Dual push between a host computer system and an RF generator

Patent metadata

Field	Value
Publication number	US-9667303-B2
Application number	US-201514974915-A
Country	US
Kind code	B2
Filing date	Dec 18, 2015
Priority date	Jan 28, 2015
Publication date	May 30, 2017
Grant date	May 30, 2017

Abstract

A system and a method for increasing a rate of transfer of data between a radio frequency (RF) generator and a host computer system is described. The rate of transfer of data is increased by implementing dedicated physical layers associated with the RF generator and the host computer system and a dedicated physical communication medium between the RF generator and the host computer system. Moreover, a dual push operation is used between the RF generator and the host computer system. There is no request for data sent from the RF generator to the host computer system or from the host computer system to the RF generator.

First claim

The invention claimed is:

1. A system for increasing a rate of communication, comprising:
a radio frequency (RF) generator including a dedicated transceiver;
a host computer system including a dedicated transceiver and a controller connected to the dedicated transceiver of the host computer system;
a shared physical communication medium connecting the RF generator to the host computer system; and
a dedicated physical communication medium connecting the dedicated transceiver of the RF generator to the dedicated transceiver of the host computer system,
the host computer system configured to send a configuration signal to configure the RF generator via the shared physical communication medium,
the dedicated transceiver of the RF generator, upon receiving the configuration signal, configured to initiate sending one or more transfer units including information associated with a parameter via the dedicated physical communication medium to the dedicated transceiver of the host computer system,
the controller of the host computer system configured to process the information associated with the parameter to determine to change a set point of the parameter to further generate a changed set point,
the dedicated transceiver of the host computer system configured to send one or more transfer units including the changed set point via the dedicated physical communication medium to the dedicated transceiver of the RF generator, wherein the host computer system is configured to send the one or more transfer units to the RF generator without acknowledging receipt of the one or more transfer units received from the RF generator.

2. The system of claim 1 , wherein the dedicated transceiver of the host computer system is configured to receive the one or more transfer units sent by the dedicated transceiver of the RF generator via the dedicated physical communication medium without requesting the information associated with the parameter from the RF generator.

3. The system of claim 1 , wherein the dedicated transceiver of the RF generator is configured to receive the one or more transfer units sent by the dedicated transceiver of the host computer system via the dedicated physical communication medium without requesting the changed set point from the host computer system.

4. The system of claim 1 , wherein the RF generator is connected to a plasma chamber via an impedance matching circuit.

5. The system of claim 1 , wherein the host computer system is connected to an additional RF generator via the shared physical communication medium.

6. The system of claim 1 , wherein the host computer system is configured not to perform a checksum operation on the one or more transfer units sent by the dedicated transceiver of the RF generator via the dedicated physical communication medium.

7. The system of claim 1 , wherein the RF generator is configured not to perform a checksum operation on the one or more transfer units sent by the dedicated transceiver of the host computer system via the dedicated physical communication medium.

8. A method for increasing a rate of communication between a radio frequency (RF) generator and a host computer system, comprising:
sending by the host computer system a configuration signal via a shared physical communication medium to the RF generator to configure the RF generator,
upon receiving the configuration signal, sending by a dedicated transceiver of the RF generator one or more transfer units via a dedicated physical communication medium to a dedicated transceiver of the host computer system, the one or more transfer units including information associated with a parameter;
processing, by the host computer system, the information associated with the parameter to determine to change a set point of the parameter to further generate a changed set point; and
sending by the dedicated transceiver of the host computer system one or more transfer units including the changed set point via the dedicated physical communication medium to the dedicated transceiver of the RF generator, wherein the sending of the one or more transfer units from the host computer system to the RF generator is performed without acknowledging receipt of the one or more transfer units received by the host computer system from the RF generator.

9. The method of claim 8 , further comprising receiving by the dedicated transceiver of the host computer system the one or more transfer units sent by the dedicated transceiver of the RF generator, wherein said receiving of the one or more transfer units is performed without requesting the information associated with the parameter from the RF generator.

10. The method of claim 8 , further comprising receiving by the dedicated transceiver of the RF generator the one or more transfer units sent by the dedicated transceiver of the host computer system, wherein said receiving of the one or more transfer units is performed without requesting the changed set point from the host computer system.

11. The method of claim 8 , wherein the RF generator is connected to a plasma chamber via an impedance matching circuit.

12. The method of claim 8 , further comprising sending by the host computer system a configuration signal to an additional RF generator via the shared physical communication medium to configure the additional RF generator to provide information associated with a parameter.

13. The method of claim 8 , further comprising skipping performance of a checksum operation on the one or more transfer units sent by the dedicated transceiver of the RF generator via the dedicated physical communication medium.

14. The method of claim 8 , further comprising skipping performance of a checksum operation on the one or more transfer units sent by the dedicated transceiver of the host computer system via the dedicated physical communication medium.

15. A method for increasing a rate of communication between a host computer system and a radio frequency (RF) generator, comprising:
generating one or more transfer units including one or more set points for one or more parameters, each set point associated with one or more states of an RF signal, the one or more set points to be used by the RF generator for generating the RF signal;
sending the one or more transfer units from a dedicated transmitter of a physical layer of the host computer system via a first dedicated communication link of a physical communication medium to a dedicated receiver of a physical layer of the RF generator;
receiving via a second dedicated communication link of the physical communication medium one or more transfer units from a dedicated transmitter of the physical layer of the RF generator, wherein the one or more transfer units received include information associated with the one or more parameters and with the one or more states, wherein receiving via the second dedicated communication link of the one or more transfer units is performed by a dedicated receiver of the physical layer of the host computer system;
determining from the information associated with the one or more parameters that the one or more set points associated with the one or more states are to be modified to generate one or more modified set points; and
sending one or more modified transfer units including the one or more modified set points via the first dedicated communication link of the physical communication medium to the dedicated receiver of the physical layer of the RF generator, wherein the sending of the one or more modified transfer units from the host computer system to the RF generator is performed without acknowledging receipt of the one or more transfer units r

Assignees

• Lam Res Corp

Inventors

• Valcore Jr John C
• San Tony
• Fong Andrew

Classifications

• H04L69/16

  Implementation or adaptation of Internet protocol [IP], of transmission control protocol [TCP] or of user datagram protocol [UDP] · CPC title

• G05B19/042 Primary

  using digital processors (G05B19/05 takes precedence) · CPC title

• H04L25/0278 Primary

  Arrangements for impedance matching · CPC title

• H04B1/40 Primary

  Circuits · CPC title

• H04L12/1859

  adapted to provide push services, e.g. data channels · CPC title