Coils utilized in vapor deposition applications and methods of production

Patent metadata

Field	Value
Publication number	US-9659758-B2
Application number	US-8602205-A
Country	US
Kind code	B2
Filing date	Mar 22, 2005
Priority date	Mar 22, 2005
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A coil assembly for utilization in a vapor deposition system is described herein that includes at least one subject coil having a length, a height, an inside edge, an outside edge and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the thickness of the subject coil is reduced by at least 20% as compared to a reference coil. A coil assembly is also described herein for utilization in a vapor deposition system that includes at least one subject coil having a length, a height, an inside edge, an outside edge, and a thickness, wherein the thickness of the subject coil is measured as the distance between the inside edge and the outside edge and wherein at least part of the height of at least part of the subject coil is reduced by at least 20% as compared to the height of a reference coil.

First claim

We claim:

1. A coil assembly for utilization in a vapor deposition system comprising:
at least one metal or metal alloy vapor deposition system coil comprising a length of greater than 30 cm, a height of less than about 76 mm, an inside edge, an outside edge, and a maximum thickness of less than about 5 mm, wherein the thickness of the coil is measured as the distance between the inside edge and the outside edge and wherein the thickness of a first portion of the coil is reduced by at least 20% as compared to the maximum thickness of the coil, and wherein at least part of the thickness of the coil comprises an angle from the inside edge to the outside edge of the coil to form a top edge having a point and wherein the outside edge of the coil is vertical up to the point of the top edge.

2. The coil assembly of claim 1 , wherein the metal or metal alloy comprises a transition metal.

3. The coil assembly of claim 1 , wherein the thickness of the coil is reduced by at least 30% as compared to the maximum thickness of the coil.

4. The coil assembly of claim 3 , wherein the thickness of the first portion of the subject coil is reduced by at least 40% as compared to the maximum thickness of the coil.

5. The coil assembly of claim 4 , wherein the thickness of the coil is reduced by at least 50% as compared to the maximum thickness of the coil.

6. The coil assembly of claim 1 , wherein the distance between the inside edge and the outside edge comprises at least a 30 degree angle.

7. The coil assembly of claim 6 , wherein the distance between the inside edge and the outside edge comprises at least a 60 degree angle.

8. A coil assembly for utilization in a vapor deposition system, the assembly comprising:
a metal or metal alloy vapor deposition system coil having a height, an inside edge, an outside edge, a thickness measured between the inside edge and the outside edge, a first end, and a beveled edge at the first end, wherein the thickness of the coil decreases at an angle from the inside edge to the outside edge to form the beveled edge, and wherein the angle is between 30 degrees and 60 degrees.

9. The coil assembly of claim 8 , wherein the metal or metal alloy comprises a transition metal.

10. The coil assembly of claim 8 , wherein the beveled edge comprises a point.

11. The coil assembly of claim 10 , wherein the outside edge is straight until the point.

12. A coil assembly for utilization in a vapor deposition system, the assembly comprising:
an annular metal or metal alloy vapor deposition system coil having a diameter, an inside edge, an outside edge, a top edge, and a thickness measured in a cross-section taken across the diameter between the inside edge and the outside edge, wherein the thickness of the coil decreases at an angle from the inside edge to the outside edge at the top edge of the coil.

13. The coil assembly of claim 12 , wherein the top edge is beveled.

14. The coil assembly of claim 12 , wherein the top edge comprises a point.

15. The coil assembly of claim 14 , wherein the outside edge is straight until the point.

16. The coil assembly of claim 12 , wherein the coil is conductive.

17. The coil assembly of claim 12 , wherein the angle is between 30 degrees and 60 degrees.

Assignees

• Lee Eal
• Truong Nicole
• Prater Robert
• Sand Norm
• Honeywell Int Inc

Inventors

• Lee Eal
• Truong Nicole
• Prater Robert
• Sand Norm

Classifications

• H01J37/3438

  Electrodes other than cathode · CPC title

• H01J37/3405 Primary

  Magnetron sputtering · CPC title

• C23C14/564

  Means for minimising impurities in the coating chamber such as dust, moisture, residual gases · CPC title

• H01J37/321

  the radio frequency energy being inductively coupled to the plasma · CPC title

• H01J37/32651

  Shields, e.g. dark space shields, Faraday shields · CPC title