller of the first and second partial fields.

5. The illumination system of claim 1 , wherein an intersection between the first and second partial fields is less than 90% of an area of the smaller of the first and second partial fields.

6. The illumination system of claim 1 , wherein an intersection between the first and second partial fields is less than 80% of an area of the smaller of the first and second partial fields.

7. The illumination system of claim 1 , wherein an intersection between the first and second partial fields is less than 60% of an area of the smaller of the first and second partial fields.

8. The illumination system of claim 1 , wherein an intersection between the first and second partial fields is less than 40% of an area of the smaller of the first and second partial fields.

9. The illumination system of claim 1 , wherein an intersection between the first and second partial fields is less than 20% of an area of the smaller of the first and second partial fields.

10. The illumination system of claim 1 , wherein the facets of the first and second optical elements are configured so that, during use of the illumination system, the first and second partial fields illuminate at selected illumination angles.

11. The illumination system of claim 1 , wherein the facets of the first and second optical elements are configured so that the illumination field is an assembly of individual partial fields which together define the complete illumination field.

12. The illumination system of claim 1 , wherein the first and second optical elements are configured so that the entire illumination field is not illuminated via either of the partial fields.

13. The illumination system of claim 1 , wherein the first and second optical elements are configured so that the entire illumination field is defined by an assembly of individual partial fields, and the entire illumination field is not illuminated via any of the partial fields.

14. The illumination system of claim 1 , wherein the facets of the first and second optical elements are configured so that facet elements of the second optical element are irradiated by a plurality of facet elements of the first optical element which are at a spatial distance from each other.

15. The illumination system of claim 1 , wherein the facets of the first and second optical elements are configured so that more than three facet elements of the first optical element irradiate a facet element of the second optical element with radiation.

16. The illumination system of claim 1 , wherein the actuators are configured to move at least some of the facet elements of the first optical element between setting positions so that in each setting position the corresponding partial beam of radiation is deflected by the movable facet element of the first optical element, wherein at least one of the facet element of the second optical element is configured to be acted on by at least two different facet elements of the first optical element.

17. The illumination system of claim 1 , wherein a number of partial fields of the illumination field corresponds to a maximum number of facet elements of the first optical element which are able to act on the same facet element of the second optical element.

18. The illumination system of claim 1 , wherein the first and second partial fields are adjacent partial field strips.

19. The illumination system of claim 18 , wherein the first and second partial fields have the same surface area.

20. The illumination system of claim 19 , wherein the facet elements of the first optical element are curved.

21. The illumination system of claim 20 , wherein the first and second partial fields are curved.

22. The illumination system of claim 19 , wherein the first and second partial fields are curved.

23. The illumination system of claim 1 , wherein precisely two adjacent facet elements of the first optical element act on at least one of the facet elements of the second optical element.

24. The illumination system of claim 1 , wherein the actuators are configured to displace at least one of the facet elements of the second optical element between first and second positions.

25. The illumination system of claim 1 , wherein the facet elements of the first optical element are reflective elements.

26. The illumination system of claim 25 , wherein the facet elements of the second optical element are reflective elements.

27. The illumination system of claim 1 , wherein the facet elements of the second optical element are reflective elements.

28. The illumination system of claim 1 , wherein the number of the facet elements of the first optical element is identical to the number of the facet elements of the second optical element.

29. An illumination system configured to illuminate an illumination field of an object surface with radiation, the illumination system comprising:
a plurality of first facet elements configured to produce secondary light sources when impacted by the radiation, the plurali

Assignees

• Zeiss Carl Smt Gmbh

Inventors

• Endres Martin
• Ossmann Jens

Classifications

• G03F7/70116

  Off-axis setting using a programmable means, e.g. liquid crystal display [LCD], digital micromirror device [DMD] or pupil facets · CPC title

• G03F7/70075 Primary

  Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection · CPC title

• G02B5/09

  Multifaceted or polygonal mirrors {, e.g. polygonal scanning mirrors; Fresnel mirrors} · CPC title

• G02B17/06

  using mirrors only {, i.e. having only one curved mirror (used in non-imaging applications G02B19/00)} · CPC title

• G02B26/0833 Primary

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title