Micro wideband spectroscopic analysis device
US-12163834-B2 · Dec 10, 2024 · US
US9664563B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9664563-B2 |
| Application number | US-95831210-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 1, 2010 |
| Priority date | Dec 2, 2009 |
| Publication date | May 30, 2017 |
| Grant date | May 30, 2017 |
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A spatial Fourier transform spectrometer is disclosed. The Fourier transform spectrometer includes a Fabry-Perot interferometer with first and second optical surfaces. The gap between the first and second optical surfaces spatially varies in a direction that is orthogonal to the optical axis of the Fourier transform spectrometer. The Fabry-Perot interferometer creates an interference pattern from input light. An image of the interference pattern is captured by a detector, which is communicatively coupled to a processor. The processor is configured to process the interference pattern image to determine information about the spectral content of the input light.
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What is claimed is: 1. A Fourier transform spectrometer, comprising: a Fabry-Perot interferometer to create a spatial domain interference pattern using input light; a detector positioned with respect to the Fabry-Perot interferometer to capture an image of the spatial domain interference pattern, the detector comprising a plurality of detection elements, and defining an optical axis that is orthogonal to the detector; and a processor that is communicatively coupled to the detector, the processor being configured to process the spatial domain interference pattern image using a frequency domain transform to determine information about the spectral content of the light, wherein the Fabry-Perot interferometer comprises first and second optical surfaces that are partially transmissive and partially reflective to the light, the first and second optical surfaces defining a resonant cavity therebetween, the distance between the first and second optical surfaces being spatially variable in a first transverse direction that is orthogonal to the optical axis, and the first and second optical surfaces having a reflectance in the range of 20-60%. 2. The Fourier transform spectrometer of claim 1 , wherein the first and second optical surfaces are fixed with respect to one another. 3. The Fourier transform spectrometer of claim 1 , wherein the first optical surface or the second optical surface has a smoothly varying slope in the first transverse direction. 4. The Fourier transform spectrometer of claim 1 , wherein the distance between the first and second optical surfaces is variable in a second transverse direction that is orthogonal to the optical axis and to the first transverse direction. 5. The Fourier transform spectrometer of claim 1 , wherein the distance between the first and second optical surfaces varies substantially linearly in the first transverse direction for at least a portion of the resonant cavity. 6. The Fourier transform spectrometer of claim 1 , wherein at least one of the first and second optical surfaces is substantially planar. 7. The Fourier transform spectrometer of claim 1 , wherein at least one of the first and second optical surfaces comprises a prism, the prism comprising at least first and second substantially planar portions that join at a vertex region. 8. The Fourier transform spectrometer of claim 1 , wherein the distance between the first and second optical surfaces has a relative minimum in a central region of the Fabry-Perot interferometer. 9. The Fourier transform spectrometer of claim 1 , wherein the distance between the first and second optical surfaces has a relative minimum at a peripheral region of the Fabry-Perot interferometer. 10. The Fourier transform spectrometer of claim 1 , wherein the first and second optical surfaces are in physical contact with one another at one or more physical contact points. 11. The Fourier transform spectrometer of claim 1 , wherein the first and second optical surfaces are in optical contact with one another at one or more optical contact points where the optical distance between the first and second optical surfaces is substantially zero. 12. The Fourier transform spectrometer of claim 1 , wherein the region between the first and second optical surfaces comprises a vacuum, gas, or liquid. 13. The Fourier transform spectrometer of claim 1 , wherein the region between the first and second optical surfaces comprises a solid material. 14. The Fourier transform spectrometer of claim 1 , wherein the first and second optical surfaces have a reflectance of 40%. 15. The Fourier transform spectrometer of claim 1 , further comprising an optical system to relay the interference pattern from the Fabry-Perot interferometer to the detector. 16. The Fourier transform spectrometer of claim 1 , wherein the detector is positioned adjacent to the Fabry-Perot interferometer so as to capture the interference pattern image without an optical system for relaying the interference pattern to the detector. 17. The Fourier transform spectrometer of claim 1 , further comprising a light collection optical system to collect and transmit the input light from a source to the Fabry-Perot interferometer. 18. The Fourier transform spectrometer of claim 17 , wherein the light collection optical system is configured to form an image of the source at the Fabry-Perot interferometer. 19. The Fourier transform spectrometer of claim 1 , wherein the processor is configured to perform a Fourier transform, or a transform that uses non-sinusoidal basis functions, on the interference pattern image. 20. The Fourier transform spectrometer of claim 1 , wherein the first and second optical surfaces are uncoated. 21. The Fourier transform spectrometer of claim 1 , wherein the plurality of detecting elements are arranged in a one-dimensional linear array. 22. The Fourier transform spectrometer of claim 1 , wherein the plurality of detecting elements are arranged in a two-dimensional planar array. 23. The Fourier transform spectrometer of claim 1 , wherein at least one of the first and second optical surfaces comprises two or more portions joined together at an angle. 24. The Fourier transform spectrometer of claim 1 , wherein at least one of the first and second optical surfaces comprises a surface of a lens. 25. A method of determining the spectral content of input light, the method comprising: creating a spatial domain interference pattern from input light using a Fabry-Perot interferometer; creating a spatial domain interference pattern image using a detector that is positioned with respect to the Fabry-Perot interferometer to capture an image of the spatial domain interference pattern, the detector comprising a plurality of detection elements, and defining an optical axis that is orthogonal to the detector; and processing the spatial domain interference pattern image using a processor to perform a frequency domain transform to determine information about the spectral content of the light, wherein the Fabry-Perot interferometer comprises first and second optical surfaces that are partially transmissive and partially reflective to the light, the first and second optical surfaces defining a resonant cavity therebetween, the distance between the first and second optical surfaces being spatially variable in a first transverse direction that is orthogonal to the optical axis, the first and second optical surfaces having a reflectance in the range of 20-60%, and wherein the with a frequency domain transform interference pattern image is captured during a period of time in which characteristics of the Fabry-Perot interferometer are not intentionally varied. 26. The method of claim 25 , wherein the first and second optical surfaces are fixed with respect to one another. 27. The method of claim 25 , wherein the first optical surface or the second optical surface has a smoothly varying slope in the first transverse direction. 28. The method of claim 25 , wherein the distance between the first and second optical surfaces is variable in a second transverse direction that is orthogonal to the optical axis and to the first transverse direction. 29. The method of claim 25 , wherein the distance between the first and second optical surfaces varies substantially linearly in the first transverse direction for at least a portion of the resonant
Devices without moving parts · CPC title
using refracting elements, e.g. prisms (G01J3/18, G01J3/26 take precedence {prisms per se G02B5/04}) · CPC title
using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title
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