Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
US9658244B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9658244-B2 |
| Application number | US-201414326224-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 8, 2014 |
| Priority date | Jul 8, 2014 |
| Publication date | May 23, 2017 |
| Grant date | May 23, 2017 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
Techniques of manufacturing an accelerometer as disclosed herein include positioning an accelerometer between a first stator and a second stator, and the accelerometer comprises a plurality of features. In some examples, the plurality of features include a proof mass, a support structure defining a plane and configured to support the proof mass, a flexure configured to flexibly connect the proof mass to the support structure, and a plurality of raised pads, the plurality comprising at least one raised pad positioned between the flexure and an exterior of the support structure, wherein the at least one raised pad is configured to be isolatable. Techniques of manufacturing the accelerometer as disclosed herein further include compressing the first stator and the second stator onto the accelerometer, attaching a bellyband to the first stator and the second stator, and isolating the at least one raised pad.
Opening claim text (preview).
The invention claimed is: 1. A device comprising: a proof mass; a support structure surrounding the proof mass, defining a plane, and configured to support the proof mass; a flexure connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about the plane defined by the support structure; at least four raised pads arranged on a common surface of the support structure, wherein at least one raised pad is positioned between the flexure and an exterior of the support structure, and wherein the at least one raised pad is configured to be isolatable; and two pad flexures connected to the common surface of the support structure and the at least one raised pad, wherein the two pad flexures are configured to be removable, wherein the device is comprised of a monolithic material. 2. The device of claim 1 , wherein each raised pad of the at least four raised pads is connected to the support structure by at least two pad flexures. 3. The device of claim 2 , wherein each pad flexure is connected to a respective raised pad at a respective location of the respective raised pad, and wherein the respective location is based on a proximity of the respective raised pad to the flexure. 4. The device of claim 2 , wherein the at least one raised pad of the at least four raised pads includes a first raised pad, and wherein two pad flexures are connected to a second raised pad of the at least four raised pads between a middle of the second raised pad and the support structure. 5. The device of claim 1 , wherein the accelerometer comprises a circular shape, and wherein the two pad flexures are thin in a radial direction of the accelerometer and stiff in a circumferential direction and a vertical direction of the accelerometer. 6. The device of claim 1 , wherein the two pad flexures further include a first pad flexure and a second pad flexure. 7. The device of claim 1 , wherein the two pad flexures are connected to the at least one raised pad between a corner of the at least one raised pad and the support structure. 8. The device of claim 1 , wherein the two pad flexures are connected to the at least one raised pad and an exterior of the support structure. 9. A device comprising: a proof mass; a support structure surrounding the proof mass, defining a plane, and configured to support the proof mass; a flexure connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about the plane defined by the support structure; and a plurality of raised pads arranged on a common surface of the support structure, wherein at least one raised pad of the plurality of raised pads is configured to be isolatable; and two pad flexures connected to the common surface of the support structure and the at least one raised pad, wherein the two pad flexures are configured to be removable, wherein the device is comprised of a monolithic material.
by measuring the force required to restore a proofmass subjected to inertial forces to a null position · CPC title
used for thermal compensation · CPC title
the mass being of the paddle type being suspended at one of its longitudinal ends · CPC title
Electrical equipment · CPC title
Flexural strength; Flexion stiffness · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.