Group 5 metal oxo-alkoxo complex, method for producing same, and method for manufacturing group 5 metal oxide film

Patent metadata

Field	Value
Publication number	US-9663541-B2
Application number	US-201314758142-A
Country	US
Kind code	B2
Filing date	Dec 27, 2013
Priority date	Dec 28, 2012
Publication date	May 30, 2017
Grant date	May 30, 2017

Abstract

A compound useful for the manufacture of a Group 5 metal oxide film is provided. The compound is a Group 5 metal oxo-alkoxo complex represented by the following formula (A), and after preparing a film-forming material solution containing the compound and an organic solvent, a Group 5 metal oxide film can be manufactured using the film-forming material solution:

M α (μ 4 -O) β (μ 3 -O) γ (μ-O) δ (μ-OR A ) ∈ (OR A ) ζ (R A OH) η X θ Y ι   (A)

(wherein M represents a niobium atom, etc.; R A represents an alkyl group; X represents an alkylenedioxy group; Y represents a carboxy group, etc.; α represents an integer of 3 to 10; β represents 0 or 1; γ represents an integer of 0 to 8; δ represents an integer of 2 to 9; ∈ represents an integer of 0 to 6; ζ represents an integer of 6 to 16; η represents an integer of 0 to 4; θ represents an integer of 0 to 2; and ι represents an integer of 0 to 6).

First claim

The invention claimed is:

1. A Group 5 metal oxo-alkoxo complex represented by formula (1), chemical formula (3), chemical formula (4) or chemical formula (5):
M A (μ 4 -O) B (μ 3 -O) C (μ-O) D (μ-O t Bu) E (O t Bu) F   (1)

wherein M represents a niobium atom or a tantalum atom; and A, B, C, D, E and F represent respectively numerical values of 10, 1, 8, 8, 0 and 16 or of 9, 1, 5, 9, 1 and 14:

2. The Group 5 metal oxo-alkoxo complex according to claim 1 ,
wherein the Group 5 metal oxo-alkoxo complex is represented by formula (1).

3. The Group 5 metal oxo-alkoxo complex according to claim 1 ,
wherein the Group 5 metal oxo-alkoxo complex is represented by formula (1A):

wherein M represents a niobium atom or a tantalum atom, or formula (1B):

wherein M represents a niobium atom or a tantalum atom.

4. The Group 5 metal oxo-alkoxo complex according to claim 1 ,
wherein the Group 5 metal oxo-alkoxo complex is represented by chemical formula (3) or chemical formula (4).

5. The Group 5 metal oxo-alkoxo complex according to claim 1 ,
wherein the Group 5 metal oxo-alkoxo complex is represented by chemical formula (5).

6. A method for producing the Group 5 metal oxo-alkoxo complex according to claim 1 , comprising:
reacting a metal imido-trialkoxo complex represented by formula (2):

wherein M represents a niobium atom or a tantalum atom; and R 1 represents a C 4 -C 12 tertiary alkyl group or a phenyl group represented by formula (2Ar):

wherein each of R a , R b , R c , R d and R e independently represents a hydrogen atom or a C 1 -C 6 alkyl group, which may be substituted,
with one or more oxidants selected from the group consisting of oxygen, air and ozone.

7. A method for producing the Group 5 metal oxo-alkoxo complex according to claim 1 , comprising:
heating a Group 5 metal oxo-alkoxo complex represented by chemical formula (3):

8. A method for producing the Group 5 metal oxo-alkoxo complex according to claim 1 , comprising:
heating a Group 5 metal oxo-alkoxo complex represented by chemical formula (4):

9. A method for producing the Group 5 metal oxo-alkoxo complex according to claim 1 , comprising:
reacting pentakis(tert-butyloxo)niobium (Nb(O t Bu) 5 ) with diacetone alcohol.

10. A method for producing the Group 5 metal oxo-alkoxo complex according to claim 1 , which is represented by chemical formula (3):

the method comprising:
reacting a metal imido-trialkoxo complex represented by formula (2a-Nb):

wherein R 1a represents a C 1 -C 12 alkyl group, with benzaldehyde.

11. A method for producing the Group 5 metal oxo-alkoxo complex according to claim 1 , which is represented by chemical formula (4):

the method comprising:
reacting a metal imido-trialkoxo complex represented by formula (2a-Nb):

wherein R 1a represents a C 1 -C 12 alkyl group, with an aldehyde represented by formula (7):

wherein R 2 represents a phenyl group or a C 4 -C 8 tertiary alkyl group.

12. A method for producing the Group 5 metal oxo-alkoxo complex according to claim 1 , which is represented by chemical formula (5):

the method comprising:
reacting a metal imido-trialkoxo complex represented by formula (2a-Ta):

wherein R 1a represents a C 1 -C 12 alkyl group, with one or more oxidants selected from the group consisting of oxygen, air and ozone, at a temperature of less than 60° C.

13. A film-forming material, comprising:
a Group 5 metal oxo-alkoxo complex represented by formula (A):
M α (μ 4 -O) β (μ 3 -O) γ (μ-O) δ (μ-OR A ) ∈ (OR A ) ζ (R A OH) η X θ Y γ   (A)

wherein M represents a niobium atom or a tantalum atom; R A represents a C 1 -C 6 alkyl group; X represents a C 1 -C 8 alkylenedioxy group that may be substituted with a phenyl group; Y represents a C 2 -C 8 carboxy group that may be substituted with a halogen atom, or an acetylacetonate group; α represents an integer of 3 to 10; β represents 0 or 1; γ represents an integer of 0 to 8; δ represents an integer of 2 to 9; ∈ represents an integer of 0 to 6; ζ represents an integer of 6 to 16; η represents an integer of 0 to 4; θ represents an integer of 0 to 2; and τ represents an integer of 0 to 6, provided that α to τ represent integers satisfying 5α=2(β+γ+δ+θ)+∈+ζ+τ;
and an organic solvent, in a weight ratio of from 1:0.1 to 1:1,000,000.

14. The film-forming material according to claim 13 ,
wherein the Group 5 metal oxo-alkoxo complex represented by formula (A) is a Group 5 metal oxo-alkoxo complex represented by formula (1), chemical formula (3), chemical formula (4) or chemical formula (5):
M A (μ 4 -O) B (μ 3 -O) C (μ-O) D (μ-O t Bu) E (O t -Bu) F   (1)

wherein M represents a niobium atom or a tantalum atom; and A, B, C, D, E and F represent respectively numerical values of 10, 1, 8, 8, 0 and 16 or of 9, 1, 5, 9, 1 and 14:

15. The film-forming material according to claim 13 ,
wherein the organic solvent is an aliphatic hydrocarbon or an aromatic hydrocarbon.

16. A method for manufacturing a Group 5 metal oxide film, comprising:
applying the film-forming material according to claim 13 on a surface of a substrate; and
heat-treating the substrate.

17. A Group 5 metal oxide film, which is manufactured by the manufacturing method according to claim 16 .

Assignees

• Tosoh Corp
• Sagami Chemical Res Inst

Inventors

• ASANO Sachio
• Kinoshita Tomoyuki
• Hara Yasushi
• Hara Daiji
• Tanaka Ryoji
• Tada Ken-Ichi

Classifications

• H10P14/69397

  the material containing two or more metal elements · CPC title

• H10P14/69393

  the material containing tantalum, e.g. Ta2O5 · CPC title

• H10P14/6939

  characterised by the metal · CPC title

• H10P14/6516

  of treatments performed after formation of the materials · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title