Method for manufacturing piezoelectric substrate
US-9219224-B2 · Dec 22, 2015 · US
Piezoelectric oriented ceramics and method of manufacturing the same
US9647198B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9647198-B2 |
| Application number | US-201414291515-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 30, 2014 |
| Priority date | Dec 12, 2011 |
| Publication date | May 9, 2017 |
| Grant date | May 9, 2017 |
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Abstract
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Piezoelectric oriented ceramics containing a Pb(Ti, Zr)O 3 -based compound having a high degree of orientation not lower than 0.64, which was calculated with the Lotgering method based on an X-ray diffraction pattern in a prescribed cross-section thereof, and having a sintered density not lower than 85% of a theoretical density.
First claim
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The invention claimed is: 1. Piezoelectric oriented ceramics mainly composed of a Pb(Ti,Zr)O 3 -based compound having a perovskite structure, having a degree of orientation not lower than 0.64, which is calculated with Lotgering method based on an X-ray diffraction pattern in a prescribed cross-section thereof, and having a sintered density not lower than 85% of a theoretical density, wherein single crystal particles forming said piezoelectric oriented ceramics are spherical. 2. The piezoelectric oriented ceramics according to claim 1 , wherein said piezoelectric oriented ceramics have a specific resistance not lower than 1.0×10 8 Ωm. 3. A method of manufacturing piezoelectric oriented ceramics having a degree of orientation not lower than 0.64, which is calculated with Lotgering method based on an X-ray diffraction pattern in a prescribed cross-section thereof, the method comprising: preparing single crystal powders containing a Pb(Ti,Zr)O 3 -based compound having a perovskite structure; fabricating a slurry containing said single crystal powders as a dispersion phase; obtaining a compact by forming said slurry in a magnetic field; and firing said compact for 24 hours or longer at a temperature lower by at least 100° C. than a firing temperature at which a sintered density is not lower than 85% of a theoretical density when firing for 3 hours; wherein single crystal particles forming said piezoelectric oriented ceramics are spherical. 4. The method of manufacturing piezoelectric oriented ceramics according to claim 3 , wherein the temperature is not lower than 950° C. and not higher than 1000° C. 5. The method of manufacturing piezoelectric oriented ceramics according to claim 3 , wherein the magnetic field is 12T.
Assignees
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Classifications
Processes involving a melting step · CPC title
Density · CPC title
Spheres · CPC title
- H01L41/1876Primary
Electricity · mapped topic
by d-values or two theta-values, e.g. as X-ray diagram · CPC title
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- What does patent US9647198B2 cover?
- Piezoelectric oriented ceramics containing a Pb(Ti, Zr)O 3 -based compound having a high degree of orientation not lower than 0.64, which was calculated with the Lotgering method based on an X-ray diffraction pattern in a prescribed cross-section thereof, and having a sintered density not lower than 85% of a theoretical density.
- Who is the assignee on this patent?
- Murata Manufacturing Co, Nat Inst For Materials Science
- What technology area does this patent fall under?
- Primary CPC classification H01L41/1876. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 09 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).