Method to produce chemical pattern in micro-fluidic structure

Patent metadata

Field	Value
Publication number	US-9656260-B2
Application number	US-201615167764-A
Country	US
Kind code	B2
Filing date	May 27, 2016
Priority date	Sep 27, 2013
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

The present disclosure provides flow cells and methods of fabricating flow cells. The method includes combining three portions: a first substrate, a second substrate, and microfluidic channels between the first substrate and the second substrate having walls of a photoresist dry film. Through-holes for inlet and outlet are formed in the first substrate or the second substrate. Patterned capture sites are stamped on the first substrate and the second substrate by a nanoimprint lithography process. In other embodiments, parts of the patterned capture sites are selectively attached to a surface chemistry pattern formed of silicon oxide islands each disposed on an outcrop of a soft bottom layer.

First claim

What is claimed is:

1. A method of forming a flow cell, the method comprising:
stamping a patterned adhesive promoter on a first substrate using nanoimprint lithography;
stamping a bio-medium on the patterned adhesive promoter on the first substrate using nanoimprint lithography to form a first capture site pattern;
forming a patterned polymer layer on at least one of the first substrate and a second substrate; and
polymer bonding the first substrate to the second substrate, wherein the at least one of the first substrate and the second substrate is transparent.

2. The method of claim 1 , further comprising:
soft baking the first substrate after stamping the bio-medium.

3. The method of claim 1 , further comprising:
stamping a patterned adhesive promoter on the second substrate using nanoimprint lithography; and
stamping a bio-medium on the patterned adhesive promoter on the second substrate using nanoimprint lithography to form a second capture site pattern.

4. The method of claim 3 , further comprising:
soft baking the first substrate and the second substrate after stamping a bio-medium.

5. The method of claim 3 , wherein the first capture site pattern and the second capture site pattern are aligned.

6. The method of claim 1 , further comprising:
laser drilling one or more through holes in the second substrate.

7. The method of claim 1 , wherein the polymer bonding comprises:
aligning the first substrate and the second substrate;
mounting the first substrate and the second substrate; and
baking the first substrate and the second substrate at a temperature less than 100 degrees Celsius.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Tsai Shang-Ying
• Hung Li-Min
• Peng Jung-Huei

Classifications

• B01J2219/00382

  Stamping · CPC title

• B01J2219/00286

  Reactor vessels with top and bottom openings · CPC title

• B01L2300/0636

  Integrated biosensor, microarrays · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• B01L3/502715

  characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces · CPC title