Particle measuring device

Patent metadata

Field	Value
Publication number	US-9671325-B2
Application number	US-201615068302-A
Country	US
Kind code	B2
Filing date	Mar 11, 2016
Priority date	Jul 2, 2015
Publication date	Jun 6, 2017
Grant date	Jun 6, 2017

Abstract

A particle measuring device includes: an optical resonator that reflects laser light back and forth between two facing reflective mirrors in order to amplify an energy of that laser light and form resonant laser light; a particle transport unit that transports particles in an aerosol to be measured across a beam path of the resonant laser light; a scattered light receiving unit that receives scattered light produced when the particles in the aerosol are irradiated by the resonant laser light; and a processor that receives light reception signals from the scattered light receiving unit, wherein the processor outputs light reception pulses according to the light reception signals and calculates time intervals between the light reception pulses that are temporally adjacent.

First claim

What is claimed is:

1. A particle measuring device for measuring particles in an aerosol, comprising:
an optical resonator that causes laser light to travel back and forth between two opposing reflective mirrors in order to amplify an energy of the laser light and form resonant laser light;
a particle transport unit configured to transport the particles in the aerosol across a beam path of the resonant laser light so as to generate a stream of the particles crossing the beam path;
a scattered light receiving unit configured to receive scattered light that is produced when the particles in the aerosol are irradiated by the resonant laser light, and output a light reception signal in accordance with the received scattered light for each scattering event; and
a processor that receives the light reception signal from the scattered light receiving unit for each event of the reception of the scattered light,
wherein the processor outputs a light reception pulse in accordance with each light reception signal from the scattered light receiving unit, and derives time intervals between light reception pulses that are temporally adjacent, and
wherein the processor compares the derived time interval with a prescribed threshold time interval, and, if the derived time interval is less than or equal to the prescribed threshold time interval, the processor determines that the corresponding two adjacent light reception pulses are caused by a single particle crossing the beam path, and if the derived time interval is greater than the prescribed threshold time interval, the processor determines that the corresponding two adjacent light reception pulses are caused by two particles crossing the beam path successively.

2. The particle measuring device according to claim 1 , wherein the processor further derives a frequency distribution of the derived time intervals, and sets said prescribed threshold time interval in accordance with the frequency distribution.

3. The particle measuring device according to claim 1 , wherein the processor determines a resonant mode of the resonant laser light based on one or more of the derived time intervals between the adjacent pulses or a frequency distribution of the derived time intervals, and sets said prescribed threshold tine interval in accordance with the determined mode of the resonance laser light.

4. The particle measuring device according to claim 3 , wherein the optical resonator includes a reflective mirror adjustment unit that adjusts the reflective mirrors in accordance with the determination of the resonant mode by the processor.

5. The particle measuring device according to claim 1 , wherein the particles in the aerosol cross the beam path of the resonant laser light formed by the optical resonator inside the optical resonator.

6. The particle measuring device according to claim 1 , wherein in the optical resonator, a laser emitter is provided on a surface of one of the reflective mirrors on a side thereof opposite to where the resonant laser light is formed, and the optical resonator is configured such that laser light produced by introducing a prescribed excitation source to the laser emitter enters the optical resonator through said one of the reflective mirrors and goes on to become the resonant laser light.

7. A particle measuring device for measuring particles in an aerosol, comprising:
an optical resonator that causes laser light to travel back and forth between two opposing reflective mirrors in order to amplify an energy of the laser light and form resonant laser light;
a particle transport unit configured to transport the particles in the aerosol across a beam path of the resonant laser light so as to generate a stream of the particles crossing the beam path;
a scattered light receiving unit configured to receive scattered light that is produced when the particles in the aerosol are irradiated by the resonant laser light, and output a light reception signal in accordance with the received scattered light for each scattering event; and
a processor that receives the light reception signal from the scattered light receiving unit for each event of the reception of the scattered light,
wherein the processor outputs a light reception pulse in accordance with each light reception signal from the scattered light receiving unit, and derives time intervals between light reception pulses that are temporally adjacent,
wherein the processor derives a frequency distribution of the derived time intervals, and determines the number of the light reception pulses that are generated as a result of a single particle crossing the beam path, which depends on a resonant mode of the resonant laser light, based on the derived frequency distribution of the derived time intervals, and
wherein the processor counts the number of the particles crossing the beam path in accordance with the determined number of light reception pulses that are generated as a result of a single particle crossing the beam path.

8. The particle measuring device according to claim 7 , wherein the processor determines the resonant mode of the resonant laser light based on the frequency distribution of the derived time intervals.

9. The particle measuring device according to claim 8 , wherein the optical resonator includes a reflective mirror adjustment unit that adjusts the reflective mirrors in accordance with the determination of the resonant mode by the processor.

10. The particle measuring device according to claim 7 , wherein the particles in the aerosol cross the beam path of the resonant laser light formed by the optical resonator inside the optical resonator.

11. The particle measuring device according to claim 7 , wherein in the optical resonator, a laser emitter is provided on a surface of one of the reflective mirrors on a side thereof opposite to where the resonant laser light is formed, and the optical resonator is configured such that laser light produced by introducing a prescribed excitation source to the laser emitter enters the optical resonator through said one of the reflective mirrors and goes on to become the resonant laser light.

Assignees

• Fuji Electric Co Ltd

Inventors

• Takeda Naoki
• Koizumi Kazuhiro
• Asano Takamasa
• Hasegawa Yoshiki

Classifications

• G01N15/1459

  the analysis being performed on a sample stream · CPC title

• G01N15/1434 Primary

  Optical arrangements · CPC title

• G01N2015/1486

  Counting the particles · CPC title

• G01N15/1456

  without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals · CPC title

• G01N15/0211 Primary

  Investigating a scatter or diffraction pattern · CPC title