Annealing for damage free laser processing for high efficiency solar cells
US-9214585-B2 · Dec 15, 2015 · US
US9653638B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9653638-B2 |
| Application number | US-201314137970-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 20, 2013 |
| Priority date | Dec 20, 2013 |
| Publication date | May 16, 2017 |
| Grant date | May 16, 2017 |
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A method of fabricating a solar cell is disclosed. The method can include forming a dielectric region on a surface of a solar cell structure and forming a metal layer on the dielectric layer. The method can also include configuring a laser beam with a particular shape and directing the laser beam with the particular shape on the metal layer, where the particular shape allows a contact to be formed between the metal layer and the solar cell structure.
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What is claimed is: 1. A method of fabricating a solar cell, the method comprising: forming a dielectric region on a surface of a solar cell structure, the solar cell structure comprising a substrate; forming a metal foil on the dielectric region; configuring a laser beam with a particular shape; and directing the laser beam with the particular shape on the metal foil, wherein the particular shape allows a contact to be formed between the metal foil and the solar cell structure, wherein the metal foil stays intact over the contact; and subsequent to forming the contact between the metal foil and the solar cell structure with the laser beam, patterning the metal foil using a laser ablation process in a location different from a location of the contact, wherein patterning the metal foil using the laser ablation process comprises patterning the metal foil without patterning the substrate of the solar cell structure. 2. The method of claim 1 , wherein configuring a laser beam with a particular shape comprises spatially shaping the laser beam. 3. The method of claim 2 , wherein spatially shaping the laser beam comprises forming a top-hat spatial profile. 4. The method of claim 1 , wherein configuring a laser beam with a particular shape comprises temporally shaping the laser beam. 5. The method of claim 4 , wherein temporally shaping the laser beam comprises configuring the laser beam with a low power multi-pulse laser process. 6. The method of claim 1 , wherein forming a contact comprises forming an ohmic contact between the metal foil and the solar cell structure. 7. The method of claim 1 , wherein forming a dielectric region comprises performing a method selected from the group consisting of screen printing, spin coating, plating, chemical vapor deposition process (CVD), plasma-enhanced chemical vapor deposition (PECVD) and physical vapor deposition (PVD). 8. The method of claim 1 , wherein forming a metal foil comprises placing a patterned metal foil on the solar cell structure. 9. The method of claim 1 , wherein forming a metal foil comprises placing a non-patterned metal foil on the solar cell structure. 10. The method of claim 1 further comprising partially removing portions of the metal foil in an interdigitated pattern. 11. The method of claim 1 , wherein prior to forming a metal foil, partially removing the dielectric region in preparation to forming a contact between the metal foil and the solar cell structure. 12. The method of claim 11 , wherein partially removing the dielectric region comprises directing a laser beam on the dielectric region. 13. A method of fabricating a solar cell comprising a solar cell, the solar cell having a front side configured to face the sun during normal operation and a back side opposite the front side, and the method comprising: forming a dielectric region on a surface of a solar cell structure, the solar cell structure comprising a substrate; forming a metal foil on the dielectric region; configuring a laser beam with a particular shape; and directing the laser beam with the particular shape on the back side of solar cell structure, wherein the particular shape allows an ohmic contact to be formed between the metal foil and the solar cell structure, wherein the metal foil stays intact over the ohmic contact; and subsequent to forming the ohmic contact between the metal foil and the solar cell structure with the laser beam, patterning the metal foil using a laser ablation process in a location different from a location of the ohmic contact, wherein patterning the metal foil using the laser ablation process comprises patterning the metal foil without patterning the substrate of the solar cell structure. 14. The method of claim 13 , wherein configuring a laser beam with a particular shape comprises spatially shaping the laser beam. 15. The method of claim 13 , wherein configuring a laser beam comprises forming a top-hat spatial profile. 16. The method of claim 13 , wherein directing a laser beam comprises directing a laser beam having a spectrum selected from the group consisting of ultraviolet, infrared and green.
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