Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing

Patent metadata

Field	Value
Publication number	US-9656293-B2
Application number	US-201414213243-A
Country	US
Kind code	B2
Filing date	Mar 14, 2014
Priority date	Mar 15, 2013
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

In a method for forming nanopores, two opposing surfaces of a membrane are exposed to an electrically conducting liquid environment. A nanopore nucleation voltage pulse, having a first nucleation pulse amplitude and duration, is applied between the two membrane surfaces, through the liquid environment. After applying the nanopore nucleation voltage pulse, the electrical conductance of the membrane is measured and compared to a first prespecified electrical conductance. Then at least one additional nanopore nucleation voltage pulse is applied between the two membrane surfaces, through the liquid environment, if the measured electrical conductance is no greater than the first prespecified electrical conductance. At least one nanopore diameter tuning voltage pulse, having a tuning pulse voltage amplitude and duration, is applied between the two membrane surfaces, through the liquid environment, if the measured electrical conductance is greater than the first prespecified electrical conductance and no greater than a second prespecified electrical conductance.

First claim

We claim:

1. A method for forming a nanopore in a membrane comprising:
exposing two opposing surfaces of a membrane to an electrically conducting liquid environment;
applying a nanopore nucleation voltage pulse, having a first nucleation pulse amplitude, between the two membrane surfaces, through the liquid environment, the nanopore nucleation voltage pulse having a pulse duration;
after applying the nanopore nucleation voltage pulse, measuring the electrical conductance of the membrane and comparing the measured electrical conductance to a first prespecified electrical conductance;
applying at least one additional nanopore nucleation voltage pulse between the two membrane surfaces, through the liquid environment, each additional nanopore nucleation voltage pulse being applied if the measured electrical conductance is no greater than the first prespecified electrical conductance; and
applying at least one nanopore diameter tuning voltage pulse, having a tuning pulse voltage amplitude, between the two membrane surfaces, through the liquid environment, each nanopore diameter tuning voltage pulse being applied if the measured electrical conductance is greater than the first prespecified electrical conductance and no greater than a second prespecified electrical conductance, each nanopore diameter tuning voltage pulse having a pulse duration.

2. The method of claim 1 wherein applying at least one nanopore diameter tuning voltage pulses comprises:
applying a first nanopore diameter tuning voltage pulse, having a first tuning pulse voltage amplitude, between the two membrane surfaces, through the liquid environment, the nanopore diameter tuning voltage pulse having a pulse duration;
after applying the first nanopore diameter tuning voltage pulse, measuring the electrical conductance of the membrane and comparing the measured electrical conductance to a third prespecified electrical conductance;
applying at least one additional nanopore diameter tuning voltage pulse, having a second tuning pulse voltage amplitude that is greater than the first, tuning pulse voltage amplitude, between the two membrane surfaces, through the liquid environment, each additional nanopore diameter tuning voltage pulse being applied if the measured electrical conductance is no greater than the third prespecified electrical conductance; and
applying at least one additional nanopore diameter tuning voltage pulse, having the first tuning pulse voltage amplitude, between the two membrane surfaces, through the liquid environment, the additional nanopore diameter tuning voltage pulse being applied if the measured electrical, conductance is greater than the third prespecified electrical conductance and no greater than the second prespecified electrical conductance.

3. The method of claim 1 wherein the pulse duration of each nanopore nucleation voltage pulse and the pulse duration of each nanopore diameter tuning voltage pulse is no greater than 250×10 −9 seconds.

4. The method of claim 2 wherein the pulse duration of at least one nanopore diameter tuning voltage pulse is less than a pulse duration of a previously applied nanopore diameter tuning voltage pulse.

5. The method of claim 1 wherein all nanopore nucleation voltage pulses have an equal pulse duration.

6. The method of claim 1 wherein all nanopore diameter tuning voltage pulses have an equal pulse duration.

7. The method of claim 1 wherein all nanopore nucleation voltage pulses and all nanopore diameter tuning voltage pulses have an equal pulse duration.

8. The method of claim 1 further comprising measuring electrical leakage conductance of the membrane before applying a first nanopore nucleation voltage pulse between the two membrane surfaces, the measured electrical leakage conductance being designated as the first prespecified electrical conductance.

9. The method of claim 1 wherein measuring electrical leakage conductance of the membrane comprises applying a measurement voltage pulse, having a measuring pulse amplitude, between the two membrane surfaces, through the liquid environment, the measuring pulse amplitude being less than 300 mV.

10. The method of claim 1 wherein, applying at least one additional nanopore nucleation voltage pulse between the two membrane surfaces comprises applying at least one additional nanopore nucleation voltage pulse having a second nucleation pulse amplitude that is greater than the first nucleation pulse amplitude, through the liquid environment, if the measured electrical conductance is less than the first prespecified electrical conductance.

11. The method of claim 10 wherein each additional nucleation pulse amplitude is at least 1 V greater than the a previous nucleation pulse amplitude.

12. The method of claim 1 wherein each additional nanopore nucleation voltage pulse is applied and the electrical conductance of the membrane measured until the measured electrical conductance is greater than the first prespecified electrical conductance.

13. The method of claim 1 wherein the second prespecified electrical conductance corresponds to a membrane electrical conductance for a membrane including a nanopore of a prespecified diameter.

14. The method of claim 2 wherein the third prespecified electrical conductance is greater than the first prespecified electrical conductance.

15. The method of claim 2 wherein the third prespecified electrical conductance is the electrical conductance measured before application of a first nanopore diameter tuning voltage pulse.

16. The method of claim 1 wherein the membrane comprises an atomically-thin material of no more than 50 nm in thickness.

17. The method of claim 1 wherein the membrane comprises graphene.

18. The method of claim 1 wherein the electrically conducting liquid environment comprises an electrolytic solution.

19. The method of claim 1 further comprising first processing the membrane to produce at least one localized membrane site having a material condition that imposes nanopore nucleation at that site.

20. The method of claim 1 further comprising including in the electrically conducting liquid environment a chemical species to modify at least one of the membrane and a nucleated nanopore.

21. The method of claim 1 further comprising:
after applying at least one nanopore diameter tuning voltage pulse, adding to the liquid environment, on one side of the two opposing membrane surfaces, a polymer molecule species; and
applying a translocation voltage through the liquid environment, between the two opposing membrane surfaces, to cause the polymer molecule species to translocate through a nanopore in the membrane.

22. The method of claim 21 wherein the polymer molecule species comprises at least a portion of a DNA strand.

23. A method for forming a nanopore in a membrane comprising:
exposing two opposing surfaces of a membrane to an electrically conducting liquid environment;
applying at least one nanopore nucleation voltage pulse, having a preselected nucleation pulse amplitude and preselected pulse duration known to produce nanopore nucleation in the membrane, the nanopore nucleation voltage pulse being applied between the two membrane surfaces, through the liquid environment, without measuring electrical conductance of the membrane during the nucleation voltage pulse application, to produce at the membrane a nanopore nucleation site; and
after producing the nanopore nucleation site by applying the nanopore nucleation voltage puls

Assignees

• Harvard College

Inventors

• Kuan Aaron T
• Golovchenko Jene A

Classifications

• B05D1/34 Primary

  Applying different liquids or other fluent materials simultaneously · CPC title

• G01N33/48721

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title

• B01D67/0062

  by micromachining techniques, e.g. using masking and etching steps, photolithography · CPC title

• B01D2323/35

  Use of magnetic or electrical fields · CPC title

• B01D67/0034

  by micromachining techniques, e.g. using masking and etching steps, photolithography · CPC title