Energy beam position verification

Patent metadata

Field	Value
Publication number	US-9664505-B2
Application number	US-201615077200-A
Country	US
Kind code	B2
Filing date	Mar 22, 2016
Priority date	Aug 20, 2014
Publication date	May 30, 2017
Grant date	May 30, 2017

Abstract

A method for verifying a position of an energy beam spot, said method comprising the steps of: providing a calibrated energy beam having a first focus in a at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said first focus, providing said calibrated energy beam having a second focus in said at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said second focus, comparing said at least two positions created with said first and second focus, wherein said position of the energy beam is verified if said positions created with said first focus are deviating less than a predetermined distance from said positions created with said second focus.

First claim

That which is claimed:

1. A computer-implemented method for verifying a position of an energy beam spot, said method comprising the steps of:
providing, via at least one control unit containing a processor, an energy beam spot having a first focus directed toward at least two locations on a work table,
detecting at least two positions of said energy beam spot on said work table created with said energy beam having said first focus,
providing, via said at least one control unit, said energy beam spot having a second focus directed toward said at least two locations on said work table,
detecting at least two corresponding positions of said energy beam spot on said work table created with said energy beam having said second focus, and
comparing, via said at least one control unit, said at least two positions created with said first focus and said at least two corresponding positions created with said second focus, and verifying said position of the energy beam spot by verifying that said at least two positions created with said first focus deviate less than a predetermined distance from said corresponding at least two positions created with said second focus,
wherein said positions are detected by at least one of an IR-camera, a CCD-camera, a digital camera, a CMOS camera or a NIR-camera.

2. The computer-implemented method according to claim 1 , wherein said at least two positions created with said first focus are a regularly 2-dimensional pattern.

3. The computer implemented method according to claim 1 , wherein said at least two positions created with said first focus and said at least two corresponding positions created with said second focus are provided at identical positions as in a calibration process.

4. The computer-implemented method according to claim 1 , wherein said at least two positions created with said first focus and said at least two corresponding positions created with said second focus are provided at different positions as in a calibration process.

5. The computer-implemented method according to claim 1 , wherein said energy beam spot is an electron beam spot.

6. The computer-implemented method according to claim 1 , wherein said work table is provided with a reference pattern.

7. The computer-implemented method according to claim 1 , wherein said at least two locations are provided on said work table having a surface temperature above 500° C.

8. The computer-implemented method according to claim 1 , wherein said predetermined distance is less than 20 μm.

9. The computer-implemented method according to claim 1 , further comprising a step of sending a warning signal when any one of said at least two positions provided with said first focus deviate more than said predetermined distance from said at least two corresponding positions provided with said second focus.

10. The computer-implemented method according to claim 1 , wherein said energy beam spot with said first focus and said energy beam spot with said second focus are provided on the same work table.

11. The computer-implemented method according to claim 1 , wherein a deviation between the at least two positions created with said first focus and the at least two corresponding positions created with said second focus is compensated for by altering a setting of a deflection coil.

12. The computer-implemented method according to claim 1 , wherein:
the method further comprises the step of receiving and storing, within one or more memory storage areas, a model of at least one three-dimensional article; and
at least one of the varying, comparing, or repeating steps is performed via execution of one or more computer processors.

13. The computer-implemented method according to claim 1 , wherein:
the method is further configured for verifying a deflection speed of the energy beam spot; and
the method further comprises the steps of, via said at least one control unit:
generating a predetermined pattern on the work table with said energy beam spot while deflecting said energy beam spot with a first deflection speed;
detecting first positions of said energy beam spot on said work table created with said first deflection speed;
generating said predetermined pattern on the work table with said energy beam spot while deflecting said energy beam spot with a second deflection speed;
detecting second positions of said energy beam spot on said work table created with said second deflection speed; and
comparing said first and second positions, verifying that each one of said first positions deviate less than a predetermined distance from corresponding ones of said second positions.

14. The computer-implemented method according to claim 13 , wherein:
the method is further configured for verifying a size of the at least one energy beam spot; and
the method further comprises the steps of, via said at least one control unit:
(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece,
(b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,
(c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot,
(d) repeating steps a-c for different predetermined beam powers, and
(e) repeating steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

15. The computer-implemented method according to claim 1 , wherein:
the method is further configured for verifying a size of the at least one energy beam spot; and
the method further comprises the steps of, via said at least one control unit:
(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece,
(b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,
(c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot,
(d) repeating step a-c for different predetermined beam powers, and
(e) repeating step a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the maximum intensity deviate less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

Assignees

• Arcam Ab

Inventors

• Snis Anders

Classifications

• G01M11/02

  Testing optical properties · CPC title

• B23K15/02 Primary

  Control circuits therefor · CPC title

• B22F12/90

  Means for process control, e.g. cameras or sensors · CPC title

• B22F12/52

  Hoppers · CPC title

• B22F10/31

  Calibration of process steps or apparatus settings, e.g. before or during manufacturing · CPC title