Method and system for controlling convection within a plasma cell

Patent metadata

Field	Value
Publication number	US-9655225-B2
Application number	US-201514935774-A
Country	US
Kind code	B2
Filing date	Nov 9, 2015
Priority date	May 29, 2013
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

A plasma cell for controlling convection includes a transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of the volume of gas. The transmission element of the plasma cell is at least partially transparent to at least a portion of the illumination generated by the illumination source and at least a portion of broadband radiation emitted by the plasma. The plasma cell also includes one or more gas return channels formed within the transmission element for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

First claim

What is claimed:

1. A plasma cell for controlling convection comprising:
a transmission element having one or more openings,
the transmission element configured to receive illumination from an illumination source in order to generate a plasma within a plasma generation region of a volume of gas, wherein the plasma emits broadband radiation, wherein the transmission element of the plasma cell is at least partially transparent to at least a portion of the illumination generated by the illumination source and at least a portion of the broadband radiation emitted by the plasma; and
one or more gas return channels formed within the transmission element for transferring gas from a region above the plasma generation region to a region below the plasma generation region.

2. The plasma cell of claim 1 , wherein the one or more gas return channels are configured to balance a flow of gas from the plume of the plasma with a flow of gas delivered to the plasma.

3. The plasma cell of claim 2 , wherein the one or more gas return channels are configured to balance a flow of gas from the plume of the plasma with a flow of gas delivered to the plasma in order to maintain a gas flow rate of a center circulation loop within the transparent element at or below a selected level.

4. The plasma cell of claim 1 , wherein the one or more gas return channels are configured to transfer gas from a top circulation loop to a bottom circulation loop.

5. The plasma cell of claim 1 , further comprising:
a top flow control element disposed above the plasma generation region and within the transmission element, the top flow control element including one or more internal channels configured to direct at least a portion of a plume of the plasma upward; and
a bottom flow control element disposed below the plasma generation region and within the transmission element, the bottom flow control element including one or more internal channels configured to direct gas upward toward the plasma generation region.

6. The plasma cell of claim 5 , wherein at least one of the top flow control or the bottom flow control element comprises at least one of a top deflector or a bottom deflector.

7. The plasma cell of claim 5 , wherein the top flow control element and the transmission element are arranged to form one or more top circulation loops.

8. The plasma cell of claim 5 , wherein the bottom flow control element and the transmission element are arranged to form one or more bottom circulation loops.

9. The plasma cell of claim 5 , wherein at least one of the top flow control element or the bottom flow control element are formed from at least one of a metal material or a non-metal material.

10. The plasma cell of claim 5 , wherein at least one of the top flow control element or the bottom flow control are configured to shield one or more components of the plasma cell from radiation.

11. The plasma cell of claim 5 , wherein one or more internal channels of the top flow control element are coated with one or more reflective materials.

12. The plasma cell of claim 5 , further comprising:
one or more features formed on at least one of the external surface or internal surface of at least one of the top flow control element or the bottom flow control element configured to impart rotational motion to a flow of gas within the transmission element.

13. The plasma cell of claim 12 , wherein the one or more features comprise:
rifling features formed within at least one of the external surface or internal surface of at least one of the top flow control element or the bottom flow control element.

14. The plasma cell of claim 5 , wherein the bottom flow control element is heated in order to pump gas upward toward the plasma generation region.

15. The plasma cell of claim 5 , further comprising:
one or more convection enhancement elements disposed within one or more internal channels of the bottom flow control element.

16. The plasma cell of claim 15 , wherein the one or more convection enhancement elements comprise:
one or more gas pumps disposed within the one or more internal channels of the bottom flow control element.

17. The plasma cell of claim 16 , wherein the one or more gas pumps comprise:
one or more thermal pumps.

18. The plasma cell of claim 17 , wherein the one or more thermal pumps comprise:
at least one of one or more heated rods and one or more heated pipes.

19. The plasma cell of claim 17 , wherein the one or more thermal pumps are heated by absorption of plasma radiation from the plasma.

20. The plasma cell of claim 16 , wherein the one or more gas pumps comprise:
one or more mechanical pumps.

21. The plasma cell of claim 5 , further comprising:
one or more convention enhancement elements disposed within one or more internal channels of the top flow control element.

22. The plasma cell of claim 21 , wherein the one or more convection enhancement elements comprise:
one or more gas pumps.

23. The plasma cell of claim 22 , wherein the one or more gas pumps comprise:
one or more thermal pumps.

24. The plasma cell of claim 23 , wherein the one or more thermal pumps comprise:
at least one of one or more heated rods and one or more heated pipes.

25. The plasma cell of claim 23 , wherein the one or more thermal pumps are heated by absorption of radiation from the plasma.

26. The plasma cell of claim 5 , further comprising:
one or more thermal control elements disposed within the transmission element and positioned proximate to at least one of the top flow control element or the bottom flow control element.

27. The plasma cell of claim 26 , wherein the one or more thermal control elements comprise:
one or more heat exchangers elements disposed within the transmission element and positioned proximate to at least one of the top flow control element or the bottom flow control element.

28. The plasma cell of claim 26 , wherein the one or more thermal control elements comprise:
one or more cooling feedthroughs configured to transfer heat from at least one of the top flow control element or the bottom flow control element.

29. The plasma cell of claim 1 , further comprising:
one or more external control elements.

30. The plasma cell of claim 1 , wherein the one or more openings of the transmission element comprise:
a first opening at a first end of the transmission element; and
a second opening at a second end of the transmission element opposite the first end.

31. The plasma cell of claim 1 , wherein the transmission element includes at least a portion having at least one of a substantially cylindrical shape, a substantially spherical shape or a substantially ellipsoidal shape.

32. The plasma cell of claim 1 , wherein the transmission element has a composite geometrical shape.

33. The plasma cell of claim 1 , further comprising:
a first flange disposed at a first opening; and
a second flange disposed at a second opening, wherein the first flange and second flange are configured to contain the volume of gas within the transmission element.

34. The plasma cell of claim 1 , wherein the transmission element is formed from at least one of calcium fluoride, magnesium fluoride, crystalline quartz, sapphire and fused silica.

35. The plasma

Assignees

• Kla Tencor Corp

Inventors

• Bezel Ilya
• Shchemelinin Anatoly
• Derstine Matthew

Classifications

• H01J61/30 Primary

  Vessels; Containers · CPC title

• H05H1/24 Primary

  Generating plasma {(nuclear fusion reactors G21B1/00; gas-filled discharge reactors H01J37/32)} · CPC title

• H05G2/008

  involving an energy-carrying beam in the process of plasma generation · CPC title

• H01J65/04

  Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title

• H05G2/003

  the plasma being generated from a material in a liquid or gas state · CPC title