Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions

Patent metadata

Field	Value
Publication number	US-9650451-B2
Application number	US-201414188154-A
Country	US
Kind code	B2
Filing date	Feb 24, 2014
Priority date	Aug 7, 2002
Publication date	May 16, 2017
Grant date	May 16, 2017

Abstract

A fluorine-containing compound represented by the formula 1,

where R 1 is a methyl group or trifluoromethyl group,
each of R 2 and R 3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond,
l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and
when at least one of R 1 , R 2 and R 3 is in a plural number, the at least one of R 1 , R 2 and R 3 may be identical with or different from each other.

First claim

The invention claimed is:

1. A polymer prepared by a polymerization or copolymerization by directly using a fluorine-containing compound represented by formula 1,

wherein
R 1 is a methyl group or trifluoromethyl group,
R 2 and R 3 each independently represent a hydrogen atom or a group containing
(a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25, or
(b) an aromatic hydrocarbon group wherein at least one of R 2 and R 3 comprises a functional group selected from the group consisting of vinyl group, allyl group, acryloyl group, and methacryloyl group optionally comprises a substituent having at least one fluorine atom substituted for a part or all<hydrogen atoms of the functional group; and
the hydrocarbon group and the aromatic hydrocarbon group each independently and optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond,

Z represents 0 or 1, and
when at least one of R 1 , R 2 and R 3 is in a plural number, the at least one of R 1 , R 2 and R 3 may be identical with or different from each other.

2. A polymer according to claim 1 , wherein at least one of R 2 and R 3 comprises a substituent selected from the group consisting of trifluorovinyl group, difluorotrifluoromethylvinyl group, fluoroacryloyl group, trifluoromethylacryloyl group, and nonylfluorobutylacryloyl group.

3. A polymer according to claim 1 , wherein at least one of R 2 and R 3 comprises an acid-labile protecting group that optionally contains at least one of an oxygen atom, a carbonyl bond and a fluorine atom.

4. A method of using the polymer according to claim 1 , in the manufacture of an anti-reflection coating material for an ultraviolet or visible light, comprising dissolving the polymer in a solvent to form the anti-reflection coating material.

5. A method of using the polymer according to claim 1 in the manufacture of a resist composition, comprising dissolving the polymer in a solvent to form the resist composition.

Assignees

• Central Glass Co Ltd

Inventors

• Sumida Shinichi
• Komoriya Haruhiko
• Maeda Kazuhiko

Classifications

• Y10S430/111

  Polymer of unsaturated acid or ester · CPC title

• C08F14/18 Primary

  Monomers containing fluorine · CPC title

• C08F20/28

  containing no aromatic rings in the alcohol moiety · CPC title

• C08F2/00

  Processes of polymerisation · CPC title

• C09D125/16

  Homopolymers or copolymers of alkyl-substituted styrenes · CPC title