High efficiency buffer stocker

Patent metadata

Field	Value
Publication number	US-9659801-B2
Application number	US-201414496122-A
Country	US
Kind code	B2
Filing date	Sep 25, 2014
Priority date	May 9, 2006
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A high-efficiency buffer stocker is disclosed. The buffer stocker includes an overhead transport track for supporting overhead transport vehicles carrying wafer containers and at least one conveyor system or conveyor belt provided beneath the overhead transport track for receiving the wafer containers from the overhead transport vehicles on the overhead transport track. The buffer stocker is capable of absorbing the excessive flow of wafer containers between a processing tool and a stocker, for example, to facilitate the orderly and efficient flow of wafers between sequential process tools in a semiconductor fabrication facility, for example.

First claim

What is claimed is:

1. A buffer stocker system comprising:
an overhead transport track supporting a plurality of movable overhead transport vehicles each configured for carrying a container, the overhead transport track comprising at least a first position and a second position;
a first elongated conveyor belt at a first elevation having a first end and a second end, the first end corresponding to the first position of the overhead transport track; and
a second elongated conveyor belt at a second elevation having a first end and a second end, the first end corresponding to the second position of the overhead transport track, wherein the second elongated conveyor belt is positioned vertically directly beneath the first elongated conveyor belt, wherein the first elongated conveyor belt and the second elongated conveyor belt are overlapping in plan view,
wherein the first end of the second elongated conveyor belt extends longitudinally beyond the first end of the first elongated conveyor belt, and
wherein the first elongated conveyor belt and the second elongated conveyor belt are each configured to receive a container from one of the plurality of moveable overhead transport vehicles at respective first or second positions.

2. The buffer stocker of claim 1 , wherein the overhead transport track comprises at least a third position corresponding to the second end of the first elongated conveyor belt, wherein the first elongated conveyor belt is configured to transport the container received at the first end to the second end, and wherein the moveable overhead transport vehicles are configured to retrieve the container from the third position.

3. The buffer stocker of claim 2 , wherein the overhead transport track comprises at least a fourth position corresponding to the second end of the second elongated conveyor belt, wherein the second elongated conveyor belt is configured to transport the container received at the first end to the second end, wherein the second end of the second elongated conveyor belt extends longitudinally beyond the second end of the first elongated conveyor belt, and wherein the moveable overhead transport vehicles are configured to retrieve the container from the fourth position.

4. The buffer stocker of claim 3 , comprising a third conveyor belt at a third elevation having a first end and a second end, wherein the overhead transport track comprises a fifth position corresponding to the first end of the third conveyor belt,
wherein the third conveyor belt is positioned vertically directly beneath the second elongated conveyor belt,
wherein the first end of the third conveyor belt extends longitudinally beyond the first end of the second elongated conveyor belt,
wherein the third conveyor belt is configured to receive a container from one of the plurality of moveable overhead transport vehicles at the fifth position, and
wherein the first elongated conveyor belt, the second elongated conveyor belt, and the third conveyor belt are overlapping in plan view.

5. The buffer stocker of claim 4 , wherein the overhead transport track comprises a sixth position corresponding to the second end of the third conveyor belt, wherein the third conveyor belt is configured to transport the container received at the first end to the second end, wherein the second end of the third conveyor belt extends longitudinally beyond the second end of the second elongated conveyor belt, and wherein the moveable overhead transport vehicles are configured to retrieve the container from the sixth position.

6. The buffer stocker of claim 5 , wherein the moveable overhead transport vehicles are configured to sequentially stop at each of the first, second, third, fourth, fifth, and sixth track points.

7. The buffer stocker of claim 6 , wherein the transport vehicles are configured to load the first elongated conveyor belt to capacity before loading the second elongated conveyor belt.

8. The buffer stocker of claim 1 , comprising a controller operably connected to the first and second elongated conveyor belts and configured to control a direction of travel of the first and second elongated conveyor belts.

9. The buffer stocker of claim 1 , wherein the container to be transferred is configured to contain a wafer.

10. A buffer stocker system comprising:
a longitudinally-extending transport track adapted to move a plurality of transport vehicles horizontally along the transport track, the plurality of transport vehicles being configured for carrying, lowering, and raising containers, wherein the longitudinally-extending transport track comprises at least a first position and a second position; and
a plurality of conveyor systems associated with the transport track for temporarily storing the containers, the plurality of conveyor systems each comprising:
a first elongated conveyor belt having a first end and a second end, the first end corresponding to the first position of the overhead transport track; and
a second elongated conveyor belt having a first end and a second end, the first end corresponding to the second position of the overhead transport track, wherein the second elongated conveyor belt is positioned vertically directly beneath the first elongated conveyor belt, wherein the first end of the second elongated conveyor belt extends longitudinally beyond the first end of the first elongated conveyor belt, wherein the first elongated conveyor belt and the second elongated conveyor belt are overlapping in plan view, and
wherein the first elongated conveyor belt and the second elongated conveyor belt are each configured to receive a container from one of the plurality of transport vehicles at respective first or second positions.

11. The buffer stocker of claim 10 , wherein the transport track comprises at least a third position corresponding to the second end of the first elongated conveyor belt, wherein the first elongated conveyor belt is configured to transport the container received at the first end to the second end, and wherein the transport vehicles are configured to retrieve the container from the third position.

12. The buffer stocker of claim 11 , wherein the transport track comprises at least a fourth position corresponding to the second end of the second elongated conveyor belt, wherein the second elongated conveyor belt is configured to transport the container received at the first end to the second end, and wherein the transport vehicles are configured to retrieve the container from the fourth position.

13. The buffer stocker of claim 12 , wherein the second end of the second elongated conveyor belt extends longitudinally beyond the first end of the first elongated conveyor belt.

14. The buffer stocker of claim 12 , comprising a third conveyor belt having a first end and a second end, wherein the transport track comprises a fifth position corresponding to the first end of the third conveyor belt,
wherein the third conveyor belt is positioned vertically directly beneath the second elongated conveyor belt,
wherein the first end of the third conveyor belt extends longitudinally beyond the first end of the second elongated conveyor belt,
wherein the third conveyor belt is configured to receive a container from one of the transport vehicles at the fifth position, and
wherein the first elongated conveyor belt, the second elongated conveyor belt, and the third conveyor belt are overlapping in plan view.

15. The buffer stocker of claim 14 , wherein the transport track comprises a sixth position corresponding to the second end of the third conveyor belt, wherein the third conveyor belt is configured to transport th

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Ma Kuo-Lei
• Huang Chih-Hung
• Chiang Wen-Chung
• Hsieh Min-Yu
• Lee Fiona H

Classifications

• H10P72/3404

  Storage means · CPC title

• H10P72/3221

  Overhead conveying · CPC title

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• H10P72/3208

  Changing the direction of the conveying path · CPC title

• H10P72/3222 Primary

  Loading to or unloading from a conveyor · CPC title