Shielding device for substrate edge protection and method of using same

Patent metadata

Field	Value
Publication number	US-9659677-B2
Application number	US-201414317167-A
Country	US
Kind code	B2
Filing date	Jun 27, 2014
Priority date	Jun 27, 2014
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

A shielding device for shielding an edge of a semiconductor substrate can include a multisided frame defining a perimeter of an enclosed area, and a shield coupled to the frame. The shield may be configured to move between a first position where the shield is retracted to the perimeter and a second position where shield advanced into the enclosed area. A method for processing a semiconductor substrate includes placing a semiconductor substrate in position in an implantation chamber, covering edges of the semiconductor substrate by pushing shields into engagement with the edges, performing an ion implantation procedure, and retracting the shields from the edges.

First claim

What is claimed is:

1. A shielding device for shielding an edge of a semiconductor substrate, comprising:
a multisided frame defining a perimeter of an enclosed area,
a shield coupled to the frame, said shield configured to move between a first position where the shield is retracted to the perimeter and a second position where the shield advanced into the enclosed area, and
at least one spring biasing the shield toward the second position.

2. The shielding device of claim 1 , wherein the perimeter comprises four sides and four corners, and wherein the shielding device comprises a side shield at each of the four sides, each side shield configured to move in tandem laterally between the first and second positions.

3. The shielding device of claim 2 , wherein the shielding device comprises a corner shield at each of the four corners, each corner shield configured to move in tandem diagonally between the first and second positions.

4. The shielding device of claim 3 , wherein each corner shield is coupled to at least one side shield.

5. The shielding device of claim 1 , comprising at least one actuator that retracts the shield to the first position.

6. The shielding device of claim 1 , comprising a scissor mechanism comprising pivotally attached first and second elongated members that cross one another at a pivot, wherein said shield is coupled to the scissor mechanism on a first side of said pivot for movement between the first and second positions such that:
when the shield moves toward the first position, the first and second elongate members on the first side of the pivot move toward one another, and the first and second elongate members on a second side of the pivot opposite the first side of the pivot move away from one another,
when the shield moves toward the second position, the first and second elongate members on the first side of the pivot move away from one another, the first and second elongate members on the second side of the pivot move toward from one another.

7. The shielding device of claim 6 , comprising an actuator for forcing the shield toward the first position.

8. The shielding device of claim 7 , wherein the actuator is configured to force the first and second elongate members on the second side of the pivot apart by advancing a pin between the first and second elongate members on the second side of the pivot.

9. The shielding device of claim 8 , wherein the pin is provided with a taper, and wherein the first and second elongate members are provided with angled surfaces on the second side of the pivot.

10. The shielding device of claim 6 , comprising a plurality of said scissor mechanisms.

11. The shielding device of claim 10 , wherein the plurality of scissor mechanisms are actuated by a plurality of pins.

12. The shielding device of claim 1 , wherein the multisided frame defines a plurality of perimeters, a plurality of enclosed areas, and a plurality of shields coupled to the frame, said plurality of shields configured to move between a first position in which the plurality of shields are retracted to associated ones of said plurality of perimeters and a second position in which the plurality of shields are associated ones of said plurality of enclosed areas.

13. The shielding device of claim 12 , wherein the shielding device comprises a plurality of scissor mechanisms coupled to the frame between associated ones of said plurality of enclosed areas, and wherein operation of the plurality of scissor mechanisms causes the plurality of shields to move in tandem between the first position and the second position.

14. A shielding device for shielding an edge of a semiconductor substrate comprising:
a multisided frame defining a perimeter of an enclosed area,
a plurality of shields coupled to the frame, said shields configured to move between a first position where the shields are retracted to the perimeter and a second position where the shields are advanced into the enclosed area, a plurality of scissor-type mechanisms, and
a plurality of springs,
wherein the shields are coupled to the scissor mechanisms, wherein the shields are biased to the second position by the plurality of springs and wherein the shields are forced to the first position by advancing pins into the scissor mechanisms.

15. A system comprising the shielding device of claim 14 and an additional device comprising a plurality of pins and an actuator configured to advance and retract the pins.

Assignees

• Varian Semiconductor Equipment Ass Inc

Inventors

• Webb Aaron P
• Carlson Charles T
• Weaver William T
• Miller Timothy J
• Strassner James D

Classifications

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P30/20

  into semiconductor materials, e.g. for doping · CPC title

• G21F3/00 Primary

  Shielding characterised by its physical form, e.g. granules, or shape of the material · CPC title

• H01L21/68728

  Electricity · mapped topic